{"id":213,"date":"2022-03-28T04:09:05","date_gmt":"2022-03-28T04:09:05","guid":{"rendered":"http:\/\/semicon2.semicon.hiroshima-u.ac.jp\/?page_id=213"},"modified":"2026-02-17T07:48:33","modified_gmt":"2026-02-17T07:48:33","slug":"conference","status":"publish","type":"page","link":"https:\/\/semicon.hiroshima-u.ac.jp\/?page_id=213","title":{"rendered":"Conference"},"content":{"rendered":"\n

\u56fd\u969b\u4f1a\u8b70\u30fb\u56fd\u5185\u4f1a\u8b70<\/p>\n\n\n\n

2025\u5e74\u5ea6<\/p>\n\n\n\n

<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u3010Invited\u3011S. Higashi, \u201cSilicon CMOS technology on plastic for biomedical applications,\u201d 18th<\/sup> International Symposium on Nanomedicine (ISNM2025), (Hiroshima, Japan, Dec. 1-3, 2025). <\/em>SL1-02 P.33.<\/em><\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f \u5b8f\u660e, \u6771 \u6e05\u4e00\u90ce\u3001\u201c\u30b7\u30ea\u30b3\u30f3\u30ad\u30e3\u30c3\u30d7\u30a2\u30cb\u30fc\u30eb\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u8131\u6c34\u7d20\u51e6\u7406\u306e\u91cd\u8981\u6027\uff1a4H-SiC \u30b3\u30f3\u30bf\u30af\u30c8\u7279\u6027\u3078\u306e\u5f71\u97ff\u3068 Si \u5c64\u306e\u81a8\u5f35\u201d\u3001\u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a\u3000\u7b2c12\u56de\u8b1b\u6f14\u4f1a\u3000\u2161B-5\uff08pp.229-230\uff09\uff082025.11.19-20\u3001\u5bcc\u5c71\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u3010Invited\u3011S. Higashi, R. Goto, J. Yu and H. Hanafusa, \u201cIn-situ Temperature Monitoring of Silicon Wafer During Plasma Processing by Optical Interference Contactless Thermometry,\u201d The 16th <\/sup>International Workshop on New Group IV Semiconductor Nanoelectronics, (Sendai, Japan, Nov. 17-18, 2025). <\/em>I-09.<\/em><\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
N. Mineyuki, A. Saito, Y. Hayashi and S. Higashi, \u201cEffects of process parameters on maskless nanostructure fabrication using atmospheric-pressure CF4<\/sub>\u00a0plasma,\u201d<\/em> Proc. Int. Symp. Dry Process (DPS2025), (Ehime, Japan, Nov. 13-14, 2025). <\/em>pp. 9-10.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
J. Yu, H. Hanafusa, and S. Higashi, \u201cStudy on the Performance Improvement of Optical-Interference Contactless Thermometry Based on Machine Learning,\u201d The 10th<\/sup> International Symposium on Control of Semiconductor Interfaces (ISCSI-X), the International Conference on Silicon Epitaxy and International SiGe Technology and Device Meeting (ICSI\/ISTDM 2025), (Kanagawa, Japan, Nov. 10-13, 2025). <\/em>pp.39-40.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
J.\u3000Yu\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u3000\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u6a5f\u68b0\u5b66\u7fd2\u306b\u57fa\u3065\u304f\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6cd5\uff08OICT\uff09\u306b\u3088\u308b\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0 \u6e29\u5ea6\u8a08\u6e2c\u306b\u95a2\u3059\u308b\u7814\u7a76\u201d\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c22\u56de\u7814\u7a76\u96c6\u4f1a\u300023p-O01 (pp.55-57\uff09\uff082025.10.23-24\u9f8d\u8c37\u5927\u5b66 \u6210\u5c31\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Fukuzawa, H. Hanafusa and S. Higashi, \u201cInvestigation on Thermal Stability for Silicon-cap-annealed Ohmic Contact on n-type 4H-SiC,\u201d The 22nd<\/sup>\u3000International Conference on Silicon Carbide and Related Materials (ICSCRM 2025), (Busan, Korea, Sept. 14-19, 2025). <\/em>MO_P35<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Yu Jiawen\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u6a5f\u68b0\u5b66\u7fd2\u3092\u7528\u3044\u305f\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6cd5\u306e\u9ad8\u6027\u80fd\u5316\u306b\u95a2\u3059\u308b\u7814\u7a76\u201d\u3001 \u7b2c86\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u30009p-N322-15\u3000\uff082025.9.7-10\u3001\u540d\u57ce\u5927\u5b66\u3000\u5929\u767d\u30ad\u30e3\u30f3\u30d1\u30b9\uff06\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5cf0\u96ea \u5e8f\u4e5f\u3001\u5b89\u7530 \u8208\u5e73\u3001\u6797 \u6cf0\u592b\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u306b\u3088\u308b\u30ac\u30e9\u30b9\u8868\u9762\u30ca\u30ce\u69cb\u9020\u5236\u5fa1\u3068\u8d85\u64a5\u6c34\u5316\u201d\u3001 \u7b2c86\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u30009p-N401-1\u3000\uff082025.9.7-10\u3001\u540d\u57ce\u5927\u5b66\u3000\u5929\u767d\u30ad\u30e3\u30f3\u30d1\u30b9\uff06\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c0f\u91ce \u9065\u5922\u3001YU JIAWEN\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u30d5\u30a1\u30a4\u30d0\u30fc\u30d0\u30f3\u30c9\u30eb\u3092\u7528\u3044\u305f\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u306e\u8868\u9762\u6e29\u5ea6\u5206\u5e03\u6e2c\u5b9a\u30b7\u30b9\u30c6\u30e0\u7528\u30bb\u30f3\u30b5\u30fc\u30d8\u30c3\u30c9\u306e\u958b\u767a\u201d\u3001\u7b2c86\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000\u30008p-N324-8\u3000\uff082025.9.7-10\u3001\u540d\u57ce\u5927\u5b66\u3000\u5929\u767d\u30ad\u30e3\u30f3\u30d1\u30b9\uff06\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
YU JIAWEN, \u82b1\u623f \u5b8f\u660e, \u6771 \u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6cd5\u3078\u306e\u6a5f\u68b0\u5b66\u7fd2\u5c0e\u5165\u306b\u95a2\u3059\u308b\u7814\u7a76\u201d\u30012025\u5e74\u5ea6\u3000\u5fdc\u7528\u7269\u7406\u30fb\u7269\u7406\u7cfb\u5b66\u4f1a\u3000\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u3001\u5408\u540c\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000Ga-7\u3000P.103.\uff082025.7.26\u3001\u5ca1\u5c71\u5927\u5b66\u6d25\u5cf6\u30ad\u30e3\u30f3\u30d1\u30b9\uff09<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c0f\u91ce\u3000\u9065\u5922, \u6771 \u6e05\u4e00\u90ce\u3001\u82b1\u623f \u5b8f\u660e, YU JIAWEN\u3001\u201c\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u306e\u9762\u5185\u6e29\u5ea6\u5206\u5e03\u6e2c\u5b9a\u306b\u5411\u3051\u305f\u30d5\u30a1\u30a4\u30d0\u30fc\u30d0\u30f3\u30c9\u30eb\u578b\u30bb\u30f3\u30b5\u30fc\u30d8\u30c3\u30c9\u306e\u958b\u767a\u201d\u30012025\u5e74\u5ea6\u5fdc\u7528\u7269\u7406\u30fb\u7269\u7406\u7cfb\u5b66\u4f1a\u3000\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u3001\u5408\u540c\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000Ga-6\u3000P.102.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Fukuzawa, H. Hanafusa and S. Higashi, \u201cInvestigation on the Relationship between Etching Rate and Photoresist Surface Temperature during Reactive Atmospheric-pressure Thermal Plasma Jet Irradiation,\u201d The 7th<\/sup> Asia-Pacific Conference on Semiconducting Silicides and Related Materials, 2025 (APAC-Silicide 2025), (Sendai, Japan, July. 19-21, 2025). <\/em>P33.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
J. Yu, H. Hanafusa, and S. Higashi, \u201cBaking Temperature Optimization for Reducing Interfacial Thermal Resistance in Polymer\/SiC Bilayer Structure Using Optical Interference Contactless Thermometry (OICT),\u201d 2025 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC 2025), (Nagoya, Japan, April. 15- 19, 2025)<\/em> pp. 231-232.<\/em><\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2024\u5e74\u5ea6<\/p>\n\n\n\n

\u677e\u672c \u97ff\u5e73\u3001Jiawen Yu\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u53cd\u5fdc\u6027\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u306b\u3088\u308b\u71b1\u51e6\u7406\u3057\u305f\u30d5\u30a9\u30c8\u30ec\u30b8\u30b9\u30c8\u306b\u5bfe\u3059\u308b\u30a8\u30c3\u30c1\u30f3\u30b0\u7279\u6027\u3068EBR\u30d7\u30ed\u30bb\u30b9\u3078\u306e\u9069\u7528\u201d \u7b2c72\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300017p-K304-3\u3000\uff082025.3.14-17\u3001\u6771\u4eac\u7406\u79d1\u5927\u5b66 \u91ce\u7530\u30ad\u30e3\u30f3\u30d1\u30b9\uff06\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5f8c\u85e4 \u9686\u4e4b\u4ecb\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6cd5(OICT)\u3092\u7528\u3044\u305f\u6975\u4f4e\u6e29\u74b0\u5883\u4e0b\u306b\u304a\u3051\u308b\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u8868\u9762\u6e29\u5ea6\u306e\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u6e2c\u5b9a\u201d \u7b2c72\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300016a-K103-5\u3000\uff082025.3.14-17\u3001\u6771\u4eac\u7406\u79d1\u5927\u5b66 \u91ce\u7530\u30ad\u30e3\u30f3\u30d1\u30b9\uff06\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9152\u6c60 \u8015\u5e73\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c52 \u2103\u306e\u4f4e\u6e29\u30d7\u30ed\u30bb\u30b9\u3067\u5f62\u6210\u3057\u305fSiO2<\/sub>\u8584\u819c\u306e\u96fb\u6c17\u7279\u6027\u8a55\u4fa1\u201d\u7b2c72\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300017a-K103-1\u3000\uff082025.3.14-17\u3001\u6771\u4eac\u7406\u79d1\u5927\u5b66 \u91ce\u7530\u30ad\u30e3\u30f3\u30d1\u30b9\uff06\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Jiawen Yu\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6cd5(OICT)\u3092\u7528\u3044\u305fSiC\u30a6\u30a7\u30cf\u306e\u8d85\u6025\u901f\u71b1\u51e6\u7406\u6642\u306e3D\u6e29\u5ea6\u5206\u5e03\u306e\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u53ef\u8996\u5316\u201d \u7b2c72\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300016p-K301-1\u3000\uff082025.3.14-17\u3001\u6771\u4eac\u7406\u79d1\u5927\u5b66 \u91ce\u7530\u30ad\u30e3\u30f3\u30d1\u30b9\uff06\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u798f\u6fa4 \u5c0a\u4ec1\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201cn\u578b4H-SiC\u4e0a\u30b7\u30ea\u30b3\u30f3\u30ad\u30e3\u30c3\u30d7\u30a2\u30cb\u30fc\u30eb\u30b3\u30f3\u30bf\u30af\u30c8\u306b\u5bfe\u3059\u308b\u9ad8\u6e29\u30a2\u30cb\u30fc\u30eb\u306e\u5f71\u97ff\u201d \u7b2c72\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300016p-K301-2\u3000\uff082025.3.14-17\u3001\u6771\u4eac\u7406\u79d1\u5927\u5b66 \u91ce\u7530\u30ad\u30e3\u30f3\u30d1\u30b9\uff06\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Matsumoto, J. Yu, H. Hanafusa, S. Higashi, \u201cInvestigation on the Relationship between Etching Rate and Photoresist Surface Temperature during Reactive Atmospheric-pressure Thermal Plasma Jet Irradiation,\u201d International Symposium on Semiconductor Manufacturing 2024 (ISSM2024), (Tokyo, Japan, Dec. 9-10, 2024). <\/em>PO-024<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u672c\u3000\u97ff\u5e73\u3001J.\u3000Yu\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u3000\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u53cd\u5fdc\u6027\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u30d5\u30a9\u30c8\u30ec\u30b8\u30b9\u30c8\u306e\u8d85\u9ad8\u901f\u30a8\u30c3\u30c1\u30f3\u30b0\u306b\u304a \u3051\u308b\u6e29\u5ea6\u6e2c\u5b9a\u3068\u30a8\u30c3\u30c1\u30f3\u30b0\u7279\u6027\u306b\u95a2\u3059\u308b\u7814\u7a76\u201d\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c21\u56de\u7814\u7a76\u96c6\u4f1a\u300028p-O04 (pp.34-37\uff09\uff082024.11.28-29\u9f8d\u8c37\u5927\u5b66 \u6210\u5c31\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u798f\u6fa4 \u5c0a\u4ec1, \u82b1\u623f \u5b8f\u660e, \u6771 \u6e05\u4e00\u90ce\u3001\u201cn \u578b 4H-SiC \u306b\u304a\u3051\u308b\u30b7\u30ea\u30b3\u30f3\u30ad\u30e3\u30c3\u30d7\u30a2\u30cb\u30fc\u30eb\u30b3\u30f3\u30bf\u30af\u30c8\u306e\u71b1\u7684\u5b89\u5b9a\u6027\u8a55\u4fa1\u201d\u3001\u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a\u3000\u7b2c11\u56de\u8b1b\u6f14\u4f1a\u3000IB-5\uff08pp.117-118\uff09\uff082024.11.25-26\u3001G\u30e1\u30c3\u30bb\u7fa4\u99ac\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u672c \u97ff\u5e73\u3001Jiawen Yu\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u53cd\u5fdc\u6027\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u30d5\u30a9\u30c8\u30ec\u30b8\u30b9\u30c8\u306e\u8d85\u9ad8\u901f\u30a8\u30c3\u30c1\u30f3\u30b0\u306b\u304a\u3051\u308b\u8868\u9762\u6e29\u5ea6\u6e2c\u5b9a\u201d\u7b2c85\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300018p-A31-13\u3000\uff082024.9.16-20\u3001\u6731\u9dfa\u30e1\u30c3\u30bb\u307b\u304b2\u4f1a\u5834\uff06\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Yu Jiawen\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201cObservation of Baking Temperature Influence on Interfacial Thermal Resistance at Polymer\/SiC Interface Using Optical-Interference Contactless Thermometry (OICT)\u201d\u3001 \u7b2c85\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300019p-C41-4\u3000\uff082024.9.16-20\u3001\u6731\u9dfa\u30e1\u30c3\u30bb\u307b\u304b2\u4f1a\u5834\uff06\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u798f\u6fa4 \u5c0a\u4ec1\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u9ad8\u6e29\u4e0b\u306b\u304a\u3051\u308b\u30b7\u30ea\u30b3\u30f3\u30ad\u30e3\u30c3\u30d7\u30a2\u30cb\u30fc\u30eb\u30b3\u30f3\u30bf\u30af\u30c8\u306e\u9577\u671f\u5b89\u5b9a\u6027\u8a55\u4fa1\u201d\u3001 \u7b2c85\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300019p-C41-5\u3000\uff082024.9.16-20\u3001\u6731\u9dfa\u30e1\u30c3\u30bb\u307b\u304b2\u4f1a\u5834\uff06\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u3010\u62db\u5f85\u8b1b\u6f14\u3011\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u8d85\u6025\u901f\u71b1\u51e6\u7406\u306b\u304a\u3051\u308bIV\u65cf\u534a\u5c0e\u4f53\u8584\u819c\u306e\u7d50\u6676\u6210\u9577\u3068\u30c7\u30d0\u30a4\u30b9\u5fdc\u7528\u201d\u3001\u7b2c85\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000\u300019p-A35-4\u3000\uff082024.9.16-20\u3001\u6731\u9dfa\u30e1\u30c3\u30bb\u307b\u304b2\u4f1a\u5834\uff06\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
J. Yu, H. Hanafusa, and S. Higashi, \u201cMeasurement of Temperature-Dependent Interfacial Thermal Resistance at polymer\/SiC Interface Based on Optical-Interference Contactless Thermometry,\u201d 2024 International Conference on Solid State Devices and Materials(SSDM2024), (HIMEJI, Japan, Sept. 1- 4, 2024)<\/em> pp. 201-202.<\/em><\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u672c \u97ff\u5e73, Jiawen Yu, \u82b1\u623f \u5b8f\u660e, \u6771 \u6e05\u4e00\u90ce\u3001\u201c\u53cd\u5fdc\u6027\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u30d5\u30a9\u30c8\u30ec\u30b8 \u30b9\u30c8\u306e\u9ad8\u901f\u30a8\u30c3\u30c1\u30f3\u30b0\u306b\u304a\u3051\u308b\u6e29\u5ea6\u6e2c\u5b9a\u3068\u30a8\u30c3\u30c1\u30f3 \u30b0\u30ec\u30fc\u30c8\u306b\u95a2\u3059\u308b\u7814\u7a76\u201d\u3001\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u3001\u65e5\u672c\u7269\u7406\u5b66\u4f1a\u4e2d\u56fd\u652f\u90e8\u30fb\u56db\u56fd\u652f\u90e8\u3001\u65e5\u672c\u7269\u7406\u6559\u80b2\u5b66\u4f1a\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u30002024\u5e74\u5ea6\u652f\u90e8\u5408\u540c\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000Dp-5\u3000P.76.\uff082024.7.28\u3001\u5fb3\u5cf6\u5927\u5b66\u5e38\u4e09\u5cf6\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u798f\u6fa4 \u5c0a\u4ec1, \u82b1\u623f \u5b8f\u660e, \u6771 \u6e05\u4e00\u90ce\u3001\u201c\u30b7\u30ea\u30b3\u30f3\u30ad\u30e3\u30c3\u30d7\u30a2\u30cb\u30fc\u30eb\u30b3\u30f3\u30bf\u30af\u30c8\u306e\u71b1\u5b89\u5b9a\u6027\u8a55\u4fa1\u201d\u3001\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u3001\u65e5\u672c\u7269\u7406\u5b66\u4f1a\u4e2d\u56fd\u652f\u90e8\u30fb\u56db\u56fd\u652f\u90e8\u3001\u65e5\u672c\u7269\u7406\u6559\u80b2\u5b66\u4f1a\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u30002024\u5e74\u5ea6\u652f\u90e8\u5408\u540c\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000Ea-10\u3000P.89. \uff082024.7.28\u3001\u5fb3\u5cf6\u5927\u5b66\u5e38\u4e09\u5cf6\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u3010\u62db\u5f85\u8b1b\u6f14\u3011\u6771 \u6e05\u4e00\u90ce\u3001\u677e\u672c \u97ff\u5e73\u3001Jiawen Yu\u3001\u82b1\u623f \u5b8f\u660e\u3001\u201c\u53cd\u5fdc\u6027\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u6709\u6a5f\u8584\u819c\u306e\u8d85\u9ad8\u901f\u30a8\u30c3\u30c1\u30f3\u30b0\u6280\u8853\u201d\u3001\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a \u6709\u6a5f\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u7814\u7a76\u4f1a\uff3bOME]\u3000\u4fe1\u5b66\u6280\u5831\u3000124<\/strong>\uff088\uff09pp.20-23.\uff082024\u5e744\u670820\u65e5\u3001\u30a2\u30de\u30db\u30fc\u30e0PLAZA\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2023\u5e74\u5ea6<\/p>\n\n\n\n

\u9152\u6c60 \u8015\u5e73\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u6c34\u84b8\u6c17\u4f4e\u6e29\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u30dd\u30ea\u30b7\u30e9\u30b6\u30f3\u306e\u30b7\u30ea\u30ab\u8ee2\u5316\u30e1\u30ab\u30cb\u30ba\u30e0\u201d\u3001 \u7b2c71\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300023p-12K-14\uff082024.3.22-25\u3001\u6771\u4eac\u90fd\u5e02\u5927\u5b66 \u4e16\u7530\u8c37\u30ad\u30e3\u30f3\u30d1\u30b9\uff06\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u672c \u97ff\u5e73\u3001Jiawen Yu\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u53cd\u5fdc\u6027\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u30d5\u30a9\u30c8\u30ec\u30b8\u30b9\u30c8\u306e\u8d85\u9ad8\u901f\u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u8868\u9762\u6e29\u5ea6\u306e\u95a2\u4fc2\u6027\u201d\u3001\u7b2c71\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300025a-61B-3<\/strong>\uff082024.3.22-25\u3001\u6771\u4eac\u90fd\u5e02\u5927\u5b66 \u4e16\u7530\u8c37\u30ad\u30e3\u30f3\u30d1\u30b9\uff06\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Yu Jiawen\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6cd5(OICT)\u3092\u7528\u3044\u305f\u6709\u6a5f\u5c64\/\u534a\u5c0e\u4f53\u754c\u9762\u306e\u904e\u6e21\u71b1\u4f1d\u5c0e\u306e\u6e2c\u5b9a\u201d\u3001\u7b2c71\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300023p-52A-7<\/strong>\uff082024.3.22-25\u3001\u6771\u4eac\u90fd\u5e02\u5927\u5b66 \u4e16\u7530\u8c37\u30ad\u30e3\u30f3\u30d1\u30b9\uff06\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5f8c\u85e4 \u9686\u4e4b\u4ecb\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6cd5(OICT)\u3092\u7528\u3044\u305f\u30d7\u30e9\u30ba\u30de\u7167\u5c04\u4e0b\u3067\u306e\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u8868\u9762\u6e29\u5ea6\u306e\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u6e2c\u5b9a\u201d\u3001 \u7b2c71\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300022p-12G-8<\/strong>\uff082024.3.22-25\u3001\u6771\u4eac\u90fd\u5e02\u5927\u5b66 \u4e16\u7530\u8c37\u30ad\u30e3\u30f3\u30d1\u30b9\uff06\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
J. Yu, H. Hanafusa, S. Higashi, \u201cInterfacial Thermal Resistance Measurement at Polymer\/Semiconductor Interface Using Optical-Interference Contactless Thermometry (OICT),\u201d 4th<\/sup> China International Youth Conference on Electrical Engineering (CIYCEE2023), (Chengdu, China, Dec. 8-10). <\/em>pp. 991-995.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
R. Goto, J. Yu, H. Hanafusa, and S. Higashi, \u201cDirect Measurement of silicon wafer surface temperature during plasma processing using Optical-Interference Contactless Thermometry (OICT),\u201d 44th<\/sup> International Symposium on Dry Process (DPS2023), (Nagoya, Japan, Nov. 21-22, 2023). <\/em>pp. 195-196. G-2<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u672c\u3000\u97ff\u5e73\u3001J.\u3000Yu\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u3000\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u53cd\u5fdc\u6027\u5927\u6c17\u5727\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u30d5\u30a9\u30c8\u30ec\u30b8\u30b9\u30c8\u306e\u30df\u30ea\u79d2\u52a0\u71b1\u3068\u8d85\u9ad8\u901f\u30a8\u30c3\u30c1\u30f3\u30b0\u7279\u6027\u306e\u95a2\u4fc2\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c20\u56de\u7814\u7a76\u96c6\u4f1a\u300110\uff50-P22\uff08pp.183-185\uff09\uff082023.11.9-10\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb+\u30cd\u30c3\u30c8\u914d\u4fe1\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9152\u6c60\u3000\u8015\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u6c34\u84b8\u6c17\u4f4e\u6e29\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u30dd\u30ea\u30b7\u30e9\u30b6\u30f3\u306e\u30b7\u30ea\u30ab\u8ee2\u5316\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c20\u56de\u7814\u7a76\u96c6\u4f1a\u300110\uff50-P08\uff08pp.163-165\uff09\uff082023.11.9-10\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb+\u30cd\u30c3\u30c8\u914d\u4fe1\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5f8c\u85e4\u3000\u9686\u4e4b\u4ecb\u3001 \u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6cd5(OICT)\u3092\u7528\u3044\u305f\u5bb9\u91cf\u7d50\u5408\u578b\u30d7\u30e9\u30ba\u30de\u4e2d\u306e\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u8868\u9762\u6e29\u5ea6 \u306e\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u6e2c\u5b9a\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c20\u56de\u7814\u7a76\u96c6\u4f1a\u300109\uff50-P27\uff08pp.79-82\uff09\uff082023.11.9-10\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb+\u30cd\u30c3\u30c8\u914d\u4fe1\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[\u62db\u5f85\u8b1b\u6f14\uff3d<\/strong>\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u306e\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u4f5c\u88fd\u30d7\u30ed\u30bb\u30b9\u5fdc\u7528\u201d\u3001\u7b2c39\u56de\u4e5d\u5dde\u30fb\u5c71\u53e3\u30d7\u30e9\u30ba\u30de\u7814\u7a76\u4f1a\u3000pp.79-94.\u3000\uff082023.11.3-4\u3001\u65e5\u7530\u5929\u9818\u6c34\u306e\u5bbf\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited]<\/strong> S. Higashi, H. Kato, J. Yu, K. Matsumoto, and H. Hanafusa, \u201cAtmospheric-Pressure Reactive Thermal Plasma Jet Technology for Decarbonization of Semiconductor Manufacturing,\u201d 244th<\/sup> ECS Meeting, (Gothenburg, Sweden, Oct. 8-12, 2023).<\/em><\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
J. Yu, R. Goto, H. Hanafusa, S. Higashi, \u201cMEASUREMENT OF TRANSIENT HEAT TRANSFER ACROSS ORGANIC\/SEMICONDUCTOR INTERFACE USING OPTICAL INTERFERENCE CONTACTLESS THERMOMETRY (OICT),\u201d 33rd International Symposium on Transport Phenomena (ISTP-33), (Kumamoto, Japan, Sept. 24-27, 2023)<\/em>.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[\u62db\u5f85\u8b1b\u6f14\uff3d<\/strong>\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u3092\u5229\u7528\u3057\u305f\u9ad8\u7cbe\u5ea6\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6280\u8853\u201d\u3001\u30a8\u30c3\u30bb\u30f3\u30b9\u30d5\u30a9\u30fc\u30e9\u30e02023 \u30bb\u30c3\u30b7\u30e7\u30f34-\uff23\u3000\uff082023.9.22\u3001\u6771\u4eac\u30df\u30c3\u30c9\u30bf\u30a6\u30f3\u516b\u91cd\u6d32\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u30b7\u30ea\u30b3\u30f3\u30ad\u30e3\u30c3\u30d7\u30a2\u30cb\u30fc\u30eb\u3092\u884c\u3063\u305f4H-SiC\u306e\u6df1\u3044\u6e96\u4f4d\u306e\u89e3\u6790\u201d\u3001\u7b2c84\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300021a-P07-2\uff082023.9.19-23\u3001\u718a\u672c\u57ce\u30db\u30fc\u30eb\u307b\u304b3\u4f1a\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f \u5b8f\u660e\u3001\u9ad8\u6a4b\u3000\u5b8f\u548c\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u5ca1\u6751\u3000\u597d\u5b50\u3001\u201c\u30de\u30a4\u30af\u30ed\u30c1\u30e3\u30f3\u30d0\u30de\u30c8\u30ea\u30c3\u30af\u30b9\u578b\u33d7\u30bb\u30f3\u30b5\u3092\u7528\u3044\u305fRHa-RCA\u6cd5\u306b\u3088\u308bRNA\u5897\u5e45\u306e\u691c\u51fa\u201d\u3001\u7b2c84\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300020p-P10-8\u3000\uff082023.9.19-23\u3001\u718a\u672c\u57ce\u30db\u30fc\u30eb\u307b\u304b3\u4f1a\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Yu Jiawen\u3001\u5f8c\u85e4\u3000\u9686\u4e4b\u4ecb\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6cd5(OICT)\u3092\u57fa\u76e4\u3068\u3057\u305fSU-8\/SiC\u306e\u754c\u9762\u71b1\u62b5\u6297\u6e2c\u5b9a\u6280\u8853\u3092\u958b\u767a\u201d \u7b2c84\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300021p-B201-5\u3000\uff082023.9.19-23\u3001\u718a\u672c\u57ce\u30db\u30fc\u30eb\u307b\u304b3\u4f1a\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u672c\u3000\u97ff\u5e73\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u53cd\u5fdc\u6027\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u30d5\u30a9\u30c8\u30ec\u30b8\u30b9\u30c8\u306e\u8d85\u9ad8\u901f\u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u767a\u5149\u5206\u5149\u306b\u95a2\u3059\u308b\u691c\u8a0e\u201d \u7b2c84\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300022a-A401-10\u3000\uff082023.9.19-23\u3001\u718a\u672c\u57ce\u30db\u30fc\u30eb\u307b\u304b3\u4f1a\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5f8c\u85e4\u3000\u9686\u4e4b\u4ecb\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6cd5\uff08OICT\uff09\u3092\u7528\u3044\u305f\u30d7\u30e9\u30ba\u30de\u30d7\u30ed\u30bb\u30b9\u4e2d\u306e\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u8868\u9762\u6e29\u5ea6\u306e\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u6e2c\u5b9a\u201d \u7b2c84\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300023p-A301-5\u3000\uff082023.9.19-23\u3001\u718a\u672c\u57ce\u30db\u30fc\u30eb\u307b\u304b3\u4f1a\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
J. Yu, R. Goto, H. Hanafusa, and S. Higashi, \u201cMeasurement of Heat Dissipation between SiC and Thermal Interface Material in Power Device Packaging Based on Optical-Interference Contactless Thermometry,\u201d 2023 International Conference on Solid State Devices and Materials(SSDM2023), (Nagoya Congress Center, Sep. 5-8, 2023). <\/em>pp. 575-576. N-2-03<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f\u3000\u5b8f\u660e, \u9ad8\u6a4b\u3000\u5b8f\u548c, \u6771\u3000\u6e05\u4e00\u90ce, \u5ca1\u6751\u3000\u597d\u5b50, \u201c\u30de\u30a4\u30af\u30ed\u30c1\u30e3\u30f3\u30d0\u578bpH\u30bb\u30f3\u30b5\u3092\u7528\u3044\u305fRHaRCA\u6cd5\u306b\u3088\u308bRNA\u5897\u5e45\u306e\u691c\u51fa\u201d\u30012023\u5e74\u5ea6\u5fdc\u7528\u7269\u7406\u30fb\u7269\u7406\u7cfb\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u5408\u540c\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000Ap-9\u3000P.18.\u3000\uff082023.7.29\u3001\u5cf6\u6839\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5f8c\u85e4 \u9686\u4e4b\u4ecb, \u82b1\u623f \u5b8f\u660e, \u6771 \u6e05\u4e00 \u90ce\u3001\u201c\u30d7\u30e9\u30ba\u30de\u30d7\u30ed\u30bb\u30b9\u4e2d\u306e\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u8868\u9762\u6e29 \u5ea6\u306e\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u6e2c\u5b9a\u306b\u5411\u3051\u305f\u30b7\u30b9\u30c6\u30e0\u958b\u767a\u201d\u30012023\u5e74\u5ea6\u5fdc\u7528\u7269\u7406\u30fb\u7269\u7406\u7cfb\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u5408\u540c\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000Cp-8\u3000P.50.\u3000\uff082023.7.29\u3001\u5cf6\u6839\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u672c \u97ff\u5e73, \u82b1\u623f \u5b8f\u660e, \u6771 \u6e05\u4e00\u90ce\u3001\u201c\u53cd\u5fdc\u6027\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u30d5\u30a9 \u30c8\u30ec\u30b8\u30b9\u30c8\u306e\u8d85\u9ad8\u901f\u30a8\u30c3\u30c1\u30f3\u30b0\u306b\u304a\u3051\u308b\u9178\u7d20 \u6d41\u91cf\u3068\u6295\u5165\u96fb\u529b\u306e\u52b9\u679c\u201d\u30012023\u5e74\u5ea6\u5fdc\u7528\u7269\u7406\u30fb\u7269\u7406\u7cfb\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u5408\u540c\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000Cp-9\u3000P.51.\u3000\uff082023.7.29\u3001\u5cf6\u6839\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Jiawen Yu, \u5f8c\u85e4 \u9686\u4e4b\u4ecb, \u82b1\u623f \u5b8f\u660e, \u6771 \u6e05\u4e00\u90ce\u3001Development of an experimental method for extraction of organic\/semiconductor interfacial thermal resistance based on optical-interference contactless thermometry (OICT)\u201d 2023\u5e74\u5ea6\u5fdc\u7528\u7269\u7406\u30fb\u7269\u7406\u7cfb\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u5408\u540c\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000Da-8\u3000P.59.\u3000\uff082023.7.29\u3001\u5cf6\u6839\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
J. Yu, H. Hanafusa, and S. Higashi, \u201cExtraction of Organic\/Semiconductor Interfacial Thermal Resisitance based on Optical Interference Contactless Thermometry (OICT),\u201d 2023 Asia-Pacific Workshop on Advanced Semiconductor Devices(AWAD2023), (Tokyo Institute of Technology, Yokohama, Japan, Jul. 10-11, 2023).<\/em> pp. 142-143.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited]<\/strong> S. Higashi, H. Kato, H. Hanafusa, \u201cApplication of Atmospheric Pressure Thermal Plasma Jet for Semiconductor Device\u3000Fabrication,\u201d International Conference on Processing & Manufacturing of advanced Materials (THERMEC\u20192023),<\/em> (Vienna, Austria, Jul. 2 - 7, 2023).<\/em><\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5f8c\u85e4\u3000\u9686\u4e4b\u4ecb\u3001\u5800\u5185\u3000\u61b2\u5fd7\u90ce\u3001Jiawen Yu\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30d7\u30e9\u30ba\u30de\u30d7\u30ed\u30bb\u30b9\u4e2d\u306e\u30a6\u30a7\u30cf\u6e29\u5ea6\u306e\u975e\u63a5\u89e6\u6e2c\u5b9a\u306b\u5411\u3051\u305f\u8a08\u6e2c\u30b7\u30b9\u30c6\u30e0\u306e\u958b\u767a\u201d \u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a \u30b7\u30ea\u30b3\u30f3\u6750\u6599\u30fb\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\uff3bSDM]\u3000\u4fe1\u5b66\u6280\u5831\u3000123<\/strong>\uff088\uff09pp.63-66.\uff082023\u5e744\u670821\u65e5-22\u65e5\u3001\u6c96\u7e04\u770c\u9752\u5e74\u4f1a\u9928+\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2022\u5e74\u5ea6<\/p>\n\n\n\n

[Invited]<\/strong>S. Higashi, A. Kameda, H. Kato, and H. Hanafusa, \u201cAtmospheric Pressure Thermal Plasma Jet Technology for Semiconductor Device Manufacturing,\u201d 15th<\/sup>\u3000International\u3000Symposium\u3000on\u3000Advanced\u3000Plasma\u3000Science\u3000and\u3000its\u3000Applications\u3000for\u3000Nitrides\u3000and\u3000Nanomaterials 16th<\/sup> International Conference on Plasma-Nano Technology & Science (ISPlasma2023\/IC-PLANTS2023)<\/em>, (Gifu, Japan, Mar. 5-9, 2023)<\/em>. 06aA03K<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited]<\/strong>S. Higashi, K. Fujimoto, and H. Hanafusa, \u201c3-D Imaging of Temperature Variations in 4H-SiC Schottky Barrier Diode under Operation based on Optical Interference Contactless Thermometry,\u201d 13th<\/sup> International Workshop on New Group IV Semiconductor Nanoelectronics<\/em>, (Sendai, Japan, Jan. 23-24, 2023). pp. 43-44. I-09.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[\u62db\u5f85\u8b1b\u6f14\uff3d\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6cd5\u306b\u3088\u308b\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u5185\u90e8\u306b\u304a\u3051\u308b\u81ea\u5df1\u767a\u71b1\u6e29\u5ea6\u5206\u5e03\u306e\u4e09\u6b21\u5143\u30a4\u30e1\u30fc\u30b8\u30f3\u30b0\u3068\u30c7\u30d0\u30a4\u30b9\u52a3\u5316\u904e\u7a0b\u306e\u89b3\u6e2c\u201d\u3001\u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a\u3000\u7b2c9\u56de\u8b1b\u6f14\u4f1a\u3000VI-1\uff08pp.43-44\uff09\uff082022.12.20-21\u3001\u798f\u5ca1\u56fd\u969b\u4f1a\u8b70\u5834\uff09<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
YU JIAWEN\u3001\u677e\u53e3 \u5eb7\u592a\u90ce\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6cd5(OICT)\u3092\u57fa\u76e4\u3068\u3057\u305f SiC \u30a6\u30a8\u30cf\u306e\u9ad8\u901f\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u6642\u306e\u30ea\u30a2\u30eb\u30bf\u30a4 \u30e0\u6e29\u5ea6\u6e2c\u5b9a\u6280\u8853\u306e\u958b\u767a\u201d\u3001\u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a\u3000\u7b2c9\u56de\u8b1b\u6f14\u4f1a\u3000IB-14\uff08pp.121-122\uff09\uff082022.12.20-21\u3001\u798f\u5ca1\u56fd\u969b\u4f1a\u8b70\u5834\uff09<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u53e3 \u5eb7\u592a\u90ce\u3001Jiawen Yu\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201cOICT \u306b\u3088\u308b\u901a\u96fb\u52a0\u71b1\u6642\u306b\u304a\u3051\u308b\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u5185\u90e8\u306e\uff13\u6b21\u5143\u6e29\u5ea6\u30a4\u30e1\u30fc\u30b8\u30f3\u30b0\u6280\u8853\u201d\u3001\u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a\u3000\u7b2c9\u56de\u8b1b\u6f14\u4f1a\u3000\u2161A-8\uff08pp.147-148\uff09\uff082022.12.20-21\u3001\u798f\u5ca1\u56fd\u969b\u4f1a\u8b70\u5834\uff09<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited]<\/strong>S. Higashi, R. Sumichika, T. Suehiro, H. Hanafusa, and Y. Okamura, \u201cSingle Crystalline Silicon CMOSFETs on Plastic and Their Application to Highly Sensitive Virus Detection System,\u201d Proc. 29th<\/sup> Int. Display Workshops (IDW\u201922), (Fukuoka, Japan, Dec. 14-16, 2022). <\/em>pp. 1045-1046.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Kato, H. Hanafusa, T. Sato, S. Higashi, \u201cUltra-fast Etching of Photoresist by Reactive Atmospheric-pressure Micro-Thermal Plasma Jet,\u201d 2022 International Symposium on Semiconductor Manufacturing (ISSM2022), (KFC Hall, Tokyo, Dec. 12-13, 2022).<\/em> pp. 1-3. PO-42<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u52a0\u85e4\u3000\u97ff\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u53cd\u5fdc\u6027\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u30d5\u30a9\u30c8\u30ec\u30b8\u30b9\u30c8\u306e\u5c40\u6240\u8d85\u9ad8\u901f\u30a8\u30c3\u30c1\u30f3\u30b0\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c19\u56de\u7814\u7a76\u96c6\u4f1a\u300118p-P02\uff08pp.139-141\uff09\uff082022.11.17-18\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb+\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u53e3\u3000\u5eb7\u592a\u90ce\u3001Jiawen Yu\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201cOICT \u306b\u3088\u308b\u901a\u96fb\u52a0\u71b1\u6642\u306b\u304a\u3051\u308b Si \u30a6\u30a7\u30cf\u5185\u306e \u904e\u6e21\u7684\u6e29\u5ea6\u5206\u5e03\u306e\uff13\u6b21\u5143\u30a4\u30e1\u30fc\u30b8\u30f3\u30b0\u6280\u8853\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c19\u56de\u7814\u7a76\u96c6\u4f1a\u300118p-P01\uff08pp.136-138\uff09\uff082022.11.17-18\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb+\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Jiawen Yu\uff0cK. Matsuguchi, H. Hanafusa, and S. Higashi, \u201cDevelopment of A Real-Time Temperature Measurement Technique for SiC Wafer During Rapid Plasma Processing Based on Optical-Interference Contactless Thermometry (OICT)\u201d \u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c19\u56de\u7814\u7a76\u96c6\u4f1a\u300118p-O03\uff08pp.232-235\uff09\uff082022.11.17-18\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb+\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
J. Yu, K. Matsuguchi, T. Sato, H. Hanafusa, S. Higashi, \u201cDevelopment of a Real-Time Temperature Measurement Technique for SiC Wafer During Ultra-Rapid Thermal Annealing Based on Optical-Interference Contactless Thermometry (OICT),\u201d Ext. Abs.2022 International Conference on Solid State Devices and Materials (SSDM2022), (Makuhari Messe + Online Conference, Sept. 26-29, 2022). <\/em>pp. 675-676.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u53e3 \u5eb7\u592a\u90ce\u3001Yu Jiawen\u3001\u82b1\u623f \u5b8f\u660e\u3001\u4f50\u85e4 \u62d3\u78e8\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u901a\u96fb\u904e\u71b1\u6642\u306b\u304a\u3051\u308b\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u5185\u306e\u904e\u6e21\u7684\u6e29\u5ea6\u5206\u5e03 \u306e3\u6b21\u5143\u30a4\u30e1\u30fc\u30b8\u30f3\u30b0\u201d\u3001\u3000\u7b2c83\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a \u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300022a-B204-11\u3000\uff082022.9.20-23\u3001\u6771\u5317\u5927\u5b66\u3000\u5ddd\u5185\u5317\u30ad\u30e3\u30f3\u30d1\u30b9+\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Yu Jiawen\u3001\u677e\u53e3 \u5eb7\u592a\u90ce\u3001\u4f50\u85e4 \u62d3\u78e8\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6cd5(OICT)\u3092\u57fa\u76e4\u3068\u3057\u305fSiC\u30a6 \u30a8\u30cf\u306e\u9ad8\u901f\u71b1\u51e6\u7406\u6642\u306e\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u6e29\u5ea6\u6e2c\u5b9a\u6280\u8853\u306e\u958b\u767a\u201d\u3001\u7b2c83\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a \u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000\u5968 22a-B204-10\u3000\uff082022.9.20-23\u3001\u6771\u5317\u5927\u5b66\u3000\u5ddd\u5185\u5317\u30ad\u30e3\u30f3\u30d1\u30b9+\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u52a0\u85e4 \u97ff\u3001\u82b1\u623f \u5b8f\u660e\u3001\u4f50\u85e4 \u62d3\u78e8\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u53cd\u5fdc\u6027\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u30d5\u30a9\u30c8\u30ec\u30b8\u30b9 \u30c8\u306e\u8d85\u9ad8\u901f\u30a8\u30c3\u30c1\u30f3\u30b0\u201d\u3001\u7b2c83\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a \u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300022p-A406-6\u3000\uff082022.9.20-23\u3001\u6771\u5317\u5927\u5b66\u3000\u5ddd\u5185\u5317\u30ad\u30e3\u30f3\u30d1\u30b9+\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201ca-Si:H\u819c\u3092\u7528\u3044\u305fSiC\u3078\u306e\u30b7\u30ea\u30b3\u30f3\u30ad\u30e3\u30c3\u30d7\u30a2\u30cb\u30fc\u30eb\u3068 Si\u30c9\u30c3\u30c8\u5f62\u6210\u306e\u4f4e\u6e29\u5316\u201d\u3001\u7b2c83\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a \u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300020p-P04-19\u3000\uff082022.9.20-23\u3001\u6771\u5317\u5927\u5b66\u3000\u5ddd\u5185\u5317\u30ad\u30e3\u30f3\u30d1\u30b9+\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Takuma Sato, Jean-Marie Mouesca, Motoharu Imai, Serge Gambarelli, and Takashi Suemasu, \u201cIdentification of Intrinsic and Extrinsic Defects in Balium Disilicide,\u201d The 6th Asia-Pacific Conference on Semiconducting Silicides and Related Materials, 2022 (APAC-Silicide 2022), (Online Conference,<\/em> Jul. 30- Aug. 1, 2022).<\/em><\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4f4f\u8fd1 \u529b\u4e5f\u3001 \u672b\u5f18 \u5fb9\u3001\u82b1\u623f \u5b8f\u660e\u3001\u4f50\u85e4 \u62d3\u78e8\u3001\u5ca1\u6751 \u597d\u5b50\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u30a6\u30a4\u30eb\u30b9\u306e\u9ad8\u901f\u691c\u51fa\u306b\u5411\u3051\u305f\u30a2\u30af\u30c6\u30a3\u30d6\u30de\u30c8\u30ea\u30c3\u30af\u30b9\u578bpH\u30bb\u30f3\u30b5\u306e\u7814\u7a76\u201d\u30012022\u5e74\u5ea6\u5fdc\u7528\u7269\u7406\u30fb\u7269\u7406\u7cfb\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u5408\u540c\u5b66\u8853\u8b1b\u6f14\u4f1a<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u53e3\u3000\u5eb7\u592a\u90ce\u3001\u85e4\u672c\u3000\u6e13\u4e5f\u3001Yu Jiawen\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u4f50\u85e4\u3000\u62d3\u78e8\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6cd5(OICT)\u306b\u3088\u308b\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u5185\u90e8\u306e\u904e\u6e21\u7684\u71b1\u62e1\u6563\u904e\u7a0b\u306e\u4e09\u6b21\u5143\u30a4\u30e1\u30fc\u30b8\u30f3\u30b0\u201d\u3001\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a \u30b7\u30ea\u30b3\u30f3\u6750\u6599\u30fb\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\uff3bSDM]\u3000\u4fe1\u5b66\u6280\u5831\u3000122<\/strong>\uff088\uff09pp.39-42.\uff082022\u5e744\u670822\u65e5-23\u65e5\u3001\u9ad8\u5343\u7a42\u30db\u30fc\u30eb+\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2021\u5e74\u5ea6<\/p>\n\n\n\n

Jiawen Yu, K. Fujimoto, K. Matsuguchi, T. Sato, H. Hanafusa and S. Higashi, \u201cResearch on Real-Time Temperature Measurement for SiC Wafer during Ultra-Rapid Thermal Annealing Based on Optical-Interference Contactless Thermometry (OICT),\u201d International Workshop on Nanodevice Technologies 2022, in Memory of M. Hirose (IWNT2022), (RNBS, Hiroshima University, March 11, 2022).<\/td><\/td><\/tr>
[Invited] <\/strong>S. Higashi, \u201cDirect Imaging of Semiconductor Device Self-heating Based on Optical Interference Contactless Thermometry,\u201d International Workshop on Nanodevice Technologies 2022, in Memory of M. Hirose (IWNT2022), (RNBS, Hiroshima University, March 11, 2022).<\/td><\/td><\/tr>
T. Nojima, H. Hanafusa, T. Sato, S. Hayashi, S. Higashi, \u201cGrowth of High Crystallinity Silicon Films by Intermittent Pulse Heating assisted Plasma Enhanced Chemical Vapor Deposition,\u201d Proc. Int. Symp. Dry Process (DPS2021), (Online Symposium, Nov. 18-19, 2021).<\/em> pp. 157-158.<\/td><\/td><\/tr>
K. Fujimoto, H. Hanafusa, T. Sato, S. Higashi, \u201cVisualization of Transient Internal Temperature Changes during SiC-Schottky Barrier Diode Operation using Optical-Interference Contactless Thermometry,\u201d 13th<\/sup> European Conference on Silicon Carbide and Related Materials (ECSCRM2020\u00b72021), (Tours, France and Virtual conference, 24-28, Oct. 2021).<\/em><\/td><\/td><\/tr>
[Invited] <\/strong>S. Higashi, \u201cMillisecond Annealing by Atmospheric Pressure Thermal Plasma Jet and Direct Imaging of Temperature Distribution Using Optical Interference Contactless Thermometry (OICT),\u201d 240th <\/sup>ECS Meeting, (Digital Meeting, Oct. 10-14, 2021).<\/em><\/td><\/td><\/tr>
Hoa ThiKhanh Nguyen, H. Hanafusa, R. Kawakita, K. Segawa, S. Higashi, \u201cCharacteristics of Millisecond Solid Phase Crystallized Silicon Films Formed by Micro-Thermal-Plasma-Jet and Their Application to Bottom-Gate Thin Film Transistor,\u201d Ext. Abs.2021 International Conference on Solid State Devices and Materials (SSDM2021), (ALL-VIRTUAL conference, Sept. 6-9, 2021). <\/em>pp. 552-553.<\/td><\/td><\/tr>
T. SATO, H. HANAFUSA, S. HIGASHI, \u201cEffects of Crystallization Conditions on the Electrical Characteristics of P-type Ge TFTs Formed by Atmospheric Pressure Micro-Thermal-Plasma-Jet Irradiation,\u201d Ext. Abs. 2021 International Conference on Solid State Devices and Materials (SSDM2021), (ALL-VIRTUAL conference, Sept. 6-9, 2021). <\/em>pp. 554-555.<\/td><\/td><\/tr>
[Invited] <\/strong>S. Higashi, \u201cDefect Control in Quasi Single-crystalline Silicon Strips on Insulator Formed by Atmospheric Pressure Thermal Plasma Jet,\u201d International Conference on Processing & Manufacturing of advanced Materials (Thermec'2021), (Virtual Conference, JUNE 1-5, 2021).<\/strong><\/em><\/td><\/td><\/tr>
\u5800\u5185\u3000\u61b2\u5fd7\u90ce\u3001\u4f50\u85e4\u3000\u62d3\u78e8\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u8d85\u30cf\u30a4\u30d1\u30ef\u30fc\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u751f\u6210\u6280\u8853\u306b\u95a2\u3059\u308b\u7814\u7a76\u201d \u7b2c69\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300024p-E103-1\uff082022.3.22-26\u3001\u9752\u5c71\u5b66\u9662\u5927\u5b66\u3000\u76f8\u6a21\u539f\u30ad\u30e3\u30f3\u30d1\u30b9+\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/tr>
Jiawen Yu\u3001Keiya Fujimoto\u3001Kotaro Matsuguchi\u3001Takuma Sato\u3001Hiroaki Hanafusa\u3001Seiichirou Higashi\u3001\u201c[Highlight]Development of automatic 3D temperature imaging technique for SiC wafer during ultra-rapid thermal annealing based on optical-interference contactless thermometry (OICT)\u201d\u3001 \u7b2c69\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300024p-E103-2\uff082022.3.22-26\u3001\u9752\u5c71\u5b66\u9662\u5927\u5b66\u3000\u76f8\u6a21\u539f\u30ad\u30e3\u30f3\u30d1\u30b9+\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/tr>
\u85e4\u672c\u3000\u6e13\u4e5f\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u4f50\u85e4\u3000\u62d3\u78e8\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a (OICT)\u30a4\u30e1\u30fc\u30b8\u30f3\u30b0\u3092\u7528\u3044\u305fSiC Schottky barrier diode\u306e\u4e09\u6b21\u5143\u81ea\u5df1\u767a\u71b1\u6e2c\u5b9a\u53ca\u3073\u6545\u969c\u89b3\u5bdf\u201d\u3001\u7b2c69\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300025p-E301-6\uff082022.3.22-26\u3001\u9752\u5c71\u5b66\u9662\u5927\u5b66\u3000\u76f8\u6a21\u539f\u30ad\u30e3\u30f3\u30d1\u30b9+\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/tr>
\u677e\u53e3\u3000\u5eb7\u592a\u90ce\u3001\u85e4\u672c\u3000\u6e13\u4e5f\u3001Yu Jiawen\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u4f50\u85e4\u3000\u62d3\u78e8\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u5185\u306e\u904e\u6e21\u7684\u71b1\u62e1\u6563\u904e\u7a0b\u306e\u30a4\u30e1\u30fc\u30b8\u30f3\u30b0\u6280\u8853\u306b\u95a2\u3059\u308b\u7814\u7a76\u201d\u3001\u7b2c69\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300025p-E301-7\uff082022.3.22-26\u3001\u9752\u5c71\u5b66\u9662\u5927\u5b66\u3000\u76f8\u6a21\u539f\u30ad\u30e3\u30f3\u30d1\u30b9+\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/tr>
\u91ce\u5cf6\u3000\u5927\u5fd7\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u4f50\u85e4\u3000\u62d3\u78e8\u3001\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u9593\u6b20\u30d1\u30eb\u30b9\u52a0\u71b1\u652f\u63f4\u30d7\u30e9\u30ba\u30deCVD\u306b\u3088\u308b\u9ad8\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u819c\u306e\u6210\u9577\u5236\u5fa1\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c18\u56de\u7814\u7a76\u96c6\u4f1a\u300111p-O03\uff08pp.18-20\uff09\uff082021.11.11-12\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/tr>
\u4f50\u85e4\u3000\u62d3\u78e8\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u30df\u30ea\u79d2\u30a2\u30cb\u30fc\u30eb\u306b\u3088\u308b\u2163\u65cf\u534a\u5c0e\u4f53\u8584\u819c\u306e\u7d50\u6676\u5316\u3068\u5e38\u78c1\u6027\u6b20\u9665\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c18\u56de\u7814\u7a76\u96c6\u4f1a\u300111p-O06\uff08pp.33-36\uff09\uff082021.11.11-12\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/tr>
\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u5802\u3000\u5927\u5730\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u30b7\u30ea\u30b3\u30f3\u30ad\u30e3\u30c3\u30d7\u30a2\u30cb\u30fc\u30eb\u3092\u65bd\u3057\u305f4H-SiC\u306e\u30b3\u30f3\u30bf\u30af\u30c8\u7279\u6027\u3068\u30a8\u30cd\u30eb\u30ae\u30fc\u30d0\u30f3\u30c9\u69cb\u9020\u306e\u7814\u7a76\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c18\u56de\u7814\u7a76\u96c6\u4f1a\u300112a-O05\uff08pp.66-69\uff09\uff082021.11.11-12\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/tr>
\u85e4\u672c\u3000\u6e13\u4e5f\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u4f50\u85e4\u3000\u62d3\u78e8\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6cd5\uff08OICT\uff09\u3092\u7528\u3044\u305fSiC-Schottky Barrier Diode \u5185\u90e8\u6e29\u5ea6\u30a4\u30e1\u30fc\u30b8\u30f3\u30b0\u53ca\u3073\u30c7\u30d0\u30a4\u30b9\u6545\u969c\u904e\u7a0b\u306e\u89b3\u5bdf\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c18\u56de\u7814\u7a76\u96c6\u4f1a\u300112a-O06\uff08pp.70-72\uff09\uff082021.11.11-12\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/tr>
\u677e\u53e3\u3000\u5eb7\u592a\u90ce\u3001\u85e4\u672c\u3000\u6e13\u4e5f\u3001Jiawen Yu\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u4f50\u85e4\u3000\u62d3\u78e8\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u5185\u306e\u904e\u6e21\u7684\u71b1\u62e1\u6563\u904e\u7a0b\u306e\u30a4\u30e1\u30fc\u30b8\u30f3\u30b0\u6280\u8853\u306b\u95a2\u3059\u308b\u7814\u7a76\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c18\u56de\u7814\u7a76\u96c6\u4f1a\u300112p-P01\uff08pp.73-76\uff09\uff082021.11.11-12\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/tr>
\u5ca9\ufa11\u3000\u771f\u4e5f\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u4f50\u85e4\u3000\u62d3\u78e8\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u6c34\u7d20\u5316\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u8584\u819c\u3092\u7528\u3044\u305f\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u8108\u6ce2\u30bb\u30f3\u30b5\u306b\u95a2\u3059\u308b\u7814\u7a76\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c18\u56de\u7814\u7a76\u96c6\u4f1a\u300112p-P03\uff08pp.81-84\uff09\uff082021.11.11-12\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/tr>
J. Yu\u3001K. Fujimoto\u3001K. Matsuguchi\u3001T. Sato\u3001H. Hanafusa\u3001and S. Higashi\u3001\u201cTransient Temperature Imaging in SiC Wafer During Thermal-Plasma-Jet Annealing Based on Optical-Interference Contactless Thermometry\u201d\u3001 \u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c18\u56de\u7814\u7a76\u96c6\u4f1a\u300112p-P02\uff08pp.77-80\uff09\uff082021.11.11-12\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/tr>
\u9152\u6c60\u3000\u8015\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u91d1\u5c5e\u30ca\u30ce\u30a4\u30f3\u30af\u306e\u4f53\u7a4d\u5909\u5316\u3092\u5229\u7528\u3057\u305f\u30ec\u30fc\u30b6\u30a2\u30cb\u30fc\u30eb\u306b\u3088\u308b\u30d7\u30e9\u30b9\u30c1\u30c3\u30af\u4e0a\u3067\u306e\u4f4e\u62b5\u6297 \u91d1\u5c5e\u8584\u819c\u306e\u5f62\u6210\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c18\u56de\u7814\u7a76\u96c6\u4f1a\u300112p-P16\uff08pp.122-124\uff09\uff082021.11.11-12\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/tr>
Jiawen Yu\u3001Keiya Fujimoto\u3001Kotaro Matsuguchi\u3001Takuma Sato\u3001Hiroaki Hanafusa\u3001Seiichiro Higashi\u3001\u201cAutomatic Temperature Measurement of SiC Wafer During Millisecond Thermal Processing Based on Optical-Interference Contactless Thermometry (OICT)\u201d\u3001\u7b2c82\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000\u300012a-N305-3\uff082021.9.10-13\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/tr>
Nguyen ThiKhanh Hoa\u3001Hiroaki Hanafusa\u3001Seiichiro Higashi\u3001\u201cApplication of Millisecond Solid Phase Crystallization of Silicon Films Induced by Micro-Thermal-Plasma-Jet to Bottom-Gate Thin-Film Transistors\u201d\u3001\u7b2c82\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300023a-P06-3\u3000\uff082021.9.21-23\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/tr>
[\u62db\u5f85\u8b1b\u6f14\uff3d<\/strong>\u6771 \u6e05\u4e00\u90ce\u3001Nguyen Hoa Thi Khanh\u3001\u201c\u5927\u6c17\u5727\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u8a98\u8d77\u30df\u30ea\u79d2\u56fa\u76f8\u7d50\u6676\u5316\u3068\u30c7\u30d0\u30a4\u30b9\u5fdc\u7528\u201d\u3001\u7b2c82\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300011a-N105-3\u3000\uff082021.9.10-13\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/tr>
\u677e\u53e3\u3000\u5eb7\u592a\u90ce\u3001\u85e4\u672c\u3000\u6e13\u4e5f\u3001 Yu Jiawen\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u4f50\u85e4\u3000\u62d3\u78e8\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u5185\u306e\u904e\u6e21\u7684\u71b1\u62e1\u6563\u904e\u7a0b\u306e\u30a4\u30e1\u30fc\u30b8\u30f3\u30b0\u6280\u8853\u306b\u95a2\u3059\u308b\u7814\u7a76\u201d\u3001\u7b2c82\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300010p-N302-13\u3000\uff082021.9.10-13\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/tr>
\u85e4\u672c\u3000\u6e13\u4e5f\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u4f50\u85e4\u3000\u62d3\u78e8\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6cd5(OICT)\u3092\u7528\u3044\u305f SiC-Schottky Barrier Diode \u5185\u90e8\u306e\u904e\u6e21\u7684\u6e29\u5ea6\u6e2c\u5b9a\u201d\u3001\u7b2c82\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300012a-N305-4\u3000\uff082021.9.10-13\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/tr>
\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c \u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30d3\u30fc\u30e0\u306b\u3088\u308b\u92fc\u677f\u306e\u5c40\u6240\u52a0\u71b1\u6cd5\u306e\u7814\u7a76\u201d\u3001\u7b2c82\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000\u300010p-S301-7\uff082021.9.10-13\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/tr>
\u91ce\u5cf6\u3000\u5927\u5fd7\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u4f50\u85e4\u3000\u62d3\u78e8\u3001\u6771\u3000\u6e05\u4e00 \u90ce\u3001\u201c\u30d7\u30e9\u30ba\u30deCVD\u6cd5\u306b\u3088\u308b\u30b7\u30ea\u30b3\u30f3\u819c\u5806\u7a4d\u6642\u306e\u77ac\u9593\u52a0\u71b1\u306b\u3088\u308b\u9ad8\u7d50\u6676\u6027\u30b7\u30ea\u30b3\u30f3\u819c\u306e\u6210\u9577\u306b\u95a2\u3059\u308b\u7814\u7a76\u201d\u3001\u7b2c82\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300012p-N102-15\u3000\uff082021.9.10-13\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/tr>
[\u62db\u5f85\u8b1b\u6f14\uff3d<\/strong>\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b2\u30eb\u30de\u30cb\u30a6\u30e0\u8584\u819c\u306e\u8d85\u6025\u901f\u7d50\u6676\u5316\u3068\u96fb\u6c17\u7279\u6027\u8a55\u4fa1\u3001\u201d\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a \u30b7\u30ea\u30b3\u30f3\u6750\u6599\u30fb\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\uff082021\u5e744\u670823\u65e5-24\u65e5\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\u958b\u50ac\uff09\uff0e<\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2020\u5e74\u5ea6<\/p>\n\n\n\n

Hoa ThiKhanh Nguyen, H. Hanafusa, Y. Mizukawa, S. Hayashi, S. Higashi, \u201cCharacteristics of Rapidly Solid Phase Crystallized Amorphous Silicon Films Formed by Micro-Thermal-Plasma Jet Irradiation,\u201d Ext. Abs. 2020 International Conference on Solid State Devices and Materials (SSDM2020), (ALL-VIRTUAL conference, Sept. 27-30, 2020). <\/em>pp. 681-682.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5ca9\u5d0e \u771f\u4e5f\u3001\u82b1\u623f \u5b8f\u660e\u3001\u4f50\u85e4 \u62d3\u78e8\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201ca-Si:H\u8584\u819c\u3092\u7528\u3044\u305f\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u8108\u6ce2\u30bb\u30f3\u30b5\u30fc\u306b\u95a2\u3059\u308b\u7814\u7a76\u201d\u3001\u7b2c68\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300019p-Z04-1\uff082021.3.16-19\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Nguyen ThiKhanh Hoa\u3001Hiroaki Hanafusa\u3001Seiichiro Higashi\u3001\u201cCharacteristics of Millisecond Solid Phase Crystallization of Phosphorus Doped Silicon Film Annealed by Thermal-Plasma-Jet Irradiation\u201d\u3001\u7b2c68\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300018p-Z24-7\uff082021.3.16-19\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8d64\u585a \u7950\u5141\u3001\u4f50\u85e4 \u62d3\u78e8\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316P\u578bGe\u819c\u306e\u96fb\u6c17\u7279\u6027\u8a55\u4fa1\u201d\u3001\u7b2c68\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300018p-Z24-6\uff082021.3.16-19\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u91ce\u5cf6 \u5927\u5fd7\u3001\u4f50\u85e4 \u62d3\u78e8\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u30d7\u30e9\u30ba\u30deCVD\u306b\u3088\u308b\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u5806\u7a4d\u6642\u306e\u77ac\u9593\u52a0\u71b1\u306b\u95a2\u3059\u308b\u7814\u7a76\u201d\u3001\u7b2c68\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300018p-Z24-5\uff082021.3.16-19\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u85e4\u672c \u6e13\u4e5f\u3001\u5c0f\u67f3 \u6a39\u3001\u4f50\u85e4 \u62d3\u78e8\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6cd5(OICT)\u3092\u7528\u3044\u305fSiC-MOSFET\u52d5\u4f5c\u6642\u306e\u904e\u6e21\u7684\u5185\u90e8\u6e29\u5ea6\u5909\u5316\u306e\u53ef\u8996\u5316\u201d\u3001\u7b2c68\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300018p-Z05-3\uff082021.3.16-19\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u88cf\u5d0e \u88d5\u4e5f\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a(OICT)\u3092\u7528\u3044\u305f\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u5185\u90e8\u306e\u904e\u6e21\u7684\u6e29\u5ea6\u5909\u5316\u904e\u7a0b\u306e\u6e2c\u5b9a\u201d\u3001\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a\u30fb\u6709\u6a5f\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u7814\u7a76\u4f1a\uff3b\uff2f\uff2d\uff25]\uff082020.12.25-26\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u85e4\u672c \u6e13\u4e5f\u3001\u5c0f\u67f3 \u6a39\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6cd5 (OICT) \u3092\u7528\u3044\u305fSiC\u30a6\u30a7\u30cf\u5185\u90e8\u306e\u904e\u6e21\u7684\u6e29\u5ea6\u30a4\u30e1\u30fc\u30b8\u30f3\u30b0  \u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c17\u56de\u7814\u7a76\u96c6\u4f1a\u30016a-O02\uff08pp.50-51\uff09\uff082020.11.5-6\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8d64\u585a \u7950\u5141\u3001\u4f50\u85e4 \u62d3\u78e8\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308a\u4f5c\u88fd\u3057\u305fP\u578b\u30b2\u30eb\u30de\u30cb\u30a6\u30e0\u8584\u819c\u306e\u96fb\u6c17\u7279\u6027\u8a55\u4fa1 \u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c17\u56de\u7814\u7a76\u96c6\u4f1a\u30016p-P01\u3000\uff08pp.50-51\uff09\uff082020.11.5-6\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c0f\u67f3 \u6a39\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a (OICT) \u3092\u7528\u3044\u305f\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u5185\u90e8\u306e\u904e\u5ea6\u7684\u6e29\u5ea6\u5909\u5316\u306e\u53ef\u8996\u5316\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c17\u56de\u7814\u7a76\u96c6\u4f1a\u30016p-P02   \uff08pp.50-51\uff09\uff082020.11.5-6\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u88cf\u5d0e \u88d5\u4e5f\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a (OICT) \u3092\u7528\u3044\u305f\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u6e29\u5ea6\u6e2c\u5b9a\u306b\u304a\u3051\u308b\u6e2c\u5b9a\u6e29\u5ea6\u7bc4\u56f2\u3068\u7cbe\u5ea6\u306e\u691c\u8a3c\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c17\u56de\u7814\u7a76\u96c6\u4f1a\u30016p-P05\uff08pp.50-51\uff09\uff082020.11.5-6\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c71\u4e0b \u9686\u7950\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u5fae\u5c0f\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u767a\u751f\u6280\u8853\u53ca\u3073\u305d\u306e\u96c6\u7a4d\u5316\u306b\u95a2\u3059\u308b\u7814\u7a76\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c17\u56de\u7814\u7a76\u96c6\u4f1a\u30016p-P06\uff08pp.50-51\uff09\uff082020.11.5-6\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6cb3\u5317 \u7adc\u6cbb\u3001\u82b1\u623f \u5b8f\u660e\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u30e1\u30cb\u30b9\u30ab\u30b9\u529b\u3092\u7528\u3044\u305f\u8584\u819c\u4f4e\u6e29\u8ee2\u5199\u6280\u8853\u306e\u30ed\u30fc\u30eb\u30fb\u30c4\u30fc\u30fb\u30ed\u30fc\u30eb\u30d7\u30ed\u30bb\u30b9\u3078\u306e\u5fdc\u7528\u306b\u5411\u3051\u305f\u7814\u7a76\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c17\u56de\u7814\u7a76\u96c6\u4f1a\u30016p-P09\uff08pp.50-51\uff09\uff082020.11.5-6\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Hoa ThiKhanh Nguyen, Hiroaki Hanafusa, Yuri Mizukawa, Shohei Hayashi, Seichiiro Higashi\u3001\u201cInvestigation on millisecond solid phase crystallization of amorphous silicon films induced by micro thermal plasma jet\u201d\u3001\u3000\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a\u30fb\u30b7\u30ea\u30b3\u30f3\u6750\u6599\u30fb\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\uff3bSDM] \u4fe1\u5b66\u6280\u5831120<\/strong>\uff08205\uff09pp. 20-24.\uff082020.10.22\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Nguyen ThiKhanh Hoa, Yuri Mizukawa, Hiroaki Hanafusa, Seichiiro Higashi\u3001\u201cInvestigation on Rapid Solid Phase Crystallization of Amorphous Silicon Films Induced by Micro-Thermal-Plasma Jet\u201d\u3001\u7b2c81\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300010p-Z10-7\uff082020.9.8-11\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6cb3\u5317\u3000\u7adc\u6cbb\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6c34\u5ddd\u3000\u53cb\u91cc\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u4e2d\u7a7a\u69cb\u9020SOI\u5c64\u3092\u7528\u3044\u305f\u9ad8\u52b9\u7387\u4f4e\u6e29\u8ee2\u5199\u6280\u8853\u306e\u30ed\u30fc\u30ebto\u30ed\u30fc\u30eb\u88fd\u6cd5\u3078\u306e\u5fdc\u7528\u306b\u5411\u3051\u305f\u7814\u7a76\u201d\u3001\u7b2c81\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300010p-Z10-12\uff082020.9.8-11\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u5802\u3000\u5927\u5730\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30b7\u30ea\u30b3\u30f3\u30ad\u30e3\u30c3\u30d7\u30a2\u30cb\u30fc\u30eb\u3092\u884c\u3063\u305f4H-SiC\u8868\u9762\u306e\u96fb\u6c17\u4f1d\u5c0e\u6a5f\u69cb\u306e\u89e3\u6790\u201d\u3001\u7b2c81\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300011a-Z23-8\uff082020.9.8-11\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u85e4\u672c\u3000\u6e13\u4e5f\u3001\u5c0f\u67f3\u3000\u6a39\u3001\u6c34\u5ddd\u3000\u53cb\u91cc\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6cd5(OICT)\u3092\u7528\u3044\u305fSiC\u30a6\u30a7\u30cf\u5185\u90e8\u306e\u71b1\u62e1\u6563\u904e\u7a0b\u306e\u53ef\u8996\u5316\u201d\u3001\u7b2c81\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300011a-Z23-9\uff082020.9.8-11\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4f50\u85e4\u3000\u62d3\u78e8\u3001Mouesca Jean-Marie\u3001Barra Anne-Laure\u3001\u4eca\u4e95\u3000\u57fa\u6674\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001Gambarelli Serge\u3001\u672b\u76ca\u3000\u5d07\u3001\u201c\u65b0\u898f\u8584\u819c\u592a\u967d\u96fb\u6c60\u6750\u6599BaSi2<\/sub>\u5185\u306e\u5e38\u78c1\u6027\u30fb\u8f3b\u5c04\u6027\u6b20\u9665\u201d\u3001\u7b2c81\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300011p-Z01-8\uff082020.9.8-11\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c0f\u67f3\u3000\u6a39\u3001\u6c34\u5ddd\u3000\u53cb\u91cc\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a(OICT)\u3092\u7528\u3044\u305f\u5b9f\u6e2c\u53cd\u5c04\u7387\u6e2c\u5b9a\u306b\u304a\u3051\u308b\u5149\u5438\u53ce\u8981\u56e0\u89e3\u6790\u201d\u3001\u7b2c81\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300011p-Z09-15\uff082020.9.8-11\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4f50\u85e4\u3000\u62d3\u78e8\u3001Jean-Marie Mouesca\u3001 Anne-Laure Barra\u3001 \u4eca\u4e95\u3000\u57fa\u6674\u3001 \u6771\u3000\u6e05\u4e00 \u90ce\u3001 Serge Gambarelli\u3001 \u672b\u76ca \u5d07\u3001 \u201c\u96fb\u5b50\u30b9\u30d4\u30f3\u5e38\u78c1\u6027\u306b\u3088\u308b\u65b0\u898f\u592a\u967d\u96fb\u6c60\u6750 \u6599BaSi2\u5185\u306e\u6b20\u9665\u691c\u51fa\u201d\u30012020\u5e74\u5ea6\u3000\u5fdc\u7528\u7269\u7406\u30fb\u7269\u7406\u7cfb\u5b66\u4f1a\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u5408\u540c\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\uff08Ca-9\uff09\uff082020\u5e748\u67082\u65e5\u3001\u30aa\u30f3\u30e9\u30a4\u30f3\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2019\u5e74\u5ea6<\/p>\n\n\n\n

[Invited] <\/strong>S. Higashi, \u201cDirect Observation of Ultra-rapid Solid Phase Crystallization of Amorphous Silicon Films Irradiated by Micro-Thermal Plasma Jet,\u201d 8th<\/sup> International Symposium on Control of Semiconductor Interfaces\uff08ISCSI-VIII\uff09, (Sendai, Japan, Nov. 27-30, 2019). <\/em>pp.131-132.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Segawa, H. Hanafusa, Y. Mizukawa and S. Higashi, \u201cLarge Area Annealing by Magnetic Field Scanning of Atmospheric Pressure Thermal Plasma Beam,\u201d Proc. Int. Symp. Dry Process (DPS2019), (Hiroshima, Japan, Nov. 21-22, 2019). <\/em>pp. 179-180.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Y. Mizukawa, A. Kameda, H. Hanafusa and S. Higashi, \u201cPrecise determination of Temperature Distribution in Molten on Insulating Substrate Silicon Formed by Atmospheric Pressure Thermal Plasma Jet Annealing,\u201d Proc. Int. Symp. Dry Process (DPS2019), (Hiroshima, Japan, Nov. 21-22, 2019). <\/em>pp. 177-178.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Kameda, H. Hanafusa and S. Higashi, \u201cMeasurement of the Thermo-Optic Coefficient and Verification of Absolute Temperature for Plasma Processing Application of Optical Interference Contactless Thermometer of Silicon Wafer,\u201d Proc. Int. Symp. Dry Process (DPS2019), (Hiroshima, Japan, Nov. 21-22, 2019). <\/em>pp. 11-12.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited] <\/strong>S. Higashi, \u201cSingle-Crystalline Silicon CMOS Fabrication on PET By Meniscus Force Mediated Layer Transfer Technique,\u201d 236th <\/sup>Electrochem. Soc. (ECS) Meeting (Atlanta, GA, USA, Oct. 13 - 17, 2019). <\/em>Abstract\u3000No.\u3000MA2019-02 1177<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
D. Todo, H. Hanafusa, S. Higashi, \u201cInvestigation on Electrical Characteristics of 4H-SiC Schottky-Barrier-Diodes after Silicon-Cap-Annealing,\u201d International Conference on Silicon Carbide and Related Materials 2019 (ICSCRM 2019), (Kyoto, Japan, Sept. 29 - Oct. 4, 2019). <\/em>Tu-P-30<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Hirano, R. Mizukami, T. Yamashita, F. Kondo, H. Hanafusa, Y. Mizukawa and S. Higashi, \u201cDevelopment of High Yield Layer Transfer Process of Single Crystalline Silicon Thin Film on Plastic Substrate and Its Application to Floating Gate Memory Fabrication,\u201d Ext. Abs. 2019 International Conference on Solid State Devices and Materials (SSDM2019), (Nagoya, Japan, Sept. 2-5, 2019)<\/em>. pp. 323-324. G-4-01<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Y. Mizukawa, A. Kameda, H. Hanafusa and S. Higashi, \u201cTwo-dimensional Visualization of Temperature Distribution in Molten Region of a-Si Film during Atmospheric Pressure Thermal Plasma Jet Annealing,\u201d Ext. Abs. 2019 International Conference on Solid State Devices and Materials (SSDM2019), (Nagoya, Japan, Sept. 2-5, 2019)<\/em>. pp. 317-318. G-2-04<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Segawa, H. Hanafusa, Y. Mizukawa, and S. Higashi, \u201cGeneration of Atmospheric Pressure Thermal Plasma Beam by Nitrogen Addition to Ar DC Arc Discharge,\u201d 2019 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2019), (Busan, Korea, Jul. 1-3, 2019),<\/em> pp. 139-140.\u3000<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u30a2\u30cb\u30fc\u30eb\u306b\u304a\u3051\u308b\u653e\u5c04\u6e29\u5ea6\u8a08\u3092\u7528\u3044\u305fGaN\u306e\u6e29\u5ea6\u6e2c\u5b9a\u201d\u3001\u7b2c67\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300013p-PA9-3\uff082020.3.12-15\u3001\u4e0a\u667a\u5927\u5b66\u3000\u56db\u8c37\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e80\u7530\u3000\u671d\u8f1d\u3001\u6c34\u5ddd\u3000\u53cb\u91cc\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u8a08\u3092\u7528\u3044\u305f\u30d7\u30e9\u30ba\u30de\u30d7\u30ed\u30bb\u30b9\u4e2d\u306e\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u6e29\u5ea6\u306e\u9ad8\u7cbe\u5ea6\u6e2c\u5b9a\u201d\u3001\u7b2c67\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300015a-PB2-22\uff082020.3.12-15\u3001\u4e0a\u667a\u5927\u5b66\u3000\u56db\u8c37\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Nguyen ThiKhanh Hoa\u3001Yuri Mizukawa\u3001Hiroaki Hanafusa\u3001Seiichiro Higashi\u3001\u201cInvestigation the solid phase crystallization kinetics at the high-temperature region by annealing amorphous silicon using micro-thermal-plasma je\u201d \u7b2c67\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300015a-PB3-1\uff082020.3.12-15\u3001\u4e0a\u667a\u5927\u5b66\u3000\u56db\u8c37\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u702c\u5ddd\u3000\u548c\u8f1d\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6c34\u5ddd\u3000\u53cb\u91cc\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30d3\u30fc\u30e0\u306e\u78c1\u5834\u30b9\u30ad\u30e3\u30f3\u306b\u3088\u308b\u5927\u9762\u7a4d\u71b1\u51e6\u7406\u6280\u8853\u306e\u7814\u7a76\u201d\u3001\u7b2c67\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300012p-A302-10\uff082020.3.12-15\u3001\u4e0a\u667a\u5927\u5b66\u3000\u56db\u8c37\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c0f\u67f3\u3000\u6a39\u3001\u4e80\u7530\u3000\u671d\u8f1d\u3001\u6c34\u5ddd\u3000\u53cb\u91cc\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5149\u5b66\u5e72\u6e09\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a(OICT)\u3092\u7528\u3044\u305f\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u5185\u90e8\u6e29\u5ea6\u306e\u30df\u30ea\u79d2\u6642\u9593\u5206\u89e3\u6e2c\u5b9a\u201d\u3001\u7b2c67\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300012p-A305-6\uff082020.3.12-15\u3001\u4e0a\u667a\u5927\u5b66\u3000\u56db\u8c37\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6771\u5802\u3000\u5927\u5730\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30b7\u30ea\u30b3\u30f3\u30ad\u30e3\u30c3\u30d7\u30a2\u30cb\u30fc\u30ea\u30f3\u30b0\u3092\u884c\u3063\u305fn\u578b4H-SiC\u306e\u30aa\u30fc\u30df\u30c3\u30af\u30b3\u30f3\u30bf\u30af\u30c8\u5f62\u6210\u30e1\u30ab\u30cb\u30ba\u30e0\u306e\u89e3\u660e\u201d\u3001\u7b2c67\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300015a-A201-8\uff082020.3.12-15\u3001\u4e0a\u667a\u5927\u5b66\u3000\u56db\u8c37\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5e73\u91ce\u3000\u53cb\u8cb4\u3001\u6cb3\u5317\u3000\u7adc\u6cbb\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u8584\u819c\u306e\u30d7\u30e9\u30b9\u30c1\u30c3\u30af\u57fa\u677f\u3078\u306e\u5c40\u6240\u8ee2\u5199\u306b\u95a2\u3059\u308b\u7814\u7a76\u201d\u3001\u7b2c67\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300015p-A305-9\uff082020.3.12-15\u3001\u4e0a\u667a\u5927\u5b66\u3000\u56db\u8c37\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6cb3\u5d0e\u3000\u661f\u8f1d\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u7a92\u7d20\u30d6\u30fc\u30b9\u30c8\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u9ad8\u6e29\u6025\u901f\u71b1\u51e6\u7406\u30684H-SiC\u4e2d\u4e0d\u7d14\u7269\u306e\u9ad8\u901f\u6d3b\u6027\u5316\u201d\u3001\u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a\u3000\u7b2c6\u56de\u8b1b\u6f14\u4f1a\u4e88\u7a3f\u96c6\u3000IIB-10\uff08pp.215-216\uff09 \uff082019.12.3-12.4\u3001\u5e83\u5cf6\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6771\u5802\u3000\u5927\u5730\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30b7\u30ea\u30b3\u30f3\u30ad\u30e3\u30c3\u30d7\u30a2\u30cb\u30fc\u30eb\u3092\u884c\u3063\u305fn\u578b4H-SiC\u306e\u30aa\u30fc\u30df\u30c3\u30af\u30b3\u30f3\u30bf\u30af\u30c8\u5f62\u6210\u8981\u56e0\u306e\u8abf\u67fb\u201d\u3001\u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a\u3000\u7b2c6\u56de\u8b1b\u6f14\u4f1a\u4e88\u7a3f\u96c6\u3000IIB-17\uff08pp.229-230\uff09 \uff082019.12.3-12.4\u3001\u5e83\u5cf6\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6c34\u5ddd\u3000\u53cb\u91cc\u3001\u4e80\u7530 \u671d\u8f1d\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u3067\u5f62\u6210\u3055\u308c\u305f\u878d\u6db2\u30b7\u30ea\u30b3\u30f3\u5185\u306e2\u6b21\u5143\u6e29\u5ea6\u5206\u5e03\u306b\u304a\u3051\u308b\u9ad8\u7cbe\u5ea6\u5224\u5b9a\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c16\u56de\u7814\u7a76\u96c6\u4f1a\u300108P01\uff08pp.50-51\uff09\uff082019.11.8-9\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u4ea4\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Nguyen ThiKhanh Hoa, Yuri Mizukawa, Hiroaki Hanafusa, Seichiiro Higashi\u3001\u201cDirect observation of phase transformation and transient reflectivity of amorphous silicon film during micro-thermal plasma jet irradiation\u201d\u3001 \u7b2c80\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300018p-C309-6\uff082019.9.18-9-21\u3001\u5317\u6d77\u9053\u5927\u5b66\u3000\u672d\u5e4c\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6c34\u5ddd\u3000\u53cb\u91cc\u3001\u4e80\u7530\u3000\u671d\u8f1d\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u4e2d\u306b\u304a\u3051\u308ba-Si\u819c\u4e0a\u6eb6\u878d\u9818\u57df\u306e\u6e29\u5ea6\u5206\u5e03\u53ef\u8996\u5316\u306e\u305f\u3081\u306ein-situ<\/em>\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u201d\u3001\u7b2c80\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300018a-E304-5\uff082019.9.18-9-21\u3001\u5317\u6d77\u9053\u5927\u5b66\u3000\u672d\u5e4c\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u6c34\u306e\u30e1\u30cb\u30b9\u30ab\u30b9\u529b\u3092\u5229\u7528\u3057\u305f\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u8ee2\u5199\u6280\u8853\u306b\u3088\u308b\u30d7\u30e9\u30b9\u30c1\u30c3\u30af\u4e0aCMOS\u30c7\u30d0\u30a4\u30b9\u4f5c\u88fd\u201d\u3001\u5e83\u5cf6\u5927\u5b66\u3001\u9759\u5ca1\u5927\u5b66\u5408\u540c\u30ef\u30fc\u30af\u30b7\u30e7\u30c3\u30d7\u3000\u7814\u7a76\u4ea4\u6d41\u4f1a2019\uff082019.6.28\u3001\u9759\u5ca1\u5927\u5b66\u6d5c\u677e\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2018\u5e74\u5ea6<\/p>\n\n\n\n

<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Nagasawa, H. Hanafusa, S. Higashi, \u201cBatteryless Operation of Single Crystalline Silicon CMOS Logic Circuits on a Flexible Substrate by Perovskite Photovoltaic Cells,\u201d Abs.<\/em> 15th<\/sup> Int. Thin-Film Transistor Conf. (ITC2019), (Naha<\/em>, Japan, Feb. 28 - Mar. 2, 2019)<\/em>. pp. 86-87.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited] <\/strong>S. Higashi, \u201cVisualization of Temperature Field in Molten Silicon Formed by Thermal Plasma Jet Induced Ultra-rapid Annealing,\u201d 2019 Int. Thin-Film Transistor Conf. (ITC2019), (Naha, Japan, Feb. 28 \u2013 Mar. 2, 2019),<\/em> pp.52-53.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited] <\/strong>S. Higashi, \u201cUltra-rapid Phase Transformation of Amorphous Germanium Thin-Films on Insulator Induced by Atmospheric Pressure Thermal Plasma Jet Irradiatio,\u201d 12th<\/sup> International WorkShop on New Group IV Semiconductor Nanoelectronics, (Sendai, Japan, Dec. 6-7, 2018).<\/em><\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Y. Mizukawa, H. Hanafusa and S. Higashi, \u201cVisualization of Temperature Field in Molten Silicon Formed by Atmospheric Pressure Thermal Plasma Jet Irradiation,\u201d Proc. Int. Symp. Dry Process (DPS2018), (Nagoya, Japan, Nov. 13-15, 2018). <\/em>pp. 39-40.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Hanafusa, S. Higashi, and K. Shiozaki, \u201cCapless Annealing of Mg Implanted GaN (0001) Face Using Atmospheric Pressure Thermal Plasma Jet,\u201d Tech. Dig. International Workshop on Nitride Semiconductors (IWN2018), (Kanazawa, Japan, Nov. 11-16, 2018) <\/em>p. 53.<\/em><\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Higashi, H. Harada, and T. Nakatani, \u201cMelting and Crystallization of Amorphous Germanium Films on Insulating Substrate By Atmospheric Pressure Micro-Thermal-Plasma-Jet,\u201d 2018 ECS and SMEQ Joint Int. Meeting (Cancun, Mexico, Sept. 30 - Oct. 4, 2018), <\/em>#1064<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited] <\/strong>Y. Mizukawa, H. Hanafusa, and S. Higashi, \u201cAnalysis of a Molten Region on Amorphous Silicon Film By High-Speed Camera and Contactless Temperature Measurement during Atmospheric Pressure Thermal Plasma Jet Annealing,\u201d 2018 ECS and SMEQ Joint Int. Meeting (Cancun, Mexico, Sept. 30 - Oct. 4, 2018), <\/em>#1196<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
W. Nakano, H. Hanafusa, S. Higashi, \u201cUltra-High-Speed Crystallization of Amorphous Silicon Films on Flexible Glass Substrate by Thermal-PlasmaJet Irradiation Using Cylindrical Rotation Stage,\u201d 2018 International Conference on Solid State Devices and Materials (SSDM2018), (Tokyo, Japan, Sept. 9-13, 2018)<\/em>. N-8-04<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
D. Todo, H. Hanafusa, S. Higashi, \u201cInvestigation on Contact Property on Silicon-Cap-Annealed n-type 4H-SiC,\u201d European Conference on Silicon Carbide and Related Materials (ECSCRM 2018), (Birmingham, UK, Sept. 2-6, 2018).<\/em><\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Kawasaki, H. Hanafusa, S. Higashi, \u201cMillisecond Annealing of 4H-SiC Wafer for Impurity Activation by Nitrogen-boosted Atmospheric Pressure Thermal Plasma Jet,\u201d European Conference on Silicon Carbide and Related Materials (ECSCRM 2018), (Birmingham, UK, Sept. 2-6, 2018).<\/em><\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited] <\/strong>S. Higashi, \u201cMeniscus Force Mediated Transfer of Single-Crystalline Silicon Thin Films on PET Substrate and Its Application to CMOS Circuit Fabrication,\u201d 18th<\/sup> International Meeting on Information Display (IMID2018), (Busan, Korea, Aug. 28-31, 2018).<\/em><\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5869\u5d0e\u3000\u5b8f\u53f8\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u5f8c\u306e\u30dd\u30b9\u30c8\u30a2\u30cb\u30fc\u30eb\u306b\u3088\u308bGa\u6975\u6027\u9762GaN\u306b\u30a4\u30aa\u30f3\u6ce8\u5165\u3057\u305fMg\u306e\u6d3b\u6027\u5316\u4fc3\u9032\u201d\u3001\u7b2c66\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300011a-M121-3\uff082019.3.9-12\u3001\u3000\u6771\u4eac\u5de5\u696d\u5927\u5b66\u3000\u5927\u5ca1\u5c71\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6c34\u5ddd\u3000\u53cb\u91cc\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u4e2d\u306e\u6eb6\u878d\u30b7\u30ea\u30b3\u30f3\u5185\u6e29\u5ea6\u5206\u5e03\u89e3\u6790\u201d\u3001 \u7b2c66\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300010a-M114-9\uff082019.3.9-12\u3001\u6771\u4eac\u5de5\u696d\u5927\u5b66\u3000\u5927\u5ca1\u5c71\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6c96\u3000\u6634\u5fd7\u3001\u6771\u3000\u6e05\u4e00\u90ce, \u201c\u83ca\u6c60\u7dda\u30d1\u30bf\u30fc\u30f3\u89e3\u6790\u306b\u3088\u308bSi\u7d50\u6676\u5185\u306e\u6b20\u9665\u91cf\u8a55\u4fa1\u6cd5\u306e\u958b\u767a\u201d \u7b2c66\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6 11p-PA6-3 \uff082019.3.9-12\u3001\u6771\u4eac\u5de5\u696d\u5927\u5b66\u3000\u5927\u5ca1\u5c71\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9577\u6fa4\u3000\u8061\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30da\u30ed\u30d6\u30b9\u30ab\u30a4\u30c8\u592a\u967d\u96fb\u6c60\u3068\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3CMOS\u8ad6\u7406\u56de\u8def\u306e\u30ac\u30e9\u30b9\u57fa\u677f\u4e0a\u306b\u304a\u3051\u308b\u96c6\u7a4d\u5316\u201d\u3001\u7b2c66\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300011a-PB3-9\uff082019.3.9-12\u3001\u6771\u4eac\u5de5\u696d\u5927\u5b66\u3000\u5927\u5ca1\u5c71\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8fd1\u85e4\u3000\u53f2\u5eb7\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30d7\u30e9\u30b9\u30c1\u30c3\u30af\u4e0a\u306e\u30d5\u30ed\u30fc\u30c6\u30a3\u30f3\u30b0\u30b2\u30fc\u30c8\u30e1\u30e2\u30ea\u4f5c\u88fd\u306e\u305f\u3081\u306e\u4f4e\u6e29\u30d7\u30ed\u30bb\u30b9\u6280\u8853\u306b\u95a2\u3059\u308b\u7814\u7a76\u201d\u3001\u7b2c66\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u30009p-M114-8\uff082019.3.9-12\u3001\u3000\u6771\u4eac\u5de5\u696d\u5927\u5b66\u3000\u5927\u5ca1\u5c71\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5e73\u91ce\u3000\u53cb\u8cb4\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u8584\u819c\u306e\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u57fa\u677f\u4e0a\u3078\u306e\u7e70\u308a\u8fd4\u3057\u8ee2\u5199\u30d7\u30ed\u30bb\u30b9\u306e\u69cb\u7bc9\u201d\u3001\u7b2c66\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300011a-W934-5\uff082019.3.9-12\u3001\u6771\u4eac\u5de5\u696d\u5927\u5b66\u3000\u5927\u5ca1\u5c71\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6cb3\u5317\u3000\u7adc\u6cbb\u3001\u5e73\u91ce\u3000\u53cb\u8cb4\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u4e2d\u7a7a\u69cb\u9020SOI\u5c64\u3092\u7528\u3044\u305f\u9ad8\u52b9\u7387\u4f4e\u6e29\u8ee2\u5199\u6280\u8853\u306b\u304a\u3051\u308b\u8ee2\u5199\u6642\u9593\u306e\u77ed\u7e2e\u5316\u201d\u3001\u7b2c66\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u30009p-M114-7\uff082019.3.9-12\u3001\u6771\u4eac\u5de5\u696d\u5927\u5b66\u3000\u5927\u5ca1\u5c71\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e80\u7530\u3000\u671d\u8f1d\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u71b1\u96fb\u5bfe\u3092\u7528\u3044\u305f\u88cf\u9762\u6e29\u5ea6\u6e2c\u5b9a\u306b\u3088\u308b\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u306e\u7d76\u5bfe\u6e29\u5ea6\u306e\u691c\u8a3c\u201d\u3001 \u7b2c66\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u300012a-W641-8\uff082019.3.9-12\u3001\u6771\u4eac\u5de5\u696d\u5927\u5b66\u3000\u5927\u5ca1\u5c71\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[\u62db\u5f85\u8b1b\u6f14]<\/strong> \u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30e1\u30cb\u30b9\u30ab\u30b9\u529b\u3092\u5229\u7528\u3057\u305f\u8ee2\u5199\u6cd5\u306b\u3088\u308b\u30d7\u30e9\u30b9\u30c1\u30c3\u30af\u57fa\u677f\u4e0a\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3CMOS\u56de\u8def\u4f5c\u88fd\u6280\u8853\u201d\u3001\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u754c\u9762\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u7814\u7a76\u4f1a \u2015\u6750\u6599\u30fb\u30d7\u30ed\u30bb\u30b9\u30fb\u30c7\u30d0\u30a4\u30b9\u7279\u6027\u306e\u7269\u7406\u2015\u300d (\u7b2c24\u56de\u7814\u7a76\u4f1a)\u3000\u4e88\u7a3f\u96c6pp.47-50\uff082019.1.24-1.26\u3001\u6771\u30ec\u7dcf\u5408\u7814\u4fee\u30bb\u30f3\u30bf\u30fc\uff09.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[\u62db\u5f85\u8b1b\u6f14] \u6771\u3000\u6e05\u4e00\u90ce\u3001\u300c\u30d8\u30c6\u30ed\u30a4\u30f3\u30c6\u30b0\u30ec\u30fc\u30b7\u30e7\u30f3\u306b\u5411\u3051\u305f\u30d7\u30e9\u30b9\u30c1\u30c3\u30af\u3078\u306e\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u8584\u819c\u8ee2\u5199\u6280\u8853\u300d\u5e73\u621030\u5e74\u5ea6\u65e5\u672c\u6750\u6599\u79d1\u5b66\u4f1a\u95a2\u897f\u30fb\u4e2d\u56fd\u652f\u90e8\u3000\u7b2c1\u56de\u652f\u90e8\u8b1b\u6f14\u4f1a\u3000\u3000\uff082018\u5e7411\u670828\u65e5\u3001\u8fd1\u757f\u5927\u5b66\u5e83\u5cf6\u30ad\u30e3\u30f3\u30d1\u30b9\uff09.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6c34\u5ddd\u3000\u53cb\u91cc\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u4e2d\u306b\u304a\u3051\u308b\u6eb6\u878d\u30b7\u30ea\u30b3\u30f3\u5185\u6e29\u5ea6\u5206\u5e03\u306e\uff12\u6b21\u5143\u7684\u53ef\u8996\u5316\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c15\u56de\u7814\u7a76\u96c6\u4f1a\u300109a-O01\uff08pp.44-45\uff09\uff082018.11.9-10\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u4ea4\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u702c\u5ddd\u3000\u548c\u8f1d\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u7a92\u7d20\u30d6\u30fc\u30b9\u30c8\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u306e\u96fb\u6975\u6d88\u8017\u91cf\u306e\u4f4e\u6e1b\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c15\u56de\u7814\u7a76\u96c6\u4f1a\u300110p-P02\uff08pp.157-160\uff09\uff082018.11.9-10\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u4ea4\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9577\u6fa4\u3000\u8061\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30da\u30ed\u30d6\u30b9\u30ab\u30a4\u30c8\u592a\u967d\u96fb\u6c60\u306b\u3088\u308b\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u57fa\u677f\u4e0a\u306e\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3CMOS \u8ad6\u7406\u56de\u8def\u306e\u30d0\u30c3\u30c6\u30ea\u30fc\u30ec\u30b9\u52d5\u4f5c\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c15\u56de\u7814\u7a76\u96c6\u4f1a\u300109p-O03\uff08pp.62-65\uff09\u3001\uff082018.11.9-10\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u4ea4\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5869\u5d0e\u3000\u5b8f\u53f8\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308bGa\u6975\u6027\u9762GaN\u306b\u30a4\u30aa\u30f3\u6ce8\u5165\u3057\u305fMg\u306e\u6d3b\u6027\u5316\u201d\u3001\u7b2c79\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300019p-CE-13 \uff082018.9.18-21\u3001\u540d\u53e4\u5c4b\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6c34\u5ddd\u3000\u53cb\u91cc\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u6eb6\u878d\u30b7\u30ea\u30b3\u30f3\u5185\u6e29\u5ea6\u5206\u5e03\u306e\u53ef\u8996\u5316\u201d\u3001\u7b2c79\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300020a-233-1\uff082018.9.18-21\u3001\u540d\u53e4\u5c4b\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6cb3\u5d0e\u3000\u661f\u8f1d\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u7a92\u7d20\u30d6\u30fc\u30b9\u30c8\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f4H-SiC\u30a6\u30a7\u30cf\u4e2d\u4e0d\u7d14\u7269\u306e\u30df\u30ea\u79d2\u9ad8\u901f\u6d3b\u6027\u5316\u30a2\u30cb\u30fc\u30eb\u201d\u3001 \u7b2c79\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300020p-221C-2\uff082018.9.18-21\u3001\u540d\u53e4\u5c4b\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e80\u7530\u3000\u671d\u8f1d\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30b7\u30ea\u30b3\u30f3\u71b1\u5149\u5b66\u4fc2\u6570\u306e\u7cbe\u5bc6\u6e2c\u5b9a\u306b\u3088\u308b\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u306e\u9ad8\u7cbe\u5ea6\u5316\u201d\u3001\u7b2c79\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300021a-233-4\uff082018.9.18-21\u3001\u540d\u53e4\u5c4b\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9577\u6fa4\u3000\u8061\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30da\u30ed\u30d6\u30b9\u30ab\u30a4\u30c8\u592a\u967d\u96fb\u6c60\u306b\u3088\u308b\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u57fa\u677f\u4e0a\u306e\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3CMOS\u8ad6\u7406\u56de\u8def\u306e\u30d0\u30c3\u30c6\u30ea\u30fc\u30ec\u30b9\u52d5\u4f5c\u201d\u3001\u7b2c79\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300021a-432-6\uff082018.9.18-21\u3001\u540d\u53e4\u5c4b\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6771\u5802\u3000\u5927\u5730\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30b7\u30ea\u30b3\u30f3\u30ad\u30e3\u30c3\u30d7\u30a2\u30cb\u30fc\u30eb\u3092\u884c\u3063\u305fn\u578b4H-SiC\u306e\u30b3\u30f3\u30bf\u30af\u30c8\u7279\u6027\u306b\u95a2\u3059\u308b\u8abf\u67fb\u201d\u3001\u7b2c79\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300020p-221C-3\uff082018.9.18-21\u3001\u540d\u53e4\u5c4b\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5e73\u91ce\u3000\u53cb\u8cb4\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u4e2d\u7a7a\u69cb\u9020 SOI \u5c64\u3092\u7528\u3044\u305f\u9ad8\u52b9\u7387\u4f4e\u6e29\u8ee2\u5199\u6280\u8853\u306e\u305f\u3081\u306e \u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30d7\u30ed\u30bb\u30b9\u306e\u69cb\u7bc9\u201d\u3001\u7b2c79\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300019a-233-8\uff082018.9.18-21\u3001\u540d\u53e4\u5c4b\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8fd1\u85e4\u3000\u53f2\u5eb7\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u4e2d\u7a7a\u69cb\u9020SOI\u5c64\u306e\u4f4e\u6e29\u8ee2\u5199\u6280\u8853\u3092\u7528\u3044\u305f\u30d5\u30ed\u30fc\u30c6\u30a3\u30f3\u30b0\u30b2\u30fc\u30c8\u4f5c\u88fd\u30d7\u30ed\u30bb\u30b9\u6280\u8853\u306b\u95a2\u3059\u308b\u7814\u7a76\u201d\u3001\u7b2c79\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300019a-233-9\uff082018.9.18-21\u3001\u540d\u53e4\u5c4b\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6cb3\u5d0e\u3000\u661f\u8f1d\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u7a92\u7d20\u30d6\u30fc\u30b9\u30c8\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b4H-SiC\u30a6\u30a7\u30cf\u306e\u30df\u30ea\u79d2\u30a2\u30cb\u30fc\u30eb\u3068\u4e0d\u7d14\u7269\u306e\u9ad8\u901f\u6d3b\u6027\u5316\u3001\u30002018\u5e74\u5ea6\u3000\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u82e5\u624b\u534a\u5c0e\u4f53\u7814\u7a76\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000P-31\uff082018.8.4-5\u3001\u5e83\u5cf6\u5927\u5b66\u3000\u897f\u6761\u5171\u540c\u7814\u4fee\u30bb\u30f3\u30bf\u30fc\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2017\u5e74\u5ea6<\/p>\n\n\n\n

[Invited] <\/strong>H. Hanafusa, <\/strong>S. Higashi, \u201cActivation of High-temperature-implanted Phosphorus Atoms in 4H-SiC by Atmospheric Pressure Thermal Plasma Jet Annealing,\u201d Ext. Abs. 2018 18th<\/sup> Int. Workshop Junction Tech. (IWJT-2018), (Shanghai, China, Mar. 8-9, 2018)<\/em>, pp. 24-27.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Teramoto, H. Hanafusa, and S. Higashi, \u201cLarge Area Annealing Method by Magnetic Field Deflected Atmospheric-pressure Thermal-Plasma-Jet irradiation,\u201d Ext. Abs. Int. Workshop Nanodevice Technologies 2018 (IWNT2018), (Higashi-Hiroshima, Japan, Mar. 2, 2018)<\/em>, pp. 32-33.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited] <\/strong>S. Higashi,<\/strong> \u201cNitrogen-boosted Atmospheric Pressure Thermal-Plasma-Jet Generation and Its Application to Crystallization of Amorphous Silicon Films on Flexible Glass,\u201d 2018 Int. Thin-Film Transistor Conf. (ITC2018), (Guangzhou, China, Feb. 28 \u2013 Mar. 2, 2018),<\/em> pp. 46.<\/em><\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
R. Mizukami, T. Yamashita, and S. Higashi, \u201cSingle Crystalline Silicon CMOS Circuit Fabrication on Polyethylene Terephthalate Substrate by Meniscus Force Mediated Layer Transfer Technique,\u201d 2018 Int. Thin-Film Transistor Conf. (ITC2018), (Guangzhou, China, Feb. 28 \u2013 Mar. 2, 2018),<\/em> pp. 44.<\/em><\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited] <\/strong>S. Higashi, <\/strong>\u201cCrystallization of Group IV Semiconductor Thin-Films by Atmospheric Pressure Thermal Plasma Jet,\u201d 11th<\/sup> International WorkShop on New Group IV Semiconductor Nanoelectronics, (Sendai, Japan, Feb. 23-24, 2018).<\/em><\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Higashi, M. Wei, T. Kanamaru, \u201cLow Temperature Formation of SiNx Encapsulation Films by Remote Plasma Enhanced Chemical Vapor Deposition,\u201d Proc. 24th<\/sup> Int. Display Workshops (IDW\u201917), (Sapporo, Japan, Dec. 6-8, 2017), <\/em>pp.687-689.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
R. Mizukami, T. Yamashita, S. Higashi, \u201cSingle Crystalline Silicon CMOS Circuit Fabrication on Plastic Substrate by Meniscus Force Mediated Layer Transfer Technique,\u201d Proc. 24th<\/sup> Int. Display Workshops (IDW\u201917), (Sapporo, Japan, Dec. 6-8, 2017), <\/em>pp. 1525-1528.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Hanafusa, W. Nakano, R. Nakashima and S. Higashi, \u201cExtremely High-power-density Atmospheric Pressure Thermal-Plasma-Jet Generated by Nitrogen-boost Effect,\u201d Proc. Int. Symp. Dry Process (DPS2017), (Tokyo, Japan, Nov. 16-17, 2017). <\/em>pp. 33-34.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Hanafusa, T. Taniguchi and S. Higashi, \u201cSilicidation-Less Ohmic Contact Formation on N-Type 4H-SiC with Silicon Cap Annealing,\u201d International Conference on Silicon Carbide and Related Materials (ICSCRM2017)<\/em>, (Washington, D.C., Sept. 17\u201322, 2017).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Hieda, H. Hanafusa, S. Higashi, \u201cInvestigation on Crack suppression by Thermal-Plasma-Jet Crystallization of Amorphous Silicon Films on Flexible Glass Substrate,\u201d 231st <\/sup>Electrochem. Soc. (ECS) Meeting (New Orleans, LA, USA, May. 28 - Jun.1, 2017). <\/em>#1019.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6771\u5802\u3000\u5927\u5730\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30b7\u30ea\u30b3\u30f3\u30ad\u30e3\u30c3\u30d7\u30a2\u30cb\u30fc\u30eb\u3092\u7528\u3044\u305fn\u578b4H-SiC\u306e\u30aa\u30fc\u30df\u30c3\u30af\u30b3\u30f3\u30bf\u30af\u30c8\u7279\u6027\u306b\u5bfe\u3059\u308b\u6607\u6e29\u30ec\u30fc\u30c8\u306e\u5f71\u97ff\u201d\u3001\u7b2c65\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300020a-D103-2\uff082018.3.17-20\u3001\u65e9\u7a32\u7530\u5927\u5b66\u3000\u897f\u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5869\u5d0e\u3000\u5b8f\u53f8\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308bGaN\u4e2d\u306eMg\u306e\u6d3b\u6027\u5316\u201d\u3001\u7b2c65\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300018a-C302-12\u3000\uff082018.3.17-20\u3001\u65e9\u7a32\u7530\u5927\u5b66\u3000\u897f\u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c71\u4e0b\u3000\u77e5\u5fb3\u3001\u6c34\u4e0a\u3000\u9686\u9054\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30a4\u30aa\u30f3\u6ce8\u5165\u3092\u7528\u3044\u305f\u4e2d\u7a7a\u69cb\u9020SOI\u5c64\u306e\u30d4\u30e9\u30fc\u5f62\u72b6\u5236\u5fa1\u306b\u3088\u308b\u9ad8\u52b9\u7387\u4f4e\u6e29\u8ee2\u5199\u6cd5\u201d \u7b2c65\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300017a-C101-11\uff082018.3.17-20\u3001\u65e9\u7a32\u7530\u5927\u5b66\u3000\u897f\u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6c34\u4e0a\u3000\u9686\u9054\u3001\u5c71\u4e0b\u3000\u77e5\u5fb3\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u4e2d\u7a7a\u69cb\u9020SOI\u5c64\u3092\u7528\u3044\u305f\u4f4e\u6e29\u8ee2\u5199\u306b\u3088\u308b\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u57fa\u677f\u4e0a\u3067\u306e\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3CMOS\u56de\u8def\u4f5c\u88fd\u30d7\u30ed\u30bb\u30b9\u306e\u69cb\u7bc9\u201d \u7b2c65\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300017a-C101-10\uff082018.3.17-20\u3001\u65e9\u7a32\u7530\u5927\u5b66\u3000\u897f\u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u539f\u7530\u3000\u5927\u5922\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u9ad8\u79fb\u52d5\u5ea6n\u578bGe\u819c\u306e\u4f5c\u88fd\u201d \u7b2c65\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300017a-C101-3\uff082018.3.17-20\u3001\u65e9\u7a32\u7530\u5927\u5b66\u3000\u897f\u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6c34\u5ddd\u3000\u53cb\u91cc\u3001\u4e2d\u91ce\u3000\u822a\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u3068\u9ad8\u901f\u5ea6\u30ab\u30e1\u30e9\u7d44\u307f\u8fbc\u307f\u578b\u56de\u8ee2\u30b9\u30c6\u30fc\u30b8\u306b\u3088\u308b\u7d50\u6676\u6210\u9577\u306e\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u89b3\u5bdf\u201d\u3001\u7b2c65\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300017a-C101-2\uff082018.3.17-20\u3001\u65e9\u7a32\u7530\u5927\u5b66\u3000\u897f\u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u5802\u3000\u5927\u5730\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30b7\u30ea\u30b3\u30f3\u30ad\u30e3\u30c3\u30d7\u30a2\u30cb\u30fc\u30eb\u51e6\u7406\u3057\u305fn\u578b4H-SiC\u8868\u9762\u306e\u96fb\u5b50\u72b6\u614b\u8a55\u4fa1\u201d\u3001\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u754c\u9762\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u7814\u7a76\u4f1a\u3000\u7b2c23\u56de\u7814\u7a76\u4f1a\u3000\u6750\u6599\u30fb\u30d7\u30ed\u30bb\u30b9\u30fb\u30c7\u30d0\u30a4\u30b9\u7279\u6027\u306e\u7269\u7406\u3000pp. 107 \u2013 110.\uff082018.1.19-1.20\u3001\u6771\u30ec\u7dcf\u5408\u7814\u4fee\u30bb\u30f3\u30bf\u30fc\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6d5c\u7530\u3000\u614e\u4e5f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u8acf\u8a2a\u3000\u8f1d\u3001\u6c60\u4e0a\u3000\u6d69\u3001\u201c\u30a8\u30ad\u30b7\u30de\u30ec\u30fc\u30b6\u30fc\u306b\u3088\u308bGe\u4e2d\u306eAs\u306e\u9ad8\u52b9\u7387\u6d3b\u6027\u5316\u53ca\u3073X\u7dda\u5149\u96fb\u5b50\u5206\u5149\u6cd5\u3092\u7528\u3044\u305f\u5316\u5b66\u72b6\u614b\u8a55\u4fa1\u201d\u3001\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u754c\u9762\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u7814\u7a76\u4f1a\u3000\u7b2c23\u56de\u7814\u7a76\u4f1a\u3000\u6750\u6599\u30fb\u30d7\u30ed\u30bb\u30b9\u30fb\u30c7\u30d0\u30a4\u30b9\u7279\u6027\u306e\u7269\u7406\u3000pp. 143 \u2013 146.\uff082018.1.19-1.20\u3001\u6771\u30ec\u7dcf\u5408\u7814\u4fee\u30bb\u30f3\u30bf\u30fc\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[\u62db\u5f85\u8b1b\u6f14] <\/strong>\u6771\u3000\u6e05\u4e00\u90ce\u3001\u300c\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u8584\u819c\u8ee2\u5199\u6280\u8853\u306b\u3088\u308b\u30d7\u30e9\u30b9\u30c1\u30c3\u30af\u4e0a\uff23\uff2d\uff2f\uff33\u56de\u8def\u52d5\u4f5c\u300d\u3001\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a \u6709\u6a5f\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u7814\u7a76\u4f1a\uff082017\u5e7412\u67081\u65e5\u3001\u30b5\u30f3\u30e1\u30c3\u30bb\u9ce5\u6816\uff09, \u4fe1\u5b66\u6280\u5831117<\/strong>\uff08334\uff09\uff082017\u5e7411\u670824\u65e5\uff09pp. 53-57.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5bfa\u672c\u3000\u61b2\u53f8\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201cSiC \u30c7\u30d0\u30a4\u30b9\u4f5c\u88fd\u30d7\u30ed\u30bb\u30b9\u306b\u5411\u3051\u305f\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u306e\u78c1\u5834\u504f\u5411\u306b\u3088\u308b\u5927\u9762\u7a4d\u71b1\u51e6\u7406 \u6280\u8853\u306e\u7814\u7a76\u201d\u3001\u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a\u3000\u7b2c4\u56de\u8b1b\u6f14\u4f1a\u3000IIA-8\u3000\uff08pp. 171-172\uff09\u3000\uff082017.11.1-11.2\u3001\u540d\u53e4\u5c4b\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f\u3000\u5b8f\u660e\u3001\u4e2d\u91ce\u3000\u822a\u3001\u4e2d\u5cf6\u3000\u6dbc\u4ecb\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u7a92\u7d20\u30d6\u30fc\u30b9\u30c8\u306b\u3088\u308a\u8d85\u30cf\u30a4\u30d1\u30ef\u30fc\u5316\u3057\u305f\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u306e\u52a0\u71b1\u7279\u6027\u201d\u3001 \u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c14\u56de\u7814\u7a76\u96c6\u4f1a\u300120p-\uff2f02 (pp.\u300045-47)\uff082017.10.20-10.21\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u6821\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6c96\u3000\u6634\u5fd7\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u83ca\u6c60\u7dda\u30d1\u30bf\u30fc\u30f3\u89e3\u6790\u306b\u3088\u308b\u7d50\u6676\u6b20\u9665\u8a55\u4fa1\u306e\u7814\u7a76\u201d\u3001\u3000\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c14\u56de\u7814\u7a76\u96c6\u4f1a\u300120p-P03 (pp. 62-64)\uff082017.10.20-10.21\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u6821\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u7a17\u7530\u3000\u7adc\u5df1\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u30ac\u30e9\u30b9\u57fa\u677f\u4e0a\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u819c\u306e\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u306b\u304a\u3051\u308b\u6b8b\u7559\u71b1\u5fdc\u529b\u89e3\u6790\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c14\u56de\u7814\u7a76\u96c6\u4f1a\u300120p-P05 (pp. 65-67)\uff082017.10.20-10.21\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u6821\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u5cf6\u3000\u6dbc\u4ecb\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30cf\u30a4\u30d1\u30ef\u30fc\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u30b7\u30ea\u30b3\u30f3\u8584\u819c\u306e\u9ad8\u901f\u6eb6\u878d\u7d50\u6676\u5316\u3068\u7d50\u6676\u6210\u9577\u306e\u305d\u306e\u5834\u89b3\u5bdf\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c14\u56de\u7814\u7a76\u96c6\u4f1a\u300120p-P07 (pp. 68-71)\uff082017.10.20-10.21\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u6821\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6c34\u4e0a\u3000\u9686\u9054\u3001\u5c71\u4e0b\u3000\u77e5\u5fb3\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u4e2d\u7a7a\u69cb\u9020SOI\u5c64\u3092\u7528\u3044\u305f\u4f4e\u6e29\u8ee2\u5199\u306b\u3088\u308b\u30d7\u30e9\u30b9\u30c1\u30c3\u30af\u57fa\u677f\u4e0a\u3067\u306e\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3CMOS\u56de\u8def\u4f5c\u88fd\u30d7\u30ed\u30bb\u30b9\u69cb\u7bc9\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c14\u56de\u7814\u7a76\u96c6\u4f1a\u300120p-\uff3202 (pp. 104-107)\uff082017.10.20-10.21\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u6821\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u91ce\u3000\u822a\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5186\u7b52\u578b\u56de\u8ee2\u30b9\u30c6\u30fc\u30b8\u3092\u7528\u3044\u305f\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u30ac\u30e9\u30b9\u57fa\u677f\u4e0a\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u53ca\u3073\u5927\u9762\u7a4d\u51e6\u7406\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c14\u56de\u7814\u7a76\u96c6\u4f1a\u300121p-P06 (pp. 145-147)\uff082017.10.20-10.21\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u6821\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u91ce\u3000\u822a\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5186\u7b52\u578b\u56de\u8ee2\u30b9\u30c6\u30fc\u30b8\u3092\u7528\u3044\u305f\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u30ac\u30e9\u30b9\u57fa\u677f\u4e0a\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u819c\u306e\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u9ad8\u901f\u7d50\u6676\u5316\u201d\u3001\u7b2c78\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u30007a-C21-10\uff082017.9.5-8\u3001\u798f\u5ca1\u56fd\u969b\u4f1a\u8b70\u5834\u30fb\u56fd\u969b\u30bb\u30f3\u30bf\u30fc\u30fb\u798f\u5ca1\u30b5\u30f3\u30d1\u30ec\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u7a17\u7530\u3000\u7adc\u5df1\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u30ac\u30e9\u30b9\u57fa\u677f\u4e0a\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u819c\u306e\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u306b\u304a\u3051\u308b\u6b8b\u7559\u71b1\u5fdc\u529b\u89e3\u6790\u201d\u3001\u7b2c78\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u30007a-C21-9\uff082017.9.5-8\u3001\u798f\u5ca1\u56fd\u969b\u4f1a\u8b70\u5834\u30fb\u56fd\u969b\u30bb\u30f3\u30bf\u30fc\u30fb\u798f\u5ca1\u30b5\u30f3\u30d1\u30ec\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u91ce\u3000\u822a\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5186\u7b52\u578b\u56de\u8ee2\u30b9\u30c6\u30fc\u30b8\u3092\u7528\u3044\u305f\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u30ac\u30e9\u30b9\u57fa\u677f\u4e0a\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u819c\u306e\u7a92\u7d20\u30d6\u30fc\u30b9\u30c8\u5927\u6c17\u5727\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u9023\u7d9a\u7d50\u6676\u6210\u9577\u201d\u3001\u7b2c78\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u30005a-A204-3\uff082017.9.5-8\u3001\u798f\u5ca1\u56fd\u969b\u4f1a\u8b70\u5834\u30fb\u56fd\u969b\u30bb\u30f3\u30bf\u30fc\u30fb\u798f\u5ca1\u30b5\u30f3\u30d1\u30ec\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5bfa\u672c\u3000\u61b2\u53f8\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201cSiC\u30c7\u30d0\u30a4\u30b9\u4f5c\u88fd\u30d7\u30ed\u30bb\u30b9\u306b\u5411\u3051\u305f\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u306b\u3088\u308b\u5927\u9762\u7a4d\u71b1\u51e6\u7406\u201d\u3001\u7b2c78\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u30006a-A201-11\uff082017.9.5-8\u3001\u798f\u5ca1\u56fd\u969b\u4f1a\u8b70\u5834\u30fb\u56fd\u969b\u30bb\u30f3\u30bf\u30fc\u30fb\u798f\u5ca1\u30b5\u30f3\u30d1\u30ec\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[\u6ce8\u76ee\u8b1b\u6f14]\u3000<\/strong> \u82b1\u623f\u3000\u5b8f\u660e\u3001\u4e2d\u5cf6\u3000\u6dbc\u4ecb\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u7a92\u7d20\u30d6\u30fc\u30b9\u30c8\u306b\u3088\u308b\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u306e\u8d85\u30cf\u30a4\u30d1\u30ef\u30fc\u5316\u201d\u3001\u7b2c78\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u30007p-A413-9\uff082017.9.5-8\u3001\u798f\u5ca1\u56fd\u969b\u4f1a\u8b70\u5834\u30fb\u56fd\u969b\u30bb\u30f3\u30bf\u30fc\u30fb\u798f\u5ca1\u30b5\u30f3\u30d1\u30ec\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u91ce\u3000\u822a\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5186\u7b52\u578b\u56de\u8ee2\u30b9\u30c6\u30fc\u30b8\u3092\u7528\u3044\u305f\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u30ac\u30e9\u30b9\u57fa\u677f\u4e0a\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u819c\u306e\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u304a\u3088\u3073\u9023\u7d9a\u7d50\u6676\u6210\u9577\u201d\u30012017\u5e74\u5ea6\u3000\u5fdc\u7528\u7269\u7406\u30fb\u7269\u7406\u7cfb\u5b66\u4f1a\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u3000\u5408\u540c\u5b66\u8853\u8b1b\u6f14\u4f1a\uff08Da-9\uff09P.61.\uff082017.7.29\u3001\u611b\u5a9b\u5927\u5b66\u3000\u57ce\u5317\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u91ce\u3000\u822a\u3001\u7a17\u7530\u3000\u7adc\u5df1\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u56de\u8ee2\u30b9\u30c6\u30fc\u30b8\u3092\u7528\u3044\u305f\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u30ac\u30e9\u30b9\u57fa\u677f\u4e0a\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u306e\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u201d\u3001\u30b7\u30ea\u30b3\u30f3\u6750\u6599\u30fb\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\uff3bSDM]\uff082017.4.20-4.21\u3001\u9f8d\u90f7\u753a\u751f\u6daf\u5b66\u7fd2\u30bb\u30f3\u30bf\u30fc\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2016\u5e74\u5ea6<\/p>\n\n\n\n

R. Mizukami, S. Takeshima, T. Yamashita, and S. Higashi, \u201cImprovement of Transfer Yield of Single-Crystalline Silicon Films and Fabrication of Thin-Film Transistors and Inverters on Plastic Substrate,\u201d Ext. Abs. Int. Workshop Nanodevice Technologies 2017 (IWNT2017), (Higashi-Hiroshima, Japan, Mar. 2, 2017)<\/em>, pp. 44-45.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Takeshima, R. Mizukami, T. Yamashita, and S. Higashi, \u201cMiniaturization of Single Crystalline Silicon Layer Transferred to Flexible Substrate by Meniscus Force Mediated Layer Transfer Technique,\u201d Ext. Abs. Int. Workshop Nanodevice Technologies 2017 (IWNT2017), (Higashi-Hiroshima, Japan, Mar. 2, 2017)<\/em>, pp. 46-47.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Tamaru, H. Ikenoue, and S. Higashi, \u201cCrystallization and Activation of As+ <\/sup>doped Amorphous Ge films by Excimer Laser Annealing,\u201d Ext. Abs. Int. Workshop Nanodevice Technologies 2017 (IWNT2017), (Higashi-Hiroshima, Japan, Mar. 2, 2017)<\/em>, pp. 48-49.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Hieda, H. Hanafusa, and S. Higashi, \u201cInvestigation on Crack Suppression Mechanism in Micro-Thermal-Plasma-Jet Crystallization of Amorphous Silicon Films on Flexible Glass Substrate,\u201d Ext. Abs. Int. Workshop Nanodevice Technologies 2017 (IWNT2017), (Higashi-Hiroshima, Japan, Mar. 2, 2017)<\/em>, pp. 50-51.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Taniguchi, H. Hanafusa, and S. Higashi, \u201cFormation of Ohmic Contact for N-type 4H-SiC Layer by Silicon Cap Annealing,\u201d Ext. Abs. Int. Workshop Nanodevice Technologies 2017 (IWNT2017), (Higashi-Hiroshima, Japan, Mar. 2, 2017)<\/em>, pp. 52-53.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
J. Inoue, H. Hanafusa, and S. Higashi, \u201cDevelopment of Self-Align Process Technique for 4H-SiC MOSFET with Thermal-Plasma-Jet Annealing,\u201d Ext. Abs. Int. Workshop Nanodevice Technologies 2017 (IWNT2017), (Higashi-Hiroshima, Japan, Mar. 2, 2017)<\/em>, pp. 54-55.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
R. Mizukami, S. Takeshima, T. Yamashita and S. Higashi, \u201cFabrication of single crystalline silicon thin film transistors and logic circuits on plastic substrate by meniscus force mediated layer transfer technique,\u201d 13th<\/sup> Int. Thin-Film Transistor Conf. 2017 (ITC2017), (Austin, TX, USA, Feb. 23-24, 2017)<\/em>, pp. 17-18.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Hieda, R. Shin, H. Hanafusa, S. Higashi, \u201cMicro-thermal-plasma-jet Crystallization of Amorphous Silicon Films on Flexible Glass Substrate,\u201d 34th<\/sup><\/em> Symposium on Plasma Processing (SPP34) \/ The 29th <\/sup>Symposium on Plasma Science for Materials (SPSM29), (Hokkaido, Japan, Jan. 16-18, 2017)<\/em>, 17pB5.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
R. Nakashima, R. Shin, H. Hanafusa and S. Higashi, \u201cGeneration of Ultra High Power Thermal Plasma Jet (Super TPJ) and Its Application to Crystallization of Amorphous Silicon Films,\u201d Proc. Int. Symp. Dry Process (DPS2016), (Sapporo, Japan, Nov. 21-22, 2016), <\/em>pp. 33-34.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Harada, R. Shin, H. Hanafusa, S. Higashi, \u201cCrystallization and Activationof P+ Dope a-Ge Film by Atmospheric Pressure Micro-Thermal-Plasma-Jet,\u201d Ext. Abs. 2016 Int. Conf. Solid State Dev. Mat. (SSDM2016), (Tsukuba, Japan, Sept. 26-29, 2016),<\/em> pp. 193-194. D-2-03.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Hanafusa, R. Ishimaru, S. Higashi, \u201cHigh-temperature Oxidation of 4H-SiC by Thermal-Plasma-Jet, 11th<\/sup> European Conference on Silicon Carbide and Related Materials (ECSCRM2016), (Halkidiki, Greece, Sept. 25-29, 2016)<\/em>, pp. 243-244. MoP.15. (p.34)<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
R. Mizukami, S. Takeshima, T. Yamashita, and S. Higashi, \u201cImprovement of transfer yield of single-crystalline silicon films and fabrication of thin-film transistors on polyethylene terephthalate substrate,\u201d International Conference on Flexible and Printed Electronics (ICFPE2016), (Yamagata, Japan, Sept. 6-8, 2016)<\/em>, O12-4. p. 88.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Higashi, H. Harada, T. Nakatani, \u201cAtmospheric pressure micro-thermal-plasma-jet irradiation on amorphous germaniumstrips and its application to thin film transistor fabrication,\u201d 2016 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2016), (Hakodate, Japan, Jul. 4- 6, 2016),<\/em> pp. 427-429.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited] <\/strong>S. Higashi, \u201cActivation of Impurity Atoms in 4H-SiC Wafer by Atmospheric Pressure Thermal Plasma Jet Irradiation,\u201d Ext. Abs. 2016 Int. Workshop Junction Tech. (IWJT-2016), (Shanghai, China, May. 9-10, 2016)<\/em>, pp. 68-71.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u8d85\u30cf\u30a4\u30d1\u30ef\u30fc\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u306b\u3088\u308b\u6838\u751f\u6210\u5236\u5fa1\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u5c71\u9670\u7279\u5225\u7814\u7a76\u4f1a\uff08\u571f\u5c4b\u6559\u6388\u9000\u8077\u8a18\u5ff5\uff09\uff082017.3.21\u3001\u6e05\u5d50\u8358\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[\u62db\u5f85\u8b1b\u6f14]<\/strong> \u6771\u3000\u6e05\u4e00\u90ce\u3001\u300c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u306b\u3088\u308b\u8d85\u6025\u901f\u71b1\u51e6\u7406\u3068\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u5fdc\u7528\u300d\u3001\u65e5\u672c\u7269\u7406\u5b66\u4f1a\u3000\u7b2c72\u56de\u5e74\u6b21\u5927\u4f1a\uff082017\u5e74\uff0918pC34-5\u3000\uff082017.3.17-20\u3001\u5927\u962a\u5927\u5b66\u3000\u8c4a\u4e2d\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u539f\u7530\u3000\u5927\u5922\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u65b0\u3000\u826f\u592a\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u9ad8\u79fb\u52d5\u5ea6n\u578bGe\u819c\u306e\u4f5c\u88fd\u201d\u3001\u7b2c64\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300014a-304-9\uff082017.3.14-17\u3001\u30d1\u30b7\u30d5\u30a3\u30b3\u6a2a\u6d5c\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u5cf6\u3000\u6dbc\u4ecb\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30cf\u30a4\u30d1\u30ef\u30fc\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u306e\u52a0\u71b1\u7279\u6027\u8a55\u4fa1\u3068\u30b7\u30ea\u30b3\u30f3\u8584\u819c\u306e\u7d50\u6676\u6210\u9577\u5236\u5fa1\u201d\u3001\u7b2c64\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300014a-304-6\uff082017.3.14-17\u3001\u30d1\u30b7\u30d5\u30a3\u30b3\u6a2a\u6d5c\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6c34\u4e0a\u3000\u9686\u9054\u3001\u7af9\u5cf6\u3000\u771f\u6cbb\u3001\u5c71\u4e0b\u3000\u77e5\u5fb3\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u4e2d\u7a7a\u69cb\u9020SOI\u5c64\u3092\u7528\u3044\u305f\u4f4e\u6e29\u8ee2\u5199\u306b\u304a\u3051\u308b\u8ee2\u5199\u6b69\u7559\u307e\u308a\u5411\u4e0a\u3068\u30d7\u30e9\u30b9\u30c1\u30c3\u30af\u57fa\u677f\u4e0a\u3067\u306e\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3TFT\u3068\u8ad6\u7406\u56de\u8def\u306e\u4f5c\u88fd\u201d\u3001\u7b2c64\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300014a-304-10\uff082017.3.14-17\u3001\u30d1\u30b7\u30d5\u30a3\u30b3\u6a2a\u6d5c\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u7530\u4e38\u3000\u5b8f\u6a39\u3001\u6c60\u4e0a\u3000\u6d69\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30a8\u30ad\u30b7\u30de\u30ec\u30fc\u30b6\u30fc\u30a2\u30cb\u30fc\u30eb\u306b\u3088\u308b\u8584\u819cGe\u306e\u6eb6\u878d\u7d50\u6676\u5316\u3068n\u578b\u4e0d\u7d14\u7269\u6d3b\u6027\u5316\u201d\u3001\u7b2c64\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300014a-304-3\uff082017.3.14-17\u3001\u30d1\u30b7\u30d5\u30a3\u30b3\u6a2a\u6d5c\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
 [\u62db\u5f85\u8b1b\u6f14]<\/strong>\u4e2d\u5cf6\u3000\u6dbc\u4ecb\u3001\u65b0\u3000\u826f\u592a\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30cf\u30a4\u30d1\u30ef\u30fc\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u306e\u751f\u6210\u3068\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u7d50\u6676\u5316\u3078\u306e\u5fdc\u7528\u201d\u30b7\u30ea\u30b3\u30f3\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u5206\u79d1\u4f1a\u3000\u7b2c199\u56de\u7814\u7a76\u96c6\u4f1a\u3001pp. 7-12\uff082017.2.17\u3001\u6771\u4eac\u5927\u5b66\u672c\u90f7\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5bfa\u672c\u3000\u61b2\u53f8\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u306e\u78c1\u5834\u5236\u5fa1\u3068SiC\u30c7\u30d0\u30a4\u30b9\u4f5c\u88fd\u30d7\u30ed\u30bb\u30b9\u306b\u5411\u3051\u305f\u5927\u9762\u7a4d\u71b1\u51e6\u7406\u3078\u306e\u5fdc\u7528\u201d\u3001\u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a\u3000\u7b2c3\u56de\u8b1b\u6f14\u4f1a\u3000P-78\u3000\uff08pp. 200-201\uff09\u3000\uff082016.11.8-11.9\u3001\u3064\u304f\u3070\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8c37\u53e3\u3000\u592a\u4e00\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201cSi\u5c64\u633f\u5165\u306b\u3088\u308bn\u578b4H-SiC\u306b\u304a\u3051\u308b\u30aa\u30fc\u30df\u30c3\u30af\u30b3\u30f3\u30bf\u30af\u30c8\u5f62\u6210\u8981\u56e0\u306e\u8abf\u67fb\u201d \u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a\u3000\u7b2c3\u56de\u8b1b\u6f14\u4f1a\u3000P-84\u3000\uff08pp. 212-213\uff09\uff082016.11.8-11.9\u3001\u3064\u304f\u3070\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f4H-SiC \u306e\u71b1\u9178\u5316\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c13\u56de\u7814\u7a76\u96c6\u4f1a\u300121p-O02\u3000(pp.49-51)\uff082016.10.21-10.22\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u3000\u6821\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u5cf6\u3000\u6dbc\u4ecb\u3001\u65b0\u3000\u826f\u592a\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30cf\u30a4\u30d1\u30ef\u30fc\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u30b7\u30ea\u30b3\u30f3\u8584\u819c\u306e\u9ad8\u901f\u6eb6\u878d\u7d50\u6676\u5316\u3068\u7d50\u6676\u6210\u9577\u5236\u5fa1\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c13\u56de\u7814\u7a76\u96c6\u4f1a\u300121p-P01\u3000(pp.56-58)\uff082016.10.21-10.22\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u3000\u6821\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6c34\u4e0a\u3000\u9686\u9054\u3001\u7af9\u5cf6\u3000\u771f\u6cbb\u3001\u5c71\u4e0b\u3000\u77e5\u5fb3\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u4e2d\u7a7a\u69cb\u9020 SOI \u5c64\u3092\u7528\u3044\u305f\u4f4e\u6e29\u8ee2\u5199\u306b\u304a\u3051\u308b\u8ee2\u5199\u6b69\u7559\u307e\u308a\u5411\u4e0a\u3068\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u57fa\u677f\u4e0a\u3067\u306e\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3TFT \u3068\u8ad6\u7406\u56de\u8def\u306e\u4f5c\u88fd\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c13\u56de\u7814\u7a76\u96c6\u4f1a\u300122a-O03\u3000(pp. 120-123)\uff082016.10.21-10.22\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u3000\u6821\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u7af9\u5cf6\u3000\u771f\u6cbb\u3001\u6c34\u4e0a\u3000\u9686\u9054\u3001\u5c71\u4e0b\u3000\u77e5\u5fb3\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u4e2d\u7a7a\u69cb\u9020 SOI \u5c64\u3092\u7528\u3044\u305f\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u57fa\u677f\u3078\u306e\u8ee2\u5199\u6280\u8853\u306b\u304a\u3051\u308b\u30d1\u30bf\u30fc\u30f3\u5fae\u5c0f\u5316\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c13\u56de\u7814\u7a76\u96c6\u4f1a\u300122p-P02 (pp.133-135)\uff082016.10.21-10.22\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u3000\u6821\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[\u62db\u5f85\u8b1b\u6f14]<\/strong> \u6771\u3000\u6e05\u4e00\u90ce\u3001\u300c\u5927\u6c17\u5727\u30d7\u30e9\u30ba\u30de\u306b\u3088\u308bIV \u65cf\u534a\u5c0e\u4f53\u8584\u819c\u306e\u7d50\u6676\u6210\u9577\u3068\u6b20\u9665\u5236\u5fa1\u300d\u3001\u7b2c77\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300014p-B7-4\uff082016.9.13-16\u3001\u6731\u9dfa\u30e1\u30c3\u30bb\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u7a17\u7530\u3000\u7adc\u5df1\u3001\u65b0\u3000\u826f\u592a\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u30ac\u30e9\u30b9\u57fa\u677f\u4e0a\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u819c\u306e\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u201d\u3001\u7b2c77\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300014\uff50-B7-6\uff082016.9.13-16\u3001\u6731\u9dfa\u30e1\u30c3\u30bb\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6c34\u4e0a\u3000\u9686\u9054\u3001\u7af9\u5cf6\u3000\u771f\u6cbb\u3001\u5c71\u4e0b\u3000\u77e5\u5fb3\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u4e2d\u7a7a\u69cb\u9020SOI \u5c64\u3092\u7528\u3044\u305f\u4f4e\u6e29\u8ee2\u5199\u306b\u304a\u3051\u308b\u8ee2\u5199\u6b69\u7559\u307e\u308a\u5411\u4e0a\u3068\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u57fa\u677f\u4e0a\u3067\u306e\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3TFT \u3068\u30a4\u30f3\u30d0\u30fc\u30bf\u56de\u8def\u306e\u4f5c\u88fd\u201d\u3001\u7b2c77\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300015a-B10-3\uff082016.9.13-16\u3001\u6731\u9dfa\u30e1\u30c3\u30bb\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u5cf6\u3000\u6dbc\u4ecb\u3001\u65b0\u3000\u826f\u592a\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30cf\u30a4\u30d1\u30ef\u30fc\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u30b7\u30ea\u30b3\u30f3\u8584\u819c\u306e\u9ad8\u901f\u6eb6\u878d\u7d50\u6676\u5316\u201d\u3001\u7b2c77\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300015a-B10-2\uff082016.9.13-16\u3001\u6731\u9dfa\u30e1\u30c3\u30bb\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5bfa\u672c\u3000\u61b2\u53f8\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u4ea4\u756a\u78c1\u5834\u5370\u52a0\u306b\u3088\u308b\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u306e\u8d70\u67fb\u3068\u534a\u5c0e\u4f53\u57fa\u677f\u306e\u52a0\u71b1\u201d\u3001 \u7b2c77\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300015a-B7-8\uff082016.9.13-16\u3001\u6731\u9dfa\u30e1\u30c3\u30bb\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5bfa\u672c\u3000\u61b2\u53f8\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5916\u90e8\u78c1\u5834\u5370\u52a0\u306b\u3088\u308b\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u5674\u51fa\u65b9\u5411\u5236\u5fa1\u3068\u534a\u5c0e\u4f53\u57fa\u677f\u306e\u52a0\u71b1\u201d\u30012016\u5e74\u5ea6\u3000\u5fdc\u7528\u7269\u7406\u30fb\u7269\u7406\u7cfb\u5b66\u4f1a\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u3000\u5408\u540c\u5b66\u8853\u8b1b\u6f14\u4f1a\uff08\uff21a-10\uff09P.21.\uff082016.7.31\u3001\u5ca1\u5c71\u5927\u5b66\u3000\u6d25\u5cf6\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5bfa\u672c\u3000\u61b2\u53f8\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5916\u90e8\u78c1\u5834\u306b\u3088\u308b\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u5674\u51fa\u65b9\u5411\u5236\u5fa1\u201d\u3001\u7b2c35\u56de\u96fb\u5b50\u6750\u6599\u30b7\u30f3\u30dd\u30b8\u30a6\u30e0\uff082016.7.6-7.8\u3001\u30e9\u30d5\u30a9\u30fc\u30ec\u7435\u7436\u6e56\uff09pp. 227-228.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u8c37\u3000\u592a\u4e00\u3001\u539f\u7530\u3000\u5927\u5922\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u30b2\u30eb\u30de\u30cb\u30a6\u30e0\u819c\u306e\u96fb\u6c17\u7279\u6027\u8a55\u4fa1\u53ca\u3073\u9ad8\u6027\u80fd\u8584\u819c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u4f5c\u88fd\u201d\u3001\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a\u30fb\u30b7\u30ea\u30b3\u30f3\u6750\u6599\u30fb\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\uff3bSDM] \u4fe1\u5b66\u6280\u5831116<\/strong>\uff081\uff09pp. 35-38.\uff082016.4.8-4.9\u3001\u6c96\u7e04\u770c\u7acb\u535a\u7269\u9928\u30fb\u7f8e\u8853\u9928\u3000\u535a\u7269\u9928\u8b1b\u5ea7\u5ba4\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2015\u5e74\u5ea6<\/p>\n\n\n\n

T. Nakatani, S. Morisaki, and S. Higashi, \u201cFabrication of Thin Film Transistors by Atmospheric Pressure Micro-Thermal-Plasma-Jet Irradiation on Amorphous Germanium Strips,\u201d Proc. Int. Symp. Dry Process (DPS2015), (Awaji Island, Japan, Nov. 5-6, 2015), <\/em>pp. 41-42.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
R. Ishimaru, H. Hanafusa, K. Maruyama, S. Higashi, \u201cAtmospheric Pressure Thermal-Plasma-Jet Oxidation of 4H-SiC,\u201d 68th<\/sup> Annual Gaseous Electronics Conference\/9th<\/sup> International Conference on Reactive Plasmas\/33rd<\/sup> Symposium on Plasma Processing (ICRP-9\/GEC-68\/SPP-33), (Honolulu, Hawaii, Oct.12-16, 2015). <\/em>SF1.00005.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Morisaki, T. Nakatani, R. Shin, S. Higashi, \u201cAtmospheric Pressure Micro-Thermal-Plasma-Jet Crystallization of Amorphous Silicon Strips for High-Performance Thin Film Transistor Fabrication,\u201d 68th<\/sup> Annual Gaseous Electronics Conference\/9th<\/sup> International Conference on Reactive Plasmas\/33rd<\/sup> Symposium on Plasma Processing (ICRP-9\/GEC-68\/SPP-33), (Honolulu, Hawaii, Oct.12-16, 2015). <\/em>LW1.00178.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Hanafusa, K. Maruyama, R. Ishimaru, S. Higashi, \u201cHigh Efficiency Activation of Phosphorus Atoms in 4H\u2010SiC by Atmospheric PressureThermal Plasma Jet Annealing,\u201d 16th<\/sup> International Conference on Silicon Carbide and Related Materials (ICSCRM2015),<\/em> (Giardini Naxos, Italy, Oct. 4 - 9, 2015).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
M. Akazawa, S. Takeshima, A. Nakagawa, K. Hiramatsu and S. Higashi, \u201cFormation of Single Crystalline Silicon with Midair Cavity for Meniscus Force-Mediated\u3000Local Layer Transfer and Fabrication of High-Performance MOSFETs on Insulator,\u201d Ext. Abs. 2015 Int. Conf. Solid State Dev. Mat. (SSDM2015), (Sapporo, Japan, Sep. 27-30, 2015)<\/em>, PS-1-15.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Morisaki, S. Hayashi, S. Yamamoto, T. Kasahara, T. Nakatani, and S. Higashi, \u201cIn-situ Observation of Zone-Melting-Recrystallization in Amorphous Silicon Stripsduring Atmospheric Pressure Micro-Thermal-Plasma-Jet Irradiation,\u201d 2015 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2015), (Jeju Island, Korea, Jun. 29- Jul. 1, 2015),<\/em> P. 230.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited] <\/strong>S. Higashi, \u201cSilicon CMOS on glass and plastic - Crystallization and layer transfer approaches -,\u201d Semiconductor Tech. Ultra Large Scale Integrated Circuits and Thin Film Transistors V, (Lake Tahoe, California, USA, Jun. 14-18, 2015).<\/em><\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Y. Wang, S. Morisaki, S. Hayashi, A. B. Limanov, A. Chitu, S. Higashi, and J. S. Im, \u201cMelting and Solidification of Si Films Using Continuous Radiative and Non-Radiative Beams,\u201d Abs. 2015 Mat. Res. Soc. Spring Meeting (San Francisco, USA, Apr. 6-10, 2015)<\/em>, A20.06.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Morisaki, S. Hayashi, S. Yamamoto, T. Nakatani, and S. Higashi, \u201cMicro-Thermal-Plasma-Jet Crystallization of Amorphous Silicon Strips and High-Sped Operation of CMOS Circuit,\u201d Abs. 2015 Mat. Res. Soc. Spring Meeting (San Francisco, USA, Apr. 6-10, 2015)<\/em>, A23.06.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u539f\u7530\u3000\u5927\u5922\u3001\u4e2d\u8c37\u3000\u592a\u4e00\u3001\u65b0\u3000\u826f\u592a\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305fP+\u30c9\u30fc\u30d7a-Ge\u819c\u306e\u7d50\u6676\u5316\u53ca\u3073\u6d3b\u6027\u5316\u201d\u3001\u7b2c63\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300020p-S423-2\uff082016.3.19-22\u3001\u6771\u5de5\u5927\u3000\u5927\u5ca1\u5c71\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6c34\u4e0a\u3000\u9686\u9054\u3001\u4e2d\u5ddd\u3000\u660e\u4fca\u3001\u5e73\u677e\u3000\u548c\u6a39\u3001\u7af9\u5cf6\u3000\u771f\u6cbb\u3001\u5c71\u4e0b\u3000\u77e5\u5fb3\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u4e2d\u7a7a\u69cb\u9020SOI\u5c64\u3092\u7528\u3044\u305f\u4f4e\u6e29\u8ee2\u5199\u6280\u8853\u306b\u304a\u3051\u308bPET\u57fa\u677f\u4e0a\u9ad8\u8ee2\u5199\u7387\u306e\u5b9f\u73fe\u201d\u3001\u7b2c63\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300020p-S423-16\uff082016.3.19-22\u3001\u6771\u5de5\u5927\u3000\u5927\u5ca1\u5c71\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u5cf6\u3000\u6dbc\u4ecb\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30cf\u30a4\u30d1\u30ef\u30fc\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u30b7\u30ea\u30b3\u30f3\u8584\u819c\u306e\u9ad8\u901f\u6eb6\u878d\u7d50\u6676\u5316\u3068\u9023\u7d9a\u7d50\u6676\u6210\u9577\u201d\u3001\u7b2c63\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300020p-S423-4\uff082016.3.19-22\u3001\u6771\u5de5\u5927\u3000\u5927\u5ca1\u5c71\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\uff3b\u62db\u5f85\u8b1b\u6f14\uff3d<\/strong>\u6771\u3000\u6e05\u4e00\u90ce,\u300c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\uff08TPJ\uff09\u3092\u7528\u3044\u305f\u71b1\u51e6\u7406\u6280\u8853\u306e\u958b\u767a\u3068\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u30d7\u30ed\u30bb\u30b9\u3078\u306e\u5fdc\u7528\u300d \u65e5\u672c\u771f\u7a7a\u5b66\u4f1a2015\u5e7411\u6708\u7814\u7a76\u4f8b\u4f1a\u3000(2015. 11. 17\u3001\u5e83\u5cf6\u5de5\u696d\u5927\u5b66\u5e83\u5cf6\u6821\u820e)\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u3092\u7528\u3044\u305fSiC\u4e2dP\u4e0d\u7d14\u7269\u9ad8\u52b9\u7387\u6d3b\u6027\u5316\u5c64\u306e\u7d50\u6676\u6027\u8a55\u4fa1\u201d\u3001\u5148\u9032\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u5206\u79d1\u4f1a \u7b2c\uff12\u56de\u8b1b\u6f14\u4f1a\u3001\uff30-48\uff08pp.142-143\uff09(2015.11.9-11.10\u3001\u5927\u962a\u56fd\u969b\u4ea4\u6d41\u30bb\u30f3\u30bf\u30fc).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u8c37\u3000\u592a\u4e00\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b2\u30eb\u30de\u30cb\u30a6\u30e0\u7d30\u7dda\u3078\u306e\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308a\u4f5c\u88fd\u3057\u305f\u8584\u819c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u7279\u6027\u8a55\u4fa1\u201d \u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c12\u56de\u7814\u7a76\u96c6\u4f1a\u300130p-O04 (pp. 47-50)\uff082015.10.30-10.31\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u3000\u6821\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u65b0\u3000\u826f\u592a\u3001 \u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u53ca\u3073\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u30b7\u30ea\u30b3\u30f3\u819c\u4e2d\u3078\u306e\u4e0d\u7d14\u7269\u30c9\u30fc\u30d4\u30f3\u30b0\u201d \u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c12\u56de\u7814\u7a76\u96c6\u4f1a\u300131p-P08 (pp. 152-154)\uff082015.10.30-10.31\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u3000\u6821\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u7af9\u5cf6\u3000\u771f\u6cbb\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u4e2d\u5ddd\u3000\u660e\u4fca\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u4e2d\u7a7a\u69cb\u9020SOI\u5c64\u306e\u4f4e\u6e29\u8ee2\u5199\u306b\u304a\u3051\u308bFTIR-ATR\u3092\u7528\u3044\u305f\u30b7\u30ea\u30b3\u30f3\/PET\u754c\u9762\u306e\u5316\u5b66\u7d50\u5408\u72b6\u614b\u8a55\u4fa1\u201d\u3001\u7b2c76\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300013a-1C-7\uff082015.9.13-16\u3001\u540d\u53e4\u5c4b\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30e1\u30cb\u30b9\u30ab\u30b9\u529b\u3092\u7528\u3044\u305f\u5c40\u6240\u8ee2\u5199\u306e\u305f\u3081\u306e\u4e2d\u7a7a\u69cb\u9020\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u306e\u5f62\u6210\u201d\u3001\u7b2c76\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300013a-1C-8\uff082015.9.13-16\u3001\u540d\u53e4\u5c4b\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u65b0\u3000\u826f\u592a\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201cPH3\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u53ca\u3073\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u30b7\u30ea\u30b3\u30f3\u819c\u4e2d\u3078\u306e\u4e0d\u7d14\u7269\u30c9\u30fc\u30d4\u30f3\u30b0\u201d\u3001 \u7b2c76\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300013a-1C-5\uff082015.9.13-16\u3001\u540d\u53e4\u5c4b\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u4e2d\u8c37\u3000\u592a\u4e00\u3001\u65b0\u3000\u826f\u592a\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u7d30\u7dda\u306e\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u306b\u3088\u308b\u7c92\u5185\u6b20\u9665\u306e\u4f4e\u6e1b\u201d\u3001\u7b2c76\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300013a-1C-6\uff082015.9.13-16\u3001\u540d\u53e4\u5c4b\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f\u3000\u5b8f\u660e\u3001\u77f3\u4e38\u3000\u51cc\u8f14\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u9ad8\u6e29\u30a4\u30aa\u30f3\u6ce8\u5165\u3057\u305f4H-SiC\u4e2dP\u30a4\u30aa\u30f3\u306e\u9ad8\u52b9\u7387\u6d3b\u6027\u5316\u201d\u3001\u7b2c76\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300015p-1A-7\uff082015.9.13-16\u3001\u540d\u53e4\u5c4b\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u77f3\u4e38\u3000\u51cc\u8f14\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f4H-SiC\u306e\u71b1\u9178\u5316\u201d\u3001\u7b2c76\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300016a-1A-5\uff082015.9.13-16\u3001\u540d\u53e4\u5c4b\u56fd\u969b\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u7530\u4e38\u3000\u5b8f\u6a39\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201cGe\/Al2O3\u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u306b\u304a\u3051\u308b\u754c\u9762\u5316\u5b66\u72b6\u614b\u8a55\u4fa1\u201d\u30012015\u5e74\u5ea6\u3000\u5fdc\u7528\u7269\u7406\u30fb\u7269\u7406\u7cfb\u5b66\u4f1a\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u3000\u5408\u540c\u5b66\u8853\u8b1b\u6f14\u4f1a\uff08Bp-5\uff09P.26.\uff082015.8.1\u3001\u5fb3\u5cf6\u5927\u5b66\u3000\u5e38\u4e09\u5cf6\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u7af9\u5cf6\u3000\u771f\u6cbb\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u4e2d\u7a7a\u69cb\u9020SOI\u5c64\u306e\u4f4e\u6e29\u8ee2\u5199\u306b\u304a\u3051\u308b\u30b7\u30ea\u30b3\u30f3\/PET\u754c\u9762\u306e\u5316\u5b66\u7d50\u5408\u72b6\u614b\u8a55\u4fa1\u201d\u30012015\u5e74\u5ea6\u3000\u5fdc\u7528\u7269\u7406\u30fb\u7269\u7406\u7cfb\u5b66\u4f1a\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u3000\u5408\u540c\u5b66\u8853\u8b1b\u6f14\u4f1a\uff08Da-10\uff09P.55.\uff082015.8.1\u3001\u5fb3\u5cf6\u5927\u5b66\u3000\u5e38\u4e09\u5cf6\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u65b0\u3000\u826f\u592a\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u4e2d\u8c37\u3000\u592a\u4e00\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201cPH3\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u53ca\u3073\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u71b1\u51e6\u7406\u306b\u3088\u308b\u30b7\u30ea\u30b3\u30f3\u8584\u819c\u3078\u306e\u4e0d\u7d14\u7269\u30c9\u30fc\u30d4\u30f3\u30b0\u201d\u3001 2015\u5e74\u5ea6\u3000\u5fdc\u7528\u7269\u7406\u30fb\u7269\u7406\u7cfb\u5b66\u4f1a\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u3000\u5408\u540c\u5b66\u8853\u8b1b\u6f14\u4f1a\uff08Da-5\uff09P.50.\uff082015.8.1\u3001\u5fb3\u5cf6\u5927\u5b66\u3000\u5e38\u4e09\u5cf6\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u6797\u3000\u5c06\u5e73\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u4e2d\u8c37\u3000\u592a\u4e00\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u7d30\u7dda\u306b\u3088\u308b\u7d50\u6676\u6210\u9577\u5236\u5fa1\u304a\u3088\u3073CMOS\u56de\u8def\u306e\u9ad8\u901f\u99c6\u52d5\u201d\u3001\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a\u30fb\u30b7\u30ea\u30b3\u30f3\u6750\u6599\u30fb\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\uff3bSDM] \uff14\u6708\u5ea6\u7814\u7a76\u4f1a\u3001 Vol.115  No.18  pp. 49-52\u3000\uff082015.04 .29-04.30\u3001\u5927\u6ff1\u4fe1\u6cc9\u8a18\u5ff5\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2014\u5e74\u5ea6<\/p>\n\n\n\n

M. Akazawa, K. Sakaike, S. Nakamura, S. Hayashi, S. Morisaki, and S. Higashi, \u201cFabrication of Single Crystalline Silicon Thin Film Transistor on Glass Substrate by Using Meniscus-Force-Mediated Local Layer Transfer Technique,\u201d Ext. Abs. Int. Workshop Nanodevice Technologies 2015 (IWNT2015), (Higashi-Hiroshima, Japan, Mar. 3, 2015)<\/em>, pp. 54-55.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Morisaki, S. Hayashi, S. Yamamoto, T. Nakatani, and S. Higashi, \u201cCMOS Integration Based on Zone Melting Recrystallization of Amorphous Silicon Strips Induced by Micro Thermal Plasma Jet Irradiation,\u201d Ext. Abs.<\/em> Int. Workshop Nanodevice Technologies 2015 (IWNT2015), (Higashi-hiroshima, Japan, Mar. 3, 2015),<\/em> pp. 52-53.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Maruyama, H. Hanafusa, S. Hayashi, H. Murakami and S. Higashi, \u201cHigh-Efficient Activation of Implanted Phosphorus-ion in 4H-SiC by Precise Control of Cooling Rate during Atmospheric Pressure Thermal Plasma Jet Annealing,\u201d Ext. Abs. Int. Workshop Nanodevice Technologies 2015 (IWNT2015), (Higashi-hiroshima, Japan, Mar. 3, 2015)<\/em>, pp. 56-57.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Murakami, K. Hashimoto, A. Ohta, S. Higashi, and S. Miyazaki, \u201cCharacterization and Control of Interfacial Reaction of HfO2<\/sub>\/Ge System with Ta Oxide Layer,\u201d Ext. Abs. Int. Workshop Nanodevice Technologies 2015 (IWNT2015), (Higashi-hiroshima, Japan, Mar. 3, 2015), <\/em>pp. 58-59.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Maruyama, H. Hanafusa, H. Murakami, S. Hayashi, and S. Higashi, \u201cPrecise Control of Cooling Rate and Efficient Activation of Phosphorus Atoms in 4H-SiC wafer,\u201d Proc. Int. Symp. Dry Process (DPS2014), (Yokohama, Japan, Nov. 27-28, 2014), <\/em>pp. 111-112.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Sakaike, M. Akazawa, A. Nakagawa, and S. Higashi, \u201cFabricating High-Performance Silicon Thin-Film Transistor by Meniscus Force Mediated Layer Transfer Technique,\u201d 2014 ECS and SMEQ Joint Int. Meeting (Cancun, Mexico, Oct. 5-10, 2014), <\/em>\uff031928.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Morisaki, S. Hayashi, S. Yamamoto, T. Nakatani, and S. Higashi, \u201cEffect of Grain Growth Control by Atmospheric Micro-Thermal- Plasma-Jet Crystallization of Amorphous Silicon Strips on TFT Characteristics,\u201d 2014 ECS and SMEQ Joint Int. Meeting (Cancun, Mexico, Oct. 5-10, 2014), <\/em>\uff031908.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Hanafusa, K. Maruyama, S. Hayashi, S. Higashi, \u201cEstimation of Phosphorus-implanted 4H-SiC Layer Activation by EBSD pattern analysis,\u201d 10th<\/sup> European Conf. Silicon Carbide and Related Materials (ECSCRM2014), (Grenoble, France, Sept. 21-25, 2014), <\/em>WE-P-43.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Yamamoto, S. Morisaki, S. Hayashi, T. Nakatani, and S. Higashi, \u201cGrain Growth Control by Micro-Thermal-Plasma-Jet Irradiation to Very Narrow Amorphous Silicon Strips and Its Application to Thin Film Transistors,\u201d Ext. Abs. 2014 Int. Conf. Solid State Dev. Mat. (SSDM2014), (Tsukuba, Japan, Sept. 8-11, 2014), <\/em>pp. <\/em>562-563.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Sakaike, M. Akazawa, A. Nakagawa, and S. Higashi, \u201cFabrication of High Performance Single-Crystalline Silicon Thin Film Transistors on a Polyethylene Terephthalate Substrate,\u201d Ext. Abs. 2014 Int. Conf. Solid State Dev. Mat. (SSDM2014), (Tsukuba, Japan, Sep. 8-11, 2014)<\/em>, pp. 28-29.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Hayashi, S. Morisaki, S. Yamamoto, T. Nakatani, and S. Higashi, \u201cGrain Growth Induced by Micro-Thermal- Plasma-Jet Irradiation to Narrow Amorphous Silicon Strips,\u201d Proc. AM-FPD14, (Kyoto, Japan, Jul. 2-4, 2014),<\/em> pp. 181-184.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited] <\/strong>S. Higashi, \u201cAtmospheric Pressure Plasma Processing and Layer Transfer Technique for Thin-Film Device Fabrication on Glass and Plastic Substrates,\u201d Ext. Abs. 2014 Int. Workshop Junction Tech. (IWJT-2014), (Shanghai, China, May. 18-20, 2014)<\/em>, pp. 169-173.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
M. Akazawa, K. Makihara, T. Matsumoto, and S. Higashi, \u201cFabrication of High-Performance N-Channel Silicon MOSFET on Glass Substrate Using Meniscus Force,\u201d Abs. 2014 Mat. Res. Soc. Spring Meeting (San Francisco, USA, Apr. 21-25, 2014)<\/em>, A5.04.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e38\u5c71\u3000\u4f73\u7950\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6797\u3000\u5c06\u5e73\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u6025\u901f\u71b1\u51e6\u7406\u306e\u51b7\u5374\u901f\u5ea6\u5236\u5fa1\u306b\u3088\u308b4H-SiC\u4e2dP\u306e\u9ad8\u52b9\u7387\u6d3b\u6027\u5316\u201d\u3001\u3000\u7b2c62\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300114a-B4-4\u3000\uff082015.3.11-14\u3001\u6771\u6d77\u5927\u5b66\u3000\u6e58\u5357\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u6797\u3000\u5c06\u5e73\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u4e2d\u8c37\u3000\u592a\u4e00\u3001\u7b20\u539f\u3000\u62d3\u4e5f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u306b\u3088\u308ba-Si\u30d1\u30bf\u30fc\u30f3\u5185\u7d50\u6676\u6210\u9577\u306e\u305d\u306e\u5834\u89b3\u5bdf\u201d\u3001\u7b2c62\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u3001\u300012a-A29-4 \uff082015.3.11-14\u3001\u6771\u6d77\u5927\u5b66\u3000\u6e58\u5357\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6797\u3000\u5c06\u5e73\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u4e2d\u8c37\u3000\u592a\u4e00\u3001\u65b0\u3000\u826f\u592a\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308bSi\u7d50\u6676\u6210\u9577\u306e\u521d\u671f\u819c\u4f9d\u5b58\u6027\u201d \u7b2c62\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u3001\u300012a-A29-3\u3000\uff082015.3.11-14\u3001\u6771\u6d77\u5927\u5b66\u3000\u6e58\u5357\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u8c37\u3000\u592a\u4e00\u3001\u6797\u3000\u5c06\u5e73\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316Ge\u819c\u3092\u7528\u3044\u305fTFT\u30aa\u30d5\u96fb\u6d41\u306e\u7d50\u6676\u5316\u901f\u5ea6\u4f9d\u5b58\u6027\u201d\u3001\u3000\u7b2c62\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c612a-A29-10\uff082015.3.11-14\u3001\u6771\u6d77\u5927\u5b66\u3000\u6e58\u5357\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[\u6ce8\u76ee\u8b1b\u6f14]<\/strong> \u9152\u6c60\u3000\u8015\u5e73\u3001\u4e2d\u5ddd\u3000\u660e\u4fca\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u57fa\u677f\u4e0a\u3067\u306e\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3CMOS\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u4f5c\u88fd\u201d\u3001\u7b2c62\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300012a-A29-9\uff082015.3.11-14\u3001\u6771\u6d77\u5927\u5b66\u3000\u6e58\u5357\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[\u62db\u5f85\u8b1b\u6f14\uff3d<\/strong>\u6771\u3000\u6e05\u4e00\u90ce,\u300c\u5927\u6c17\u5727\u30d7\u30e9\u30ba\u30de\u3092\u7528\u3044\u305f\u6025\u901f\u71b1\u51e6\u7406\u6280\u8853\u3068\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u30d7\u30ed\u30bb\u30b9\u3078\u306e\u5fdc\u7528\u300d, \u5e73\u621026\u5e74\u5ea6\u7b2c4\u56de\u534a\u5c0e\u4f53\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u90e8\u9580\u59d4\u54e1\u4f1a\u3000\u7b2c1\u56de\u8b1b\u6f14\u4f1a\u30fb\u898b\u5b66\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000\uff08\uff29-1\uff09 (2015. 1. 24\u3001\u5e83\u5cf6\u5927\u5b66\u3000\u6771\u5e83\u5cf6\u30ad\u30e3\u30f3\u30d1\u30b9)\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6a4b\u672c\u3000\u90a6\u660e\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cGe MISFET\u5b9f\u73fe\u306e\u305f\u3081\u306eHfO2\/Ge\u754c\u9762\u3078\u306eTaOx\u5c64\u633f\u5165\u306b\u3088\u308b\u754c\u9762\u53cd\u5fdc\u5236\u5fa1\u3068\u7269\u6027\u8a55\u4fa1\u201d\u3001\u5e73\u621026\u5e74\u5ea6\u7b2c4\u56de\u534a\u5c0e\u4f53\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u90e8\u9580\u59d4\u54e1\u4f1a\u3000\u7b2c1\u56de\u8b1b\u6f14\u4f1a\u30fb\u898b\u5b66\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000P4\u3000\uff082015. 1. 24\u3001\u5e83\u5cf6\u5927\u5b66\u3000\u6771\u5e83\u5cf6\u30ad\u30e3\u30f3\u30d1\u30b9)\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6d5c\u7530\u3000\u614e\u4e5f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5c0f\u91ce\u3000\u8cb4\u5bdb\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u8aa0\u4e00\u3001\u201cGe\u4e2d\u306en\u578b\u4e0d\u7d14\u7269\u9ad8\u52b9\u7387\u6d3b\u6027\u5316\u201d\u3001\u5e73\u621026\u5e74\u5ea6\u7b2c4\u56de\u534a\u5c0e\u4f53\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u90e8\u9580\u59d4\u54e1\u4f1a\u3000\u7b2c1\u56de\u8b1b\u6f14\u4f1a\u30fb\u898b\u5b66\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000P8\u3000(2015. 1. 24\u3001\u5e83\u5cf6\u5927\u5b66\u3000\u6771\u5e83\u5cf6\u30ad\u30e3\u30f3\u30d1\u30b9)\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u5ddd\u3000\u660e\u4fca\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u5e73\u677e\u3000\u548c\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30d7\u30e9\u30b9\u30c1\u30c3\u30af\u57fa\u677f\u4e0a\u3078\u306e\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u5c64\u306e\u8ee2\u5199\u3068\u8584\u819c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u5fdc\u7528\u201d\u3001\u5e73\u621026\u5e74\u5ea6\u7b2c4\u56de\u534a\u5c0e\u4f53\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u90e8\u9580\u59d4\u54e1\u4f1a\u3000\u7b2c1\u56de\u8b1b\u6f14\u4f1a\u30fb\u898b\u5b66\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000P9 (2015. 1. 24\u3001\u5e83\u5cf6\u5927\u5b66\u3000\u6771\u5e83\u5cf6\u30ad\u30e3\u30f3\u30d1\u30b9)\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u6797\u3000\u5c06\u5e73\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u4e2d\u8c37\u3000\u592a\u4e00\u3001\u7b20\u539f\u3000\u62d3\u4e5f\u3001\u65b0\u3000\u826f\u592a\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u7d30\u7dda\u3092\u7528\u3044\u305f\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u6210\u9577\u5236\u5fa1\u304a\u3088\u3073\u8584\u819c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u5fdc\u7528\u201d\u3001\u5e73\u621026\u5e74\u5ea6\u7b2c4\u56de\u534a\u5c0e\u4f53\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u90e8\u9580\u59d4\u54e1\u4f1a\u3000\u7b2c1\u56de\u8b1b\u6f14\u4f1a\u30fb\u898b\u5b66\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000P11 (2015. 1. 24\u3001\u5e83\u5cf6\u5927\u5b66\u3000\u6771\u5e83\u5cf6\u30ad\u30e3\u30f3\u30d1\u30b9)\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f\u3000\u5b8f\u660e\u3001\u4e38\u5c71\u3000\u572d\u7950\u3001\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u96fb\u5b50\u7dda\u5f8c\u65b9\u6563\u4e71\u6cd5\u3092\u7528\u3044\u305f\u30ea\u30f3\u6ce8\u51654H-SiC\u306e\u7d50\u6676\u6027\u8a55\u4fa1\u201d\u3001\u5e73\u621026\u5e74\u5ea6\u7b2c4\u56de\u534a\u5c0e\u4f53\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u90e8\u9580\u59d4\u54e1\u4f1a\u3000\u7b2c1\u56de\u8b1b\u6f14\u4f1a\u30fb\u898b\u5b66\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000P20 (2015. 1. 24\u3001\u5e83\u5cf6\u5927\u5b66\u3000\u6771\u5e83\u5cf6\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u4e2d\u6751\u3000\u5c06\u543e\u3001\u5e73\u677e\u3000\u548c\u6a39\u3001\u4e2d\u5ddd\u3000\u660e\u4fca\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30e1\u30cb\u30b9\u30ab\u30b9\u529b\u5c40\u6240\u8ee2\u5199\u6280\u8853\u3092\u5229\u7528\u3057\u305f\u30ac\u30e9\u30b9\u57fa\u677f\u4e0a\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u8584\u819c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u4f5c\u88fd\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c11\u56de\u7814\u7a76\u96c6\u4f1a\u300131R02 (pp. 144-146)\uff082014.10.31-11.1\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u3000\u6821\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u5ddd\u3000\u660e\u4fca\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u5e73\u677e\u3000\u548c\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5727\u529b\u5236\u5fa1\u306b\u3088\u308b\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u57fa\u677f\u4e0a\u3078\u306e\u4e2d\u7a7a\u69cb\u9020SOI\u5c64\u306e\u8ee2\u5199\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c11\u56de\u7814\u7a76\u96c6\u4f1a\u300101P18 (pp. 195-196)\uff082014.10.31-11.1\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u3000\u6821\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u6797\u3000\u5c06\u5e73\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u4e2d\u8c37\u3000\u592a\u4e00\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201ca-Si\u30d1\u30bf\u30fc\u30f3\u3092\u7528\u3044\u305f\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u6210\u9577\u306e\u5236\u5fa1\u306b\u3088\u308b\u8584\u819c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u7279\u6027\u3070\u3089\u3064\u304d\u8a55\u4fa1\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c11\u56de\u7814\u7a76\u96c6\u4f1a\u300131P23 (pp. 130-133)\uff082014.10.31-11.1\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u3000\u6821\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e38\u5c71\u3000\u4f73\u7950\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u6025\u901f\u71b1\u51e6\u7406\u4e2d\u306e\u51b7\u5374\u901f\u5ea6\u5236\u5fa1\u30684H-SiC\u4e2d\u4e0d\u7d14\u7269\u6d3b\u6027\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c11\u56de\u7814\u7a76\u96c6\u4f1a\u300131P21 (pp. 128-129)\uff082014.10.31-11.1\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u3000\u6821\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u77f3\u4e38\u3000\u51cc\u8f14\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u4e38\u5c71\u3000\u4f73\u7950\u3001\u5ee3\u677e\u3000\u5fd7\u9686\u3001\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b4H-SiC\u4e0aSiO2\u5806\u7a4d\u819c\u306e\u6025\u901f\u71b1\u51e6\u7406\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c11\u56de\u7814\u7a76\u96c6\u4f1a\u300101P22 (pp. 201-202)\uff082014.10.31-11.1\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u97ff\u90fd\u30db\u30fc\u30eb\u3000\u6821\u53cb\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6797\u3000\u5c06\u5e73\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u4e2d\u8c37\u3000\u592a\u4e00\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u6210\u9577\u30e1\u30ab\u30cb\u30ba\u30e0\u306e\u89e3\u660e\u201d\u3001\u7b2c6\u56de\u8584\u819c\u592a\u967d\u96fb\u6c60\u30bb\u30df\u30ca\u30fc2014\u3001P11\uff082014.10.15-16\u3001\u5e83\u5cf6\u5927\u5b66 \u971e\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c71\u672c\u3000\u5c06\u609f\uff0c\u68ee\u5d0e\u3000\u8aa0\u53f8, \u6797\u3000\u5c06\u5e73, \u4e2d\u8c37\u3000\u592a\u4e00, \u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316Si\u7d30\u7dda\u306e\u96fb\u6c17\u7279\u6027\u8a55\u4fa1\u201d\u3001\u7b2c6\u56de\u8584\u819c\u592a\u967d\u96fb\u6c60\u30bb\u30df\u30ca\u30fc2014\u3001P12\uff082014.10.15-16\u3001\u5e83\u5cf6\u5927\u5b66 \u971e\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u8c37\u3000\u592a\u4e00\u3001\u6797\u3000\u5c06\u5e73\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u7d50\u6676\u5316Ge\u7d30\u7dda\u306e\u96fb\u6c17\u7279\u6027\u8a55\u4fa1\u201d\u3001\u7b2c6\u56de\u8584\u819c\u592a\u967d\u96fb\u6c60\u30bb\u30df\u30ca\u30fc2014\u3001P13\uff082014.10.15-16\u3001\u5e83\u5cf6\u5927\u5b66 \u971e\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u6797\u3000\u5c06\u5e73,\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u6210\u9577\u5236\u5fa1\u306b\u3088\u308b\u77ed\u30c1\u30e3\u30cd\u30eb\u8584\u819c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u7279\u6027\u3070\u3089\u3064\u304d\u8a55\u4fa1\u201d\u3001\u7b2c6\u56de\u8584\u819c\u592a\u967d\u96fb\u6c60\u30bb\u30df\u30ca\u30fc2014\u3001P16\uff082014.10.15-16\u3001\u5e83\u5cf6\u5927\u5b66 \u971e\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u77f3\u4e38\u3000\u51cc\u8f14\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u4e38\u5c71\u3000\u4f73\u7950\u3001\u5ee3\u677e\u3000\u5fd7\u9686\u3001\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u6025\u901f\u71b1\u51e6\u7406\u306b\u3088\u308b4H -SiC\u4e0aSiO2\u5806\u7a4d\u819c\u306e\u6539\u5584\u201d\u3001\u7b2c6\u56de\u8584\u819c\u592a\u967d\u96fb\u6c60\u30bb\u30df\u30ca\u30fc2014\u3001P17\uff082014.10.15-16\u3001\u5e83\u5cf6\u5927\u5b66 \u971e\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u4e2d\u6751\u3000\u5c06\u543e\u3001\u5e73\u677e\u3000\u548c\u6a39\u3001\u4e2d\u5ddd\u3000\u660e\u4fca\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30e1\u30cb\u30b9\u30ab\u30b9\u529b\u8ee2\u5199\u6280\u8853\u3092\u5229\u7528\u3057\u305f\u71b1\u9178\u5316\u3055\u308c\u305f\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u8584\u819c\u306e\u30ac\u30e9\u30b9\u57fa\u677f\u4e0a\u3078\u306e\u5f62\u6210\u201d\u3001\u7b2c6\u56de\u8584\u819c\u592a\u967d\u96fb\u6c60\u30bb\u30df\u30ca\u30fc2014\u3001P31\uff082014.10.15-16\u3001\u5e83\u5cf6\u5927\u5b66 \u971e\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u5ddd\u3000\u660e\u4fca\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u5e73\u677e\u3000\u548c\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5727\u529b\u5236\u5fa1\u306b\u3088\u308b\u4e2d\u7a7a\u69cb\u9020SOI\u5c64\u306e\u8ee2\u5199\u3068\u8584\u819c \u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u5fdc\u7528\u201d\u3001\u7b2c6\u56de\u8584\u819c\u592a\u967d\u96fb\u6c60\u30bb\u30df\u30ca\u30fc2014\u3001P32\uff082014.10.15-16\u3001\u5e83\u5cf6\u5927\u5b66 \u971e\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9152\u6c60\u3000\u8015\u5e73\u3001\u4e2d\u6751\u3000\u5c06\u543e\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u4e2d\u5ddd\u3000\u660e\u4fca\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30e1\u30cb\u30b9\u30ab\u30b9\u529b\u3092\u7528\u3044\u305f\u4e2d\u7a7a\u69cb\u9020 SOI \u5c64\u306e\u5927\u9762\u7a4d\u8ee2\u5199\u3068\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u8584\u819c\u592a\u967d\u96fb\u6c60\u5fdc\u7528\u201d\u3001\u7b2c6\u56de\u8584\u819c\u592a\u967d\u96fb\u6c60\u30bb\u30df\u30ca\u30fc2014\u3001P33\uff082014.10.15-16\u3001\u5e83\u5cf6\u5927\u5b66 \u971e\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9152\u6c60\u3000\u8015\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u5c0f\u6797\u3000\u7fa9\u5d07\u3001\u4e2d\u6751\u3000\u5c06\u543e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30e1\u30cb\u30b9\u30ab\u30b9\u529b\u3092\u7528\u3044\u305f\u4e2d\u7a7a\u69cb\u9020SOI \u5c64\u306e\u4f4e\u6e29\u8ee2\u5199\u3068\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u57fa\u677f\u4e0a\u3067\u306e\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3TFT \u306e\u4f5c\u88fd\u201d\u3001\u7b2c75\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300020a-A25-6\uff082014.9.17-20\u3001\u5317\u6d77\u9053\u5927\u5b66\u3000\u672d\u5e4c\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e38\u5c71\u3000\u4f73\u7950\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u6025\u901f\u71b1\u51e6\u306b\u304a\u3051\u308b4H-SiC \u4e2d\u306e\u4e0d\u7d14\u7269\u6d3b\u6027\u5316\u3068\u51b7\u5374\u901f\u5ea6\u5236\u5fa1\u201d\u3001\u7b2c75\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300019a-PB5-6\uff082014.9.17-20\u3001\u5317\u6d77\u9053\u5927\u5b66\u3000\u672d\u5e4c\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f\u3000\u5b8f\u660e\u3001\u4e38\u5c71\u3000\u4f73\u7950\u3001\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u6717\u3001\u201cEBSD \u30d1\u30bf\u30fc\u30f3\u660e\u77ad\u5ea6\u3092\u7528\u3044\u305f\u30ea\u30f3\u6ce8\u51654H-SiC \u5c64\u306e\u7d50\u6676\u6027\u8a55\u4fa1\u201d\u3001 \u7b2c75\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300019a-PB5-5\uff082014.9.17-20\u3001\u5317\u6d77\u9053\u5927\u5b66\u3000\u672d\u5e4c\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u77f3\u4e38\u3000\u51cc\u8f14\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u4e38\u5c71\u3000\u4f73\u7950\u3001\u5ee3\u677e\u3000\u5fd7\u9686\u3001\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b4H-SiC \u4e0aSiO2\u5806\u7a4d\u819c\u306e\u6539\u5584\u201d\u3001\u7b2c75\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300019a-A19-8\uff082014.9.17-20\u3001\u5317\u6d77\u9053\u5927\u5b66\u3000\u672d\u5e4c\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u8c37\u3000\u592a\u4e00\u3001\u6797\u3000\u5c06\u5e73\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316Ge \u819c\u3092\u7528\u3044\u305fTFT \u306e\u96fb\u6c17\u7279\u6027\u8a55\u4fa1\u201d\u3001\u7b2c75\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300019a-A19-8\uff082014.9.17-20\u3001\u5317\u6d77\u9053\u5927\u5b66\u3000\u672d\u5e4c\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c71\u672c\u3000\u5c06\u609f\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u6797\u3000\u5c06\u5e73\u3001\u4e2d\u8c37\u3000\u592a\u4e00\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u306b\u3088\u308bSi \u6975\u7d30\u7dda\u306e\u96fb\u6c17\u7279\u6027\u8a55\u4fa1\u53ca\u3073\u8584\u819c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u5fdc\u7528\u201d\u3001\u7b2c75\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300019a-A19-7\uff082014.9.17-20\u3001\u5317\u6d77\u9053\u5927\u5b66\u3000\u672d\u5e4c\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6771\u3000\u6e05\u4e00\u90ce\u3001\u6797\u3000\u5c06\u5e73\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u7d50\u6676\u5316\u304a\u3088\u3073\u5358\u7d50\u6676\u8584\u819c\u8ee2\u5199\u306b\u3088\u308b\u30ac\u30e9\u30b9\u304a\u3088\u3073\u30d7\u30e9\u30b9\u30c6\u30a3\u30c3\u30af\u4e0a\u306e\u9ad8\u6027\u80fd\u8584\u819c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u4f5c\u88fd\u201d\u3001\u7b2c75\u56de \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300017\uff50-A19-3\uff082014.9.17-20\u3001\u5317\u6d77\u9053\u5927\u5b66\u3000\u672d\u5e4c\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[\u62db\u5f85\u8b1b\u6f14] <\/strong>\u6771\u3000\u6e05\u4e00\u90ce\u3000\u534a\u5c0e\u4f53\u8584\u819c\u306e\u7d50\u6676\u6210\u9577\u3068\u30c7\u30d0\u30a4\u30b9\u5fdc\u7528\u300d\u7b2c59\u56de\u7269\u6027\u82e5\u624b\u590f\u306e\u5b66\u6821\u3000\uff082014.8.1.\u3000 \u6d5c\u540d\u6e56\u30ed\u30a4\u30e4\u30eb\u30db\u30c6\u30eb\uff09.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5ee3\u677e\u3000\u5fd7\u9686\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u4e38\u5c71\u3000\u4f73\u7950\u3001\u77f3\u4e38\u3000\u51cc\u8f14\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201cSi \u633f\u5165\u5c64\u306e\u4e0d\u7d14\u7269\u6fc3\u5ea6\u306b\u4f9d\u5b58\u3057\u305f4H-SiC \u306e\u30b3\u30f3\u30bf\u30af\u30c8\u7279\u6027\u201d\u30012014\u5e74\u5ea6\u3000\u5fdc\u7528\u7269\u7406\u30fb\u7269\u7406\u7cfb\u5b66\u4f1a\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u3000\u5408\u540c\u5b66\u8853\u8b1b\u6f14\u4f1a\uff08Da-6\uff09P.59.\uff082014.7.26\u3001\u5cf6\u6839\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6d5c\u7530\u3000\u614e\u4e5f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5c0f\u91ce\u3000\u8cb4\u5bdb\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u5316\u4fc3\u9032\u306b\u3088\u308bGe \u4e2dAs \u306e\u9ad8\u52b9\u7387\u6d3b\u6027\u5316\u201d\u30012014\u5e74\u5ea6\u3000\u5fdc\u7528\u7269\u7406\u30fb\u7269\u7406\u7cfb\u5b66\u4f1a\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u3000\u5408\u540c\u5b66\u8853\u8b1b\u6f14\u4f1a\uff08Da-7\uff09P.60.\uff082014.7.26\u3001\u5cf6\u6839\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6d5c\u7530\u3000\u614e\u4e5f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5c0f\u91ce\u3000\u8cb4\u5bdb\u3001\u6a4b\u672c\u3000\u90a6\u660e\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cGe\u57fa\u677f\u4e2d\u306eAs\u9ad8\u52b9\u7387\u6d3b\u6027\u5316\u3068\u4f4e\u62b5\u6297\u6d45\u63a5\u5408\u5f62\u6210\u201d\u3001\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a\u3001  \u4fe1\u5b66\u6280\u5831114<\/strong>\uff0888\uff09pp. 27-30.\uff082014\u5e746\u670819\u65e5\u3001\u540d\u53e4\u5c4b\u5927\u5b66\u30fb\u30d9\u30f3\u30c1\u30e3\u30fc\u30fb\u30d3\u30b8\u30cd\u30b9\u30fb\u30e9\u30dc\u30e9\u30c8\u30ea\u30fc\uff09.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2013\u5e74\u5ea6<\/p>\n\n\n\n

K. Tanaka, S. Hayashi, T. Kamikura, T. Mizuno, and S. Higashi, \u201cInvestigation on Crack Generation Mechanism and Reduction of Cracks Using Buffer Layer in Thermal-Plasma-Jet Crystallization of Amorphous Silicon Films on Glass Substrate,\u201d 8th<\/sup> Int. Conf. Reactive Plasmas, 31st <\/sup>Symp. Plasma Processing (ICRP-8\/SPP-31), (Fukuoka, Japan, Feb. 4-7, 2014), <\/em>7A-AM-O3.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Morisaki, S. Hayashi, T. Kamikura, S. Yamamoto, and S. Higashi, \u201cFabrication of Short Channel Thin Film Transistors by Channel Doping and Micro Thermal Plasma Jet Crystallization and Their Application to High Frequency Operation of CMOS Circuits,\u201dAbs.10th<\/sup> Int. Thin-Film Transistor Conf. (ITC2014), (Delft<\/em>, Netherlands, Jan. 23-24, 2014),<\/em> p.15.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
M. Akazawa, K. Sakaike, S. Nakamura, and S. Higashi, \u201cLocal Transfer of Single-Crystalline Silicon (100) Layer by Meniscus Force and Its Application to High-Performance MOSFET Fabrication on Glass Substrate,\u201d 2013\u3000IEEE Int. Electron Dev. Meeting Tech. dig., (IEDM2013), (Washington, USA, Dec. 9-11, 2013), <\/em>pp.308-311.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited] <\/strong>S. Higashi, K. Sakaike, S. Hayashi, S. Morisaki, M. Akazawa, S. Nakamura, and T. Fukunaga, \u201cLow-Temperature Formation of Single-Crystalline Silicon on Glass and Plastic Substrates and Its Application to MOSFET Fabrication,\u201d Proc. 20th<\/sup> Int. Display Workshops (IDW\u201913), (Sapporo, Japan, Dec. 4-6, 2013)<\/em>, AMD1-3, pp. 258-261.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Ono, K. Hashimoto, A. Ohta, H. Murakami, H. Hanafusa, S. Higashi, and S. Miyazaki, \u201cStudy on As+<\/sup> Ion Implantation into Ge at Different Substrate Temperatures,\u201d Ext. Abs. 2013 Int. Workshop Dielectric Thin Films Future ULSI Dev. (IWDTF2013), (Tokyo, Japan, Nov. 7-9, 2013)<\/em>, S6-3 pp. 127-128.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Hashimoto, T. Ono, A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki, \u201cImpact of Post-Metallization Annealing on Chemical Bonding Features in Ge-MIS Structure with HfO2<\/sub>\/TaGex<\/sub>Oy<\/sub> Stack,\u201d Ext. Abs. 20013 Int. Workshop Dielectric Thin Films Future ULSI Dev. (IWDTF2013), (Tokyo, Japan, Nov. 7-9, 2013)<\/em>, pp. 49-50.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Nakamura, K. Sakaike, M. Akazawa, T. Fukunaga, S. Hayashi, and S. Higashi, \u201cLarge Area Transfer of Silicon Films with Midair Cavity Using Meniscus Force,\u201d Tech. Dig. 23rd <\/sup>Int. Photovoltaic Sci. Eng. Conf. (PVSEC-23), (Taipei, Taiwan, Oct. 28- Nov. 1, 2013), <\/em>1-O-33.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, K. Makihara, M. Fukusima, H. Murakami, S. Higashi, and S. Miyazaki, \u201cResistive Switching Properties of SiOx<\/sub>\/TiO2 <\/sub>Multi-Stack in Ti-Electrode Mim Diodes,\u201d 224th <\/sup>Electrochem. Soc. (ECS) Meeting (San Francisco, USA, Oct. 27-Nov.1, 2013).<\/em><\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Hanafusa, A. Ohta, R. Ashihara, K. Maruyama, T. Mizuno, S. Hayashi, H. Murakami, and S. Higashi, \u201cContact Property of 4H-SiC with Phosphorus-Doped and Crystallized Amorphous-Silicon Insertion Layer,\u201d Tech. Dig. Int. Conf. Silicon Carbide and Related Mat. 2013 (ICSCRM2013), (Miyazaki, Japan, Sept. 29-Oct. 4, 2013), <\/em>p. 22.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Hanafusa, R. Ashihara, K. Maruyama, S. Koyanagi, S. Hayashi, H. Murakami, and S. Higashi, \u201cAs and Al Activation in SiC Wafer by Atmospheric Thermal Plasma Jet Annealing,\u201d Ext. Abs<\/em>. 2013 Int. Conf. Solid State Dev. Mat. (SSDM 2013), (Fukuoka, Japan, Sept. 24-27, 2013), <\/em>pp. 472-473.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Hayashi, S. Morisaki, T. Kamikura, S. Yamamoto, K. Sakaike, M. Akazawa, and S. Higashi, \u201cGrain Growth Control during Leading Wave Crystallization Induced by Micro-Thermal-Plasma-Jet Irradiation\u3000to\u3000Amorphous\u3000Silicon Films,\u201d Proc. Int. Symp. Dry Process (DPS2013), (Jeju, Korea, Aug. 29-30, 2013), <\/em>pp. 43-44.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Maruyama, H. Hanafusa, R. Ashihara, S. Koyanagi, S. Hayashi, H. Murakami, and S. Higashi, \u201cAtmospheric Pressure Thermal Plasma Jet annealing for 4H-SiC and Aluminium Activation,\u201d Proc. Int. Symp. Dry Process (DPS2013), (Jeju, Korea, Aug. 29-30, 2013), <\/em>pp. 109-110.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Sakaike, Y. Kobayashi, S. Nakamura, M. Akazawa, S. Hayashi, S. Morisaki, M. Ikeda, and S. Higashi, \u201cLocal Area Transfer and Simultaneous Crystallization of Amorphous Si Films with Midair Structure Induced by Near-Infrared Semiconductor Diode Laser Irradiation,\u201d Abs. 25th<\/sup> Int. Conf. Amorphous and Nano-crystalline Semiconductors (ICANS25), (Toronto, Canada, Aug. 18-23, 2013)<\/em>, p. 40.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Hayashi, Y. Fujita, S. Morisaki, T. Kamikura, S. Yamamoto, M. Akazawa, and S. Higashi, \u201cGrain Growth Control by Micro-Thermal-Plasma-Jet Irradiation to Amorphous Silicon Strips through Slit Masks and Its Application to High-Performance Thin-Film Transistors,\u201d Proc. AM-FPD13, (Kyoto, Japan, Jul. 2-5, 2013)<\/em>, pp. 113-116.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited]<\/strong> S. Higashi, S. Hayashi, S. Morisaki, and Y. Fujita, \u201cGrowth Control of Crystalline Silicon during Microsecond Phase Transformation and Its Application to Thin-Film Transistor Fabrication,\u201d 2013 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2013), (Seoul, Korea, Jun. 26- 28, 2013)<\/em>, pp. 265-269.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Kamikura, S. Hayashi, S. Morisaki, Y. Fujita, M. Akazawa, and S. Higashi, \u201cExplosive Crystallization of Amorphous Germanium Films Induced by Atmospheric Pressure Micro-Thermal-Plasma-Jet Irradiation,\u201d 8th <\/sup>Int. Conf. Silicon Epitaxy and Heterostructures (ICSI-8), 6th<\/sup> Int. Symp. Control of Semiconductor Interfaces, (ISCSI-VI), (Fukuoka, Japan, Jun. 2-6, 2013), <\/em>pp. 157 \u2013 158.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki, \u201cDetermination of Bandgap Energy of Thermally-Grown Si- and Ge- Oxides from Energy Loss Spectra of Photoelectrons,\u201d 8th <\/sup>Int. Conf. Silicon Epitaxy and Heterostructures (ICSI-8), 6th <\/sup>  Int. Symp. Control of Semiconductor Interfaces (ISCSI-VI), (Fukuoka, Japan, Jun. 2-6, 2013), <\/em>pp. 273 \u2013 274.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Sakaike, Y. Kobayashi, S. Nakamura, S. Hayashi, M. Akazawa, S. Morisaki, and S. Higashi, \u201cDevelopment of Silicon Layer Transfer Technique Using Mid-air Structure for Thin Film Transistor Fabrication,\u201d Abs.<\/em> 2013 Mat. Res. Soc. Spring Meeting (San Francisco, USA, Apr. 1-5, 2013), <\/em>A19.05.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[\u6ce8\u76ee\u8b1b\u6f14]<\/strong> \u9152\u6c60\u3000\u8015\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u4e2d\u6751\u3000\u5c06\u543e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30d5\u30ec\u30ad\u30b7\u30d6\u30eb\u57fa\u677f\u4e0a\u3067\u306e\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3MOSFET\u306e\u4f5c\u88fd\u201d\u3001\u7b2c61\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300019a-D2-11\uff082014.3.17-20\u3001\u9752\u5c71\u5b66\u9662\u5927\u5b66\u3000\u76f8\u6a21\u539f\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u6751\u3000\u5c06\u543e\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30e1\u30cb\u30b9\u30ab\u30b9\u529b\u306b\u3088\u308b\u5927\u9762\u7a4d\u8ee2\u5199\u6280\u8853\u3092\u7528\u3044\u3066\u5f62\u6210\u3055\u308c\u305fPET\u57fa\u677f\u4e0a\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u819c\u306e\u5bc6\u7740\u6027\u6539\u5584\u201d\u3001\u7b2c61\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300019a-D2-10\uff082014.3.17-20\u3001\u9752\u5c71\u5b66\u9662\u5927\u5b66\u3000\u76f8\u6a21\u539f\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u4e2d\u6751\u3000\u5c06\u543e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30e1\u30cb\u30b9\u30ab\u30b9\u529b\u3092\u7528\u3044\u305f\u5c40\u6240\u8ee2\u5199\u306b\u3088\u308b\u30ac\u30e9\u30b9\u57fa\u677f\u4e0a\u9ad8\u6027\u80fdn\u30c1\u30e3\u30cd\u30ebSi MOSFET\u306e\u4f5c\u88fd\u201d\u3001\u7b2c61\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300019a-E14-8\uff082014.3.17-20\u3001\u9752\u5c71\u5b66\u9662\u5927\u5b66\u3000\u76f8\u6a21\u539f\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u7530\u4e2d\u3000\u656c\u4ecb\u3001\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u306b\u304a\u3051\u308b\u8868\u9762\u7dfb\u5bc6\u5316\u30e2\u30c7\u30eb\u3092\u7528\u3044\u305f\u30ac\u30e9\u30b9\u57fa\u677f\u306e\u53cd\u308a\u89e3\u6790\u201d\u3001\u7b2c61\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300019a-E14-6\uff082014.3.17-20\u3001\u9752\u5c71\u5b66\u9662\u5927\u5b66\u3000\u76f8\u6a21\u539f\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u6797\u3000\u5c06\u5e73\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u5c71\u6839\u3000\u96c5\u4eba\u3001\u4e2d\u8c37\u3000\u592a\u4e00\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u306b\u3088\u308b\u5f93\u6765\u69cb\u9020\u304a\u3088\u3073\u7d30\u7dda\u69cb\u9020TFT\u306e\u7279\u6027\u8a55\u4fa1\u201d\u3001\u7b2c61\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300019a-E14-7\uff082014.3.17-20\u3001\u9752\u5c71\u5b66\u9662\u5927\u5b66\u3000\u76f8\u6a21\u539f\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6797\u3000\u5c06\u5e73\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u4e2d\u8c37\u3000\u592a\u4e00\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201ca-Si\u7d30\u7dda\u306e\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u306b\u304a\u3051\u308b\u7d50\u6676\u6210\u9577\u89b3\u5bdf\u201d\u3001\u7b2c61\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300019p-PG3-18\uff082014.3.17-20\u3001\u9752\u5c71\u5b66\u9662\u5927\u5b66\u3000\u76f8\u6a21\u539f\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6a4b\u672c\u3000\u90a6\u660e\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5c0f\u91ce\u3000\u8cb4\u5bdb\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e \u8aa0\u4e00\u3001 \u201cHfO2<\/sub>\/TaGex<\/sub>Oy<\/sub>\u7d76\u7e01\u819c\u3092\u7528\u3044\u305fGe-MIS\u30ad\u30e3\u30d1\u30b7\u30bf\u306b\u304a\u3051\u308b\u71b1\u51e6\u7406\u52b9\u679c\u201d\u3001  \u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u7814\u7a76\u4f1a\u3000\u7b2c19\u56de\u7814\u7a76\u4f1a\u3000\u6750\u6599\u30fb\u30d7\u30ed\u30bb\u30b9\u30fb\u8a55\u4fa1\u306e\u7269\u7406\u3001pp. 139 \u2013 142.\u3000\uff082014.1.24-1.25\u3001\u30cb\u30e5\u30fc\u30a6\u30a7\u30eb\u30b7\u30c6\u30a3\u30fc\u6e6f\u6cb3\u539f\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c0f\u91ce\u3000\u8cb4\u5bdb\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cGe(100)\u57fa\u677f\u3078\u306e\u4f4e\u6e29As+<\/sup>\u30a4\u30aa\u30f3\u6ce8\u5165\u306b\u3088\u308b\u4f4e\u62b5\u6297\u6d45\u63a5\u5408\u5f62\u6210\u201d\u3001 \u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u7814\u7a76\u4f1a\u3000\u7b2c19\u56de\u7814\u7a76\u4f1a\u3000\u6750\u6599\u30fb\u30d7\u30ed\u30bb\u30b9\u30fb\u8a55\u4fa1\u306e\u7269\u7406\u3001pp. 183 \u2013 186.\u3000 \uff082014.1.24-1.25\u3001\u30cb\u30e5\u30fc\u30a6\u30a7\u30eb\u30b7\u30c6\u30a3\u30fc\u6e6f\u6cb3\u539f\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u6751\u3000\u5c06\u543e\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30e1\u30cb\u30b9\u30ab\u30b9\u529b\u306b\u3088\u308b\u4e2d\u7a7a\u69cb\u9020SOI\u5c64\u306e\u4f4e\u6e29\u5927\u9762\u7a4d\u8ee2\u5199\u201d\u3001\u7b2c5\u56de\u8584\u819c\u592a\u967d\u96fb\u6c60\u30bb\u30df\u30ca\u30fc\u3001P1-5\uff082013.11.14-11.15\u3001\u540d\u53e4\u5c4b\u5927\u5b66 \u91ce\u4f9d\u8a18\u5ff5\u5b66\u8853\u4ea4\u6d41\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6c34\u91ce\u3000\u7ffc\u3001\u6797\u3000\u5c06\u5e73\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u4f4e\u6e29\u5806\u7a4dSiNx\/SiO2<\/sub>\u7a4d\u5c64\u819c\u3092\u7528\u3044\u305f\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u8868\u9762\u30d1\u30c3\u30b7\u30d9\u30fc\u30b7\u30e7\u30f3\u306b\u3088\u308b\u5c11\u6570\u30ad\u30e3\u30ea\u30a2\u30e9\u30a4\u30d5\u30bf\u30a4\u30e0\u306e\u5411\u4e0a\u201d\u3001 \u7b2c5\u56de\u8584\u819c\u592a\u967d\u96fb\u6c60\u30bb\u30df\u30ca\u30fc\u3001P1-6\uff082013.11.14-11.15\u3001\u540d\u53e4\u5c4b\u5927\u5b66\u3000\u91ce\u4f9d\u8a18\u5ff5\u5b66\u8853\u4ea4\u6d41\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u4e2d\u6751\u3000\u5c06\u543e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30e1\u30cb\u30b9\u30ab\u30b9\u529b\u3092\u5229\u7528\u3057\u305f\u71b1\u9178\u5316\u3055\u308c\u305f\u4e2d\u7a7a\u69cb\u9020SOI\u5c64\u306e\u5c40\u6240\u8ee2\u5199\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c10\u56de\u7814\u7a76\u96c6\u4f1a\u300102P05 (pp. 194-196)\uff082013.10.31-11.2\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u30a2\u30d0\u30f3\u30c6\u30a3\u97ff\u90fd\uff08\u304d\u3087\u3046\u3068\uff09\u30db\u30fc\u30eb\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u6751\u3000\u5c06\u543e\u3001 \u9152\u6c60\u3000\u8015\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30e1\u30cb\u30b9\u30ab\u30b9\u529b\u3092\u5229\u7528\u3057\u305f\u5927\u9762\u7a4d\u4e2d\u7a7a\u69cb\u9020SOI\u5c64\u306e\u4f4e\u6e29\u8ee2\u5199\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c10\u56de\u7814\u7a76\u96c6\u4f1a\u300102P06 (pp. 197-199)\uff082013.10.31-11.2\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u30a2\u30d0\u30f3\u30c6\u30a3\u97ff\u90fd\uff08\u304d\u3087\u3046\u3068\uff09\u30db\u30fc\u30eb\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9152\u6c60\u3000\u8015\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u4e2d\u6751\u3000\u5c06\u543e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30e1\u30cb\u30b9\u30ab\u30b9\u529b\u3092\u5229\u7528\u3057\u305f\u4e2d\u7a7a\u69cb\u9020\u30b7\u30ea\u30b3\u30f3\u819c\u306e\u4f4e\u6e29\u5c40\u6240\u8ee2\u5199\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c10\u56de\u7814\u7a76\u96c6\u4f1a\u300102P07 (pp. 200-203)\uff082013.10.31-11.2\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u30a2\u30d0\u30f3\u30c6\u30a3\u97ff\u90fd\uff08\u304d\u3087\u3046\u3068\uff09\u30db\u30fc\u30eb\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u7530\u4e2d\u3000\u656c\u4ecb\u3001\u6797\u3000\u5c06\u5e73\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u6c34\u91ce\u3000\u7ffc\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30ac\u30e9\u30b9\u57fa\u677f\u4e0aa-Si\u819c\u306e\u6025\u901f\u71b1\u51e6\u7406\u7d50\u6676\u5316\u306b\u304a\u3051\u308b\u4e2d\u9593\u7de9\u885d\u5c64\u304c\u6b8b\u7559\u5fdc\u529b\u306b\u53ca\u307c\u3059\u5f71\u97ff\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c10\u56de\u7814\u7a76\u96c6\u4f1a\u300102P04 (pp. 191-193)\uff082013.10.31-11.2\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u30a2\u30d0\u30f3\u30c6\u30a3\u97ff\u90fd\uff08\u304d\u3087\u3046\u3068\uff09\u30db\u30fc\u30eb\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e0a\u5009\u3000\u656c\u5f18\u3001\u6797\u3000\u5c06\u5e73\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308ba-Ge\u819c\u306eLeading Wave Crystallization\u53ca\u3073\u9ad8\u901f\u6a2a\u65b9\u5411\u7d50\u6676\u5316\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c10\u56de\u7814\u7a76\u96c6\u4f1a\u300102P02 (pp. 183-186)\uff082013.10.31-11.2\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u30a2\u30d0\u30f3\u30c6\u30a3\u97ff\u90fd\uff08\u304d\u3087\u3046\u3068\uff09\u30db\u30fc\u30eb\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c71\u672c\u3000\u5c06\u609f\u3001\u6797\u3000\u5c06\u5e73\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u5e45\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u7d30\u7dda\u3092\u7528\u3044\u305f\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u306b\u304a\u3051\u308b\u7d50\u6676\u7c92\u754c\u5236\u5fa1\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c10\u56de\u7814\u7a76\u96c6\u4f1a\u300102P09 (pp. 208-211)\uff082013.10.31-11.2\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u30a2\u30d0\u30f3\u30c6\u30a3\u97ff\u90fd\uff08\u304d\u3087\u3046\u3068\uff09\u30db\u30fc\u30eb\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6797\u3000\u5c06\u5e73\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u7570\u306a\u308b\u7d50\u6676\u5316Si\u819c\u306e\u7d50\u6676\u69cb\u9020\u53ca\u3073TFT\u96fb\u6c17\u7279\u6027\u306e\u8abf\u67fb\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c10\u56de\u7814\u7a76\u96c6\u4f1a\u300102P10 (pp. 212-215)\uff082013.10.31-11.2\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u30a2\u30d0\u30f3\u30c6\u30a3\u97ff\u90fd\uff08\u304d\u3087\u3046\u3068\uff09\u30db\u30fc\u30eb\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u6797\u3000\u5c06\u5e73\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316Si\u819c\u3092\u7528\u3044\u305f\u8584\u819c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u5fae\u7d30\u5316\u304a\u3088\u3073CMOS\u56de\u8def\u306e\u9ad8\u901f\u99c6\u52d5\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c10\u56de\u7814\u7a76\u96c6\u4f1a\u300131R11 (pp. 64-67)\uff082013.10.31-11.2\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u30a2\u30d0\u30f3\u30c6\u30a3\u97ff\u90fd\uff08\u304d\u3087\u3046\u3068\uff09\u30db\u30fc\u30eb\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e38\u5c71\u3000\u4f73\u7950\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u6025\u901f\u71b1\u51e6\u7406\u306b\u3088\u308b4H-SiC\u4e2dAl\u6d3b\u6027\u5316\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c10\u56de\u7814\u7a76\u96c6\u4f1a\u300101P08 (pp. 137-138)\uff082013.10.31-11.2\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u30a2\u30d0\u30f3\u30c6\u30a3\u97ff\u90fd\uff08\u304d\u3087\u3046\u3068\uff09\u30db\u30fc\u30eb\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6c34\u91ce\u3000\u7ffc\u3001\u6797\u3000\u5c06\u5e73\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30ea\u30e2\u30fc\u30c8\u8a98\u5c0e\u7d50\u5408\u578b\u30d7\u30e9\u30ba\u30de\u5316\u5b66\u6c17\u76f8\u5806\u7a4d\u6cd5\u3092\u7528\u3044\u305f\u4f4e\u6e29\u5806\u7a4dSiNx<\/sub>\/SiO2<\/sub>\u7a4d\u5c64\u819c\u306b\u3088\u308b\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u8868\u9762\u30d1\u30c3\u30b7\u30d9\u30fc\u30b7\u30e7\u30f3\u201d\u3001 \u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c10\u56de\u7814\u7a76\u96c6\u4f1a\u300131P03 (pp. 33-35)\uff082013.10.31-11.2\u3001\u9f8d\u8c37\u5927\u5b66\u3000\u30a2\u30d0\u30f3\u30c6\u30a3\u97ff\u90fd\uff08\u304d\u3087\u3046\u3068\uff09\u30db\u30fc\u30eb\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e38\u5c71\u3000\u4f73\u7950\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c4H-SiC\u3078\u306e\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308bAl\u306e\u6d3b\u6027\u5316\u201d\u3001\u7b2c74\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300017a-B3-3\uff082013.9.16-20\u3001\u540c\u5fd7\u793e\u5927\u5b66\u3000\u4eac\u7530\u8fba\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u6751\u3000\u5c06\u543e\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u798f\u6c38\u3000\u8cb4\u53f8\u3001\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30e1\u30cb\u30b9\u30ab\u30b9\u529b\u306b\u3088\u308b\u4e2d\u7a7a\u69cb\u9020\u30b7\u30ea\u30b3\u30f3\u819c\u306e\u5927\u9762\u7a4d\u8ee2\u5199 \u201d\u3001\u7b2c74\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c618a-A4-3\u3000\uff082013.9.16-20\u3001\u540c\u5fd7\u793e\u5927\u5b66\u3000\u4eac\u7530\u8fba\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u798f\u6c38\u3000\u8cb4\u53f8\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u4e2d\u6751\u3000\u5c06\u543e\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30e1\u30cb\u30b9\u30ab\u30b9\u529b\u3092\u5229\u7528\u3057\u305f\u4e2d\u7a7a\u69cb\u9020\u5fae\u5c0fSi\u819c\u306e\u5c40\u6240\u8ee2\u5199 \u201d\u3001\u7b2c74\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300018a-A4-4\u3000\uff082013.9.16-20\u3001\u540c\u5fd7\u793e\u5927\u5b66\u3000\u4eac\u7530\u8fba\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6797\u3000\u5c06\u5e73\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308ba-Si\u819c\u306eLeading Wave Crystallization\u306b\u304a\u3051\u308b\u7d50\u6676\u4f4d\u7f6e\u5236\u5fa1\u53ca\u3073TFT\u306e\u96fb\u6c17\u7279\u6027\u8a55\u4fa1\u201d\u3001\u7b2c74\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c619p-B4-1\uff082013.9.16-20\u3001\u540c\u5fd7\u793e\u5927\u5b66\u3000\u4eac\u7530\u8fba\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u6797\u3000\u5c06\u5e73\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u3092\u7528\u3044\u305f\u5fae\u7d30\u8584\u819c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306e\u7279\u6027\u8a55\u4fa1\u201d\u3001\u7b2c74\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c619p-B4-2\uff082013.9.16-20\u3001\u540c\u5fd7\u793e\u5927\u5b66\u3000\u4eac\u7530\u8fba\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9152\u6c60\u3000\u8015\u5e73\u3001\u4e2d\u6751\u3000\u5c06\u543e\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u798f\u6c38\u3000\u8cb4\u53f8\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30e1\u30cb\u30b9\u30ab\u30b9\u529b\u3092\u5229\u7528\u3057\u305f\u4e2d\u7a7a\u69cb\u9020\u30b7\u30ea\u30b3\u30f3\u819c\u306e\u4f4e\u6e29\u8ee2\u5199 \u201d\u3001\u7b2c74\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c619p-B4-11\uff082013.9.16-20\u3001\u540c\u5fd7\u793e\u5927\u5b66\u3000\u4eac\u7530\u8fba\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u4e2d\u6751\u3000\u5c06\u543e\u3001\u798f\u6c38\u3000\u8cb4\u53f8\u3001\u6797\u3000\u5c06\u5e73\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30e1\u30cb\u30b9\u30ab\u30b9\u529b\u306b\u3088\u308b\u71b1\u9178\u5316\u3055\u308c\u305f\u4e2d\u7a7a\u69cb\u9020\u30b7\u30ea\u30b3\u30f3\u819c\u306e\u5c40\u6240\u8ee2\u5199\u201d\u3001\u7b2c74\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c619p-B4-12\uff082013.9.16-20\u3001\u540c\u5fd7\u793e\u5927\u5b66\u3000\u4eac\u7530\u8fba\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u7530\u4e2d\u3000\u656c\u4ecb\uff0c\u6797\u3000\u5c06\u5e73\uff0c\u4e0a\u5009\u3000\u656c\u5f18\uff0c\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30ac\u30e9\u30b9\u57fa\u677f\u4e0aa-Si\u819c\u306e\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u306b\u304a\u3051\u308b\u4e2d\u9593\u7de9\u885d\u5c64\u306b\u3088\u308b\u30af\u30e9\u30c3\u30af\u6291\u5236\u30e1\u30ab\u30cb\u30ba\u30e0\u306e\u8abf\u67fb\u201d\u3001\u7b2c74\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c619p-B4-3\uff082013.9.16-20\u3001\u540c\u5fd7\u793e\u5927\u5b66\u3000\u4eac\u7530\u8fba\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c0f\u91ce\u3000\u8cb4\u5bdb\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u30b2\u30eb\u30de\u30cb\u30a6\u30e0\u3078\u306e\u4f4e\u6e29As+\u30a4\u30aa\u30f3\u6ce8\u5165\u306b\u3088\u308b\u6d3b\u6027\u5316\u7387\u5411\u4e0a\u201d\u3001\u7b2c74\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c620p-B4-8\uff082013.9.16-20\u3001\u540c\u5fd7\u793e\u5927\u5b66\u3000\u4eac\u7530\u8fba\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6a4b\u672c\u3000\u90a6\u660e\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cHfO2\/TaGexOy\u3092\u7528\u3044\u305fGe-MIS\u69cb\u9020\u306e\u71b1\u51e6\u7406\u306b\u3088\u308b\u5316\u5b66\u69cb\u9020\u5909\u5316 \u201d\u3001\u7b2c74\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c618p-P9-8\uff082013.9.16-20\u3001\u540c\u5fd7\u793e\u5927\u5b66\u3000\u4eac\u7530\u8fba\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6797\u3000\u5c06\u5e73\u3001\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316SiTFT\u306b\u304a\u3051\u308b\u30c1\u30e3\u30cd\u30eb\u7d50\u6676\u72b6\u614b\u53ca\u3073\u96fb\u6c17\u7279\u6027\u8a55\u4fa1 \u201d\u3001\u7b2c74\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u79cb\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c619a-P5-7\uff082013.9.16-20\u3001\u540c\u5fd7\u793e\u5927\u5b66\u3000\u4eac\u7530\u8fba\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e0a\u5009\u3000\u656c\u5f18\u3001\u6797\u3000\u5c06\u5e73\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308ba-Ge\u819c\u306e\u9ad8\u901f\u6a2a\u65b9\u5411\u7d50\u6676\u5316 \u201d\u3001\u7b2c74\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c619p-B4-7\uff082013.9.16-20\u3001\u540c\u5fd7\u793e\u5927\u5b66\u3000\u4eac\u7530\u8fba\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5927\u7530\u3000\u6643\u751f\u3001\u798f\u5d8b\u3000\u592a\u7d00\u3001\u7267\u539f\u3000\u514b\u5178\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cSiOx<\/sub>\/TiO2<\/sub>\u7a4d\u5c64\u3057\u305fMIM\u30c0\u30a4\u30aa\u30fc\u30c9\u306b\u304a\u3051\u308b\u62b5\u6297\u5909\u5316\u7279\u6027\u8a55\u4fa1\u201d\u3001\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a\u3001113\uff0887\uff09pp. 61-66.\u3000(2013.6.18\u3001\u6a5f\u68b0\u632f\u8208\u4f1a\u9928).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2012\u5e74\u5ea6<\/p>\n\n\n\n

S. Morisaki, S. Hayashi, Y. Fujita, and S. Higashi, \u201cImprovement in Characteristic Variability of Thin Film Transistors Using Grain Growth Control by Micro Thermal Plasma Jet Irradiation to Amorphous Silicon Strips and CMOS Circuit Operation at Supply Voltage of 5V,\u201d 9th<\/sup> Int. Thin-Film Transistor Conf. 2013 (ITC2013), (Tokyo, Japan, Mar. 1-2, 2013),<\/em> 2pAO05.\u3000<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, J. Gao, D. Takeuchi, K. Sakaike, S. Hayashi, M. Ikeda, S. Higashi, and S. Miyazaki, \u201cHighly-crystallized Ge:H film growth from GeH4<\/sub> very high frequency inductively-coupled plasma -Crystalline nucleation initiated by Ninanodots,\u201d 5th<\/sup> Int. Symp. Advanced plasma Sci. and its Applications Nitrides and Nanomaterials (ISPlasma2013), (Nagoya, Japan, Jan. 28-Feb. 1, 2013)<\/em>, p. 132.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, M. Fukusima, K. Makihara, S. Higashi, and S. Miyazaki, \u201cResistive switching behaviors of Si-rich oxide with Ti-based electrodes,\u201d 5th<\/sup> Int. Symp.  Advanced plasma Sci. and its Applications Nitrides and Nanomaterials (ISPlasma2013), (Nagoya, Japan, Jan. 28- Feb. 1, 2013)<\/em>, p.113.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Morisaki, S. Hayashi, Y. Fujita, and S. Higashi, \u201cGrain Growth Control by Micro Thermal Plasma Jet Irradiation to Amorphous Silicon Strips and Improvement in Characteristic Variability of Thin Film Transistors,\u201d Proc. 30th<\/sup> Symp. Plasma Processing (SPP-30), (Hamamatsu, Japan, Jun. 21-23, 2013), <\/em>pp. 99-100.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
R. Ashihara, H. Hanafusa, H. Murakami, S. Hayashi, and S. Higashi, \u201cRapid Thermal Annealing of SiC Wafer by Atmospheric Pressure Thermal Plasma Jet Irradiration,\u201d Proc. Int. Symp. Dry Process (DPS2012), (Tokyo, Japan, Nov. 15-16, 2012)<\/em>, pp. 147-148.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Sakaike, Y. Kobayashi, S. Nakamura, S. Hayashi, M. Akazawa, and S. Higashi, \u201cLayer Transfer and Simultaneous Crystallization of Amorphous Si Films with Mid-Air Structure Induced by Near-Infrared Semiconductor Diode Laser Irradiation and Its Application to Thin-Film Transistor Fabrication,\u201d Proc.  Int. Symp. Dry Process (DPS2012), (Tokyo, Japan, Nov. 15-16, 2012),<\/em> pp. 113-114.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Hayashi, Y. Fujita, T. Kamikura, K. Sakaike, M. Akazawa, and S. Higashi, \u201cA Physical Model for Leading Wave Crystallization Induced by Micro-Thermal-Plasma-Jet Irradiation to Amorphous Silicon Films,\u201d Proc. Int. Symp. Dry Process (DPS2012), (Tokyo, Japan, Nov. 15-16, 2012)<\/em>, pp. 23-24.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Nakamura, K. Sakaike, Y. Kobayashi, S. Hayashi, and S. Higashi, \u201cTransfer of amorphous silicon films on mid-air structure to porous silicon and epitaxial growth induced by near-infrared semiconductor diode laser irradiation,\u201d Abs. 22nd<\/sup> Int. Photovoltaic Sci. Eng. Conf. (PVSEC), (Hangzhou, China, Nov. 5-9, 2012<\/em>), 2-O-26.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Y. Fujita, S. Hayashi, K. Sakaike, and S. Higashi, \u201cGrain Growth Control during Micro-Thermal-Plasma-Jet Irradiation Using AmorphousSi Strips and Slit Masks,\u201d Joint Int. Meeting 222nd<\/sup> Electrochem. Soc. (ECS) Meeting and 2012 Fall Meeting Electrochem. Soc. Jpn. (PRiME2012), (Honolulu, Hawaii, USA, Oct. 7-12, 2012), <\/em>#3059.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Sakaike, Y. Kobayashi, S. Nakamura, M. Akazawa, and S. Higashi, \u201cInvestigation of Transfer Mechanism of Si Film with Mid-Air Structure Induced by Near-Infrared Semiconductor Diode Laser Irradiation,\u201d Joint Int. Meeting 222nd<\/sup> Electrochem. Soc. (ECS) Meeting and 2012 Fall Meeting Electrochem. Soc. Jpn. (PRiME2012), (Honolulu, Hawaii, USA, Oct. 7-12, 2012), <\/em>#3064.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, M. Matsui, H. Murakami, S. Higashi, and S. Miyazaki, \u201cControl of Schottky Barrier Height at Al\/p-Ge Junctions by Ultrathin Layer Insertion,\u201d Joint Int. Meeting 222nd<\/sup> Electrochem. Soc. (ECS) Meeting and 2012 Fall Meeting Electrochem. Soc. Jpn. (PRiME2012), (Honolulu, Hawaii, USA, Oct. 7-12, 2012), <\/em>#3153.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Ono, A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki, \u201cCharacterization of As Implanted and Annealed Ge by Photoemission and Electrical Measurements,\u201d Ext. Abs<\/em>. 2012 Int. Conf. Solid State Dev. Mat. (SSDM2012), (Kyoto, Japan, Sept. 25-27, 2012), <\/em>pp. 38-39.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, S. K. Sahari, M. Ikeda, H. Murakami, S. Higashi, and S. Miyazaki, \u201cDry Oxidation of Germanium (100) and (111) Surfaces - Impact of Oxidation Temperature on Ge Oxide Growth -,\u201d Ext. Abs. 2012 Int. Conf. Solid State Dev. Mat. (SSDM2012), (Kyoto, Japan, Sept. 25-27, 2012), <\/em>pp. 743-744.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Hayashi, Y. Fujita, T. Kamikura, K. Sakaike, M. Ikeda, H. Hanafusa, and S. Higashi, \u201cLeading Wave Crystallization from Fast Moving Molten Zone Formed by Micro-Thermal-Plasma-Jet Irradiation to Amorphous Silicon Films,\u201d Ext. Abs. 2012 Int. Conf. Solid State Dev. Mat. (SSDM2012), (Kyoto, Japan, Sept. 25-27, 2012), <\/em>pp. 1047-1048.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki, \u201cXPS Study of Energy Band Alignment between Hf-La Oxides and Si(100),\u201d Abs. Int. Union of Mat. Res. Soc.-Int. Conf. Electronic Materials 2012 (IUMRS-ICEM2012), (Yokohama, Japan, Sept. 23-28, 2012)<\/em>, B-1-O27-011.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Murakami, Y. Ono, A. Ohta, S. Higashi, and S. Miyazaki, \u201cPhotoemission Study of GeO2\/Ge Structure Formed by Thermal Oxidation,\u201d Abs. Int. Union Mat. Res. Soc.-Int. Conf. Electronic Materials 2012 (IUMRS-ICEM2012), (Yokohama, Japan, Sept. 23-28, 2012),<\/em> B-1-O28-009.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Hayashi, R. Matsubara, Y. Fujita, M. Ikeda, K. Sakaike, and S. Higashi, \u201cControl of Crystal Growth Orientation by Micro-Thermal-Plasma-Jet Induced Melting and Solidification of Silicon Films on Porous Silicon Underlayer,\u201d Proc. AM-FPD12, (Kyoto, Japan, Jul. 4-6, 2012),<\/em> pp. 219-222.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
M. Akazawa, Y. Zhou, K. Sakaike, S. Hayashi, H. Hanafusa, and S. Higashi, \u201cCrystallization of Amorphous Silicon Films by High-Frequency Tapping of Molten Silicon Using PiezoActuator,\u201d Proc. AM-FPD12, (Kyoto, Japan, Jul. 4-6, 2012),<\/em> pp. 215-218.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Koyanagi, S. Hayashi, T. Mizuno, K. Sakaike, H. Hanafusa, and S. Higashi, \u201cImprovement of Low-Temperature-Deposited SiO2<\/sub> and Si\/SiO2<\/sub> interface Properties by Thermal-Plasma-Jet Annealing and Heat Treatment in High-Pressure H2<\/sub>O Vapor,\u201d Dig. 2012 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2012), (Naha, Japan, Jun. 27\u201329, 2012),<\/em> pp. 95-98.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, K. Makihara, M. Ikeda, H. Murakami, S. Higashi, and S. Miyazaki, \u201cEvaluation of Chemical Composition and Bonding Features of Pt\/SiOx<\/sub>\/Pt MIM Diodes and Its Impact on Resistance Switching Behavior,\u201d Dig. 2012 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2012), (Naha, Japan, Jun. 27\u201329, 2012), <\/em>pp. 186-191.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Hashimoto, A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki, \u201cControl of Interfacial Reaction of HfO2<\/sub>\/Ge Structure by Insertion of Ta Oxide Layer,\u201d Dig. 2012 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2012), (Naha, Japan, Jun. 27\u201329, 2012), <\/em>pp. 219-224.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited]<\/strong> S. Higashi, \u201cApplication of Atmospheric Pressure Micro-Thermal-Plasma-Jet to Ultra Rapid Thermal Annealing for Semiconductor Device Fabrication,\u201d Ext. Abs. 2012 Int. Workshop Junction Tech. (IWJT-2012), (Shanghai, China, May. 14-15, 2012)<\/em>, pp. 206-209.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Y. Kobayashi, K. Sakaike, M. Ikeda, and S. Higashi, \u201cActivation of Phosphorus Atoms in Amorphous Si Films and Simultaneous Layer Transfer Technique by Near-infrared Semiconductor Diode Laser Irradiation,\u201d Abs.<\/em> 2012 Mat. Res. Soc. Spring Meeting (San Francisco, USA, Apr. 9-13, 2012), <\/em>A6.9.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited]<\/strong> S. Higashi, \u201cRapid Thermal Annealing by Atmospheric Pressure Micro-thermal\u2013Plasma\u2013jet and Its Application to Thin FilmTransistor Fabrication \u2013Crystallization Doping, and Reliability Improvement,\u201d Abs.<\/em> 2012 Mat. Res. Soc. Spring Meeting (San Francisco, USA, Apr. 9-13, 2012), <\/em>A9.1.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u76e7\u3000\u7fa9\u654f\u3001\u9ad8\u3000\u91d1\u3001\u7267\u539f\u3000\u514b\u5178\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cNi \u30ca\u30ce\u30c9\u30c3\u30c8\u306b\u3088\u308b\u521d\u671f\u6838\u767a\u751f\u5236\u5fa1\u3092\u6d3b\u7528\u3057\u305f\u9ad8\u7d50\u6676\u6027Si:H\/Ge:H\u30d8\u30c6\u30ed\u69cb\u9020\u306e\u4f4e\u6e29\u5806\u7a4d\u201d\u3001 \u7b2c60\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a, 28a-A3-9\uff082013.3.27-30\u3001\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c0f\u6797\u3000\u7fa9\u5d07\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u4e2d\u6751\u3000\u5c06\u543e\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u8fd1\u8d64\u5916\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u5149\u7167\u5c04\u306b\u3088\u308bP\u30c9\u30fc\u30d7Si\u819c\u306e\u5c40\u6240\u8ee2\u5199\u3068\u4e0d\u7d14\u7269\u6d3b\u6027\u5316\u201d\u3001\u7b2c60\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300028a-G6-8\uff082013.3.27-30\u3001\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c0f\u91ce\u3000\u8cb4\u5bdb\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cAs+\u30a4\u30aa\u30f3\u6ce8\u5165\u3057\u305f\u30b2\u30eb\u30de\u30cb\u30a6\u30e0\u5c64\u306e\u5316\u5b66\u5206\u6790 -\u30a4\u30aa\u30f3\u6ce8\u5165\u6e29\u5ea6\u4f9d\u5b58\u6027- \u201d\u3001\u7b2c60\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300028p-G6-8\u3000\uff082013.3.27-30\u3001\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e0a\u5009\u3000\u656c\u5f18\u3001\u6797\u3000\u5c06\u5e73\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308ba-Ge\u819c\u306eLeading Wave Crystallization\u201d\u3001\u7b2c60\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300028p-G6-11\uff082013.3.27-30\u3001\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u6797\u3000\u5c06\u5e73\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u5c71\u672c\u3000\u5c06\u609f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u9ad8\u901f\u6a2a\u65b9\u5411\u7d50\u6676\u5316\u306b\u304a\u3051\u308ba-Si\u7d30\u7dda\u53ca\u3073\u30b9\u30ea\u30c3\u30c8\u30de\u30b9\u30af\u3092\u7528\u3044\u305f\u7d50\u6676\u4f4d\u7f6e\u5236\u5fa1\u201d\u3001\u7b2c60\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300028p-G6-12\uff082013.3.27-30\u3001\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c71\u672c\u3000\u5c06\u609f\u3001\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u6797\u3000\u5c06\u5e73\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u5e45\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u7d30\u7dda\u3092\u7528\u3044\u305f\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u9ad8\u901f\u6a2a\u65b9\u5411\u7d50\u6676\u5316\u306b\u304a\u3051\u308b\u7d50\u6676\u6210\u9577\u5236\u5fa1 \u201d\u3001\u7b2c60\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300028p-G6-13\u3000\uff082013.3.27-30\u3001\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6797\u3000\u5c06\u5e73\u3001\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308ba-Si\u819c\u306e\u8d85\u9ad8\u901f\u7d50\u6676\u6210\u9577\u201d\u3001\u7b2c60\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300029p-B8-7\u3000\uff082013.3.27-30\u3001\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u6797\u3000\u5c06\u5e73\u3001\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201ca-Si\u7d30\u7dda\u3092\u7528\u3044\u305f\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u6210\u9577\u5236\u5fa1\u306b\u3088\u308bTFT\u7279\u6027\u3070\u3089\u3064\u304d\u306e\u6539\u5584\u304a\u3088\u30735V\u96fb\u6e90\u96fb\u5727\u3067\u306eCMOS\u56de\u8def\u52d5\u4f5c \u201d\u3001\u7b2c60\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c628p-G6-14\uff082013.3.27-30\u3001\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[\u6ce8\u76ee\u8b1b\u6f14] <\/strong>\u9152\u6c60\u3000\u8015\u5e73\u3001\u5c0f\u6797\u3000\u7fa9\u5d07\u3001\u4e2d\u6751\u3000\u5c06\u543e\u3001\u6797\u3000\u5c06\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u68ee\u5d0e\u3000\u8aa0\u53f8\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u8fd1\u8d64\u5916\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u5149\u7167\u5c04\u306b\u3088\u308b\u4e2d\u7a7a\u69cb\u9020a-Si\u819c\u306e\u5c40\u6240\u8ee2\u5199\u540c\u6642\u7d50\u6676\u5316\u201d\u3001\u7b2c60\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300029a-A3-5\u3000\uff082013.3.27-30\u3001\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82a6\u539f\u3000\u9f8d\u5e73\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6797\u3000\u5c06\u5e73\u3001\u5c0f\u67f3\u3000\u4fca\u8cb4\u3001\u4e38\u5c71\u3000\u4f73\u7950\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308bSiC\u30a6\u30a7\u30cf\u4e2d\u4e0d\u7d14\u7269\u306e\u77ed\u6642\u9593\u6d3b\u6027\u5316\u201d\u3001\u7b2c60\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300029p-PB4-11\u3000\uff082013.3.27-30\u3001\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f\u3000\u5b8f\u660e\u3001\u82a6\u539f\u3000\u9f8d\u5e73\u3001\u4e38\u5c71\u3000\u4f73\u7950\u3001\u6c34\u91ce\u3000\u7ffc\u3001\u6797\u3000\u5c06\u5e73\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201cP\u6dfb\u52a0\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9Si\u7d50\u6676\u5316\u5c64\u3092\u4ecb\u3057\u305f\u91d1\u5c5e\u3068SiC\u306e\u30b3\u30f3\u30bf\u30af\u30c8\u7279\u6027 \u201d\u3001\u7b2c60\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300029p-PB4-18\u3000\uff082013.3.27-30\u3001\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c0f\u67f3\u3000\u4fca\u8cb4\u3001\u6797\u3000\u5c06\u5e73\u3001\u6c34\u91ce\u3000\u7ffc\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u4f4e\u6e29\u5806\u7a4dSiNx\/SiO2\u4e8c\u5c64\u819c\u306b\u3088\u308b\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u8868\u9762\u30d1\u30c3\u30b7\u30d9\u30fc\u30b7\u30e7\u30f3\u201d\u3001\u7b2c60\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u6625\u5b63\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300029a-A4-7\u3000\uff082013.3.27-30\u3001\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6751\u4e0a\u3000\u79c0\u6a39\u3001 \u82a6\u539f\u3000\u9f8d\u5e73\u3001\u4e38\u5c71\u3000\u4f73\u7950\u3001 \u82b1\u623f\u3000\u5b8f\u660e\u3001 \u5bae\u5d0e\u3000\u8aa0\u4e00\u3001 \u6771\u6e05\u4e00\u90ce\u3001\u201c\u4e0d\u7d14\u7269\u30a4\u30aa\u30f3\u6ce8\u5165 SiC \u57fa\u677f\u306e\u9ad8\u52b9\u7387\u6d3b\u6027\u5316\u3068\u5316\u5b66\u7d50\u5408\u72b6\u614b\u8a55\u4fa1\u201d\u3001\u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u7814\u7a76\u4f1a\u3000\u7b2c18\u56de\u7814\u7a76\u4f1a\u3000\u6750\u6599\u30fb\u30d7\u30ed\u30bb\u30b9\u30fb\u8a55\u4fa1\u306e\u7269\u7406\u3001pp. 119 \u2013 122.\u3000\uff082013.1.25-1.26\u3001\u30cb\u30e5\u30fc\u30a6\u30a7\u30eb\u30b7\u30c6\u30a3\u30fc\u6e6f\u6cb3\u539f\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c0f\u91ce\u3000\u8cb4\u5bdb\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cX\u7dda\u5149\u96fb\u5b50\u5206\u5149\u306b\u3088\u308bAs+\u30a4\u30aa\u30f3\u6ce8\u5165\u3057\u305fGe\u306e\u5316\u5b66\u7d50\u5408\u72b6\u614b\u5206\u6790\u201d\u3001\u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u7814\u7a76\u4f1a\u3000\u7b2c18\u56de\u7814\u7a76\u4f1a\u3000\u6750\u6599\u30fb\u30d7\u30ed\u30bb\u30b9\u30fb\u8a55\u4fa1\u306e\u7269\u7406\u3001pp. 171 \u2013 174.\u3000 \uff082013.1.25-1.26\u3001\u30cb\u30e5\u30fc\u30a6\u30a7\u30eb\u30b7\u30c6\u30a3\u30fc\u6e6f\u6cb3\u539f\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5927\u7530\u3000\u6643\u751f\u3001\u7267\u539f\u3000\u514b\u5178\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u30b9\u30d1\u30c3\u30bf\u5f62\u6210\u3057\u305fPt\/SiOx<\/sub>\/Pt\u69cb\u9020\u306e\u5149\u96fb\u5b50\u5206\u5149\u5206\u6790\u201d\u3001\u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u7814\u7a76\u4f1a\u3000\u7b2c18\u56de\u7814\u7a76\u4f1a\u3000\u6750\u6599\u30fb\u30d7\u30ed\u30bb\u30b9\u30fb\u8a55\u4fa1\u306e\u7269\u7406\u3001pp. 229 \u2013 232.\u3000 \uff082013.1.25-1.26\u3001\u30cb\u30e5\u30fc\u30a6\u30a7\u30eb\u30b7\u30c6\u30a3\u30fc\u6e6f\u6cb3\u539f\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u7530\u4e2d\u3000\u656c\u4ecb\u3001\u6797\u3000\u5c06\u5e73\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u30ac\u30e9\u30b9\u57fa\u677f\u4e0aa-Si\u819c\u306e\u7d50\u6676\u5316\u306b\u304a\u3051\u308b\u6b8b\u7559\u5fdc\u529b\u3068\u30af\u30e9\u30c3\u30af\u767a\u751f\u306e\u8abf\u67fb\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c9\u56de\u7814\u7a76\u96c6\u4f1a\u30012P01(pp. 66-68)\uff082012.11.2-11.3\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9152\u6c60\u3000\u8015\u5e73\u3001\u5c0f\u6797\u3000\u7fa9\u5d07\u3001\u4e2d\u6751\u3000\u5c06\u543e\u3001\u6797\u3000\u5c06\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u8fd1\u8d64\u5916\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u5149\u7167\u5c04\u306b\u3088\u308bSi \u819c\u306e\u8ee2\u5199\u30e1\u30ab\u30cb\u30ba\u30e0\u306e\u89e3\u660e\u3068\u8ee2\u5199Si \u819c\u306e\u96fb\u6c17\u7279\u6027\u304a\u3088\u3073\u6b20\u9665\u5bc6\u5ea6\u8a55\u4fa1\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c9\u56de\u7814\u7a76\u96c6\u4f1a\u30012P07(pp. 77-80)\uff082012.11.2-11.3\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u6751\u3000\u5c06\u543e\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u5c0f\u6797\u3000\u7fa9\u5d07\u3001\u6797\u3000\u5c06\u5e73\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u8fd1\u8d64\u5916\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u5149\u7167\u5c04\u306b\u3088\u308b\u30dd\u30fc\u30e9\u30b9\u30b7\u30ea\u30b3\u30f3\u4e0a\u3078\u306eSi\u819c\u306e\u8ee2\u5199\u53ca\u3073\u9762\u65b9\u4f4d\u5236\u5fa1\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c9\u56de\u7814\u7a76\u96c6\u4f1a\u30012P09(pp. 81-83)\uff082012.11.2-11.3\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e0a\u5009\u3000\u656c\u5f18\u3001\u6797\u3000\u5c06\u5e73\u3001\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305fa-Ge\u819c\u7d50\u6676\u5316\u306b\u304a\u3051\u308b\u7d50\u6676\u6210\u9577\u89b3\u5bdf\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c9\u56de\u7814\u7a76\u96c6\u4f1a\u30012P11(pp. 84-86)\uff082012.11.2-11.3\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6c34\u91ce\u3000\u7ffc\u3001\u6797\u3000\u5c06\u5e73\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u5c0f\u67f3\u3000\u4fca\u8cb4\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u5c0f\u6797\u3000\u7fa9\u5d07\u3001 \u85e4\u7530\u3000\u60a0\u4e8c\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u8a98\u5c0e\u7d50\u5408\u578b\u30d7\u30e9\u30ba\u30de\u5316\u5b66\u6c17\u76f8\u5806\u7a4d\u6cd5\u3092\u7528\u3044\u305f\u9ad8\u54c1\u8ceaa-Si:H\u30d1\u30c3\u30b7\u30d9\u30fc\u30b7\u30e7\u30f3\u819c\u306e\u5f62\u6210\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c9\u56de\u7814\u7a76\u96c6\u4f1a\u30012P19(pp. 97-99)\uff082012.11.2-11.3\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6797\u3000\u5c06\u5e73\u3001\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u7d50\u6676\u5316 \u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308ba-Si\u819c\u7d50\u6676\u5316\u30e1\u30ab\u30cb\u30ba\u30e0\u306e\u89e3\u660e\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c9\u56de\u7814\u7a76\u96c6\u4f1a\u30013O04(pp. 154-157)\uff082012.11.2-11.3\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u5468\u3000\u8881\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u6797\u3000\u5c06\u5e73\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30ad\u30e3\u30ea\u30a2\u30ac\u30b9\u642c\u9001Si\u30d1\u30a6\u30c0\u30fc\u3078\u306e\u30ec\u30fc\u30b6\u7167\u5c04\u306b\u3088\u308b\u7d50\u6676Si\u306e\u5f62\u6210\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c9\u56de\u7814\u7a76\u96c6\u4f1a\u30013P02(pp. 161-163)\uff082012.11.2-11.3\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u6797\u3000\u5c06\u5e73\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771 \u6e05\u4e00\u90ce\u3001\u201c\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u7d30\u7dda\u53ca\u3073\u30b9\u30ea\u30c3\u30c8\u30de\u30b9\u30af\u3092\u7528\u3044\u305f\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u306b\u304a\u3051\u308b\u7d50\u6676\u6210\u9577\u5236\u5fa1\u53ca\u3073TFT\u5fdc\u7528\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c9\u56de\u7814\u7a76\u96c6\u4f1a\u30013P06(pp. 168-171)\uff082012.11.2-11.3\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c0f\u6797\u3000\u7fa9\u5d07\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u4e2d\u6751\u3000\u5c06\u543e\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u8fd1\u8d64\u5916\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u5149\u7167\u5c04\u306b\u3088\u308bP \u30c9\u30fc\u30d7 a-Si \u819c\u306e\u8ee2\u5199\u3068\u540c\u6642\u6d3b\u6027\u5316\u6280\u8853\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c9\u56de\u7814\u7a76\u96c6\u4f1a\u30013P08(pp. 172-175)\uff082012.11.2-11.3\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82a6\u539f\u3000\u9f8d\u5e73\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308bSiC\u30a6\u30a7\u30cf\u306e\u6025\u901f\u71b1\u51e6\u7406\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c9\u56de\u7814\u7a76\u96c6\u4f1a\u30013P10(pp. 176-177)\uff082012.11.2-11.3\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c0f\u67f3\u3000\u4fca\u8cb4\u3001\u6797\u3000\u5c06\u5e73\u3001\u6c34\u91ce\u3000\u7ffc\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u53ca\u3073\u9ad8\u5727\u6c34\u84b8\u6c17\u71b1\u51e6\u7406\u306b\u3088\u308b\u4f4e\u6e29\u5806\u7a4dSiO2\/Si\u754c\u9762\u306e\u6539\u8cea\u53ca\u3073\u5c11\u6570\u30ad\u30e3\u30ea\u30a2\u30e9\u30a4\u30d5\u30bf\u30a4\u30e0\u306e\u5411\u4e0a\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c9\u56de\u7814\u7a76\u96c6\u4f1a\u30013P20(pp. 190-193)\uff082012.11.2-11.3\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u6751\u3000\u5c06\u543e\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u5c0f\u6797\u3000\u7fa9\u5d07\u3001\u6797\u3000\u5c06\u5e73\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u8fd1\u8d64\u5916\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u5149\u7167\u5c04\u306b\u3088\u308b\u30dd\u30fc\u30e9\u30b9\u30b7\u30ea\u30b3\u30f3\u4e0a\u3078\u306ea-Si\u819c\u306e\u8ee2\u5199\u3068\u7d50\u6676\u6210\u9577\u5236\u5fa1(II)\u201d\u3001\u7b2c73\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c614a-F6-11\uff082012.9.11-14\u3001\u611b\u5a9b\u5927\u5b66\u30fb\u677e\u5c71\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6a4b\u672c\u3000\u90a6\u660e\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cTaOx\/p-Ge(100)\u754c\u9762\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u30d0\u30f3\u30c9\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u8a55\u4fa1\u3068Al\u96fb\u6975\u30b7\u30e7\u30c3\u30c8\u30ad\u30fc\u30c0\u30a4\u30aa\u30fc\u30c9\u306e\u4f1d\u5c0e\u5236\u5fa1\u201d\u3001\u7b2c73\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300013a-F5-8\uff082012.9.11-14\u3001\u611b\u5a9b\u5927\u5b66\u30fb\u677e\u5c71\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c0f\u91ce\u3000\u8cb4\u5bdb\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cAs+\u30a4\u30aa\u30f3\u6ce8\u5165\u3057\u305fGe(100)\u306e\u5149\u96fb\u5b50\u5206\u5149\u5206\u6790\u201d\u3001\u7b2c73\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300011p-F5-14\uff082012.9.11-14\u3001\u611b\u5a9b\u5927\u5b66\u30fb\u677e\u5c71\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u82a6\u539f\u3000\u9f8d\u5e73\u3001\u96e8\u5bae\u3000\u5609\u7167\u3001\u7530\u90e8\u4e95\u3000\u54f2\u592b\u3001\u6a2a\u5c71\u3000\u65b0\u3001\u5409\u5ddd\u3000\u516c\u9ebf\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201cAs+\u30a4\u30aa\u30f3\u6ce8\u5165\u3057\u305f4H-SiC\u57fa\u677f\u306e\u5316\u5b66\u7d50\u5408\u72b6\u614b\u8a55\u4fa1\u201d\u3001\u7b2c73\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300011p-PB2-15\uff082012.9.11-14\u3001\u611b\u5a9b\u5927\u5b66\u30fb\u677e\u5c71\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6c34\u91ce\u3000\u7ffc\u3001\u6797\u3000\u5c06\u5e73\u3001\u5c0f\u67f3\u3000\u4fca\u8cb4\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u5c0f\u6797\u3000\u7fa9\u5d07\u3001\u85e4\u7530\u3000\u60a0\u4e8c \u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u8a98\u5c0e\u7d50\u5408\u578b\u30d7\u30e9\u30ba\u30de\u5316\u5b66\u6c17\u76f8\u5806\u7a4d\u6cd5\u3092\u7528\u3044\u305fa-Si:H\u819c\u306b\u3088\u308b\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u8868\u9762\u30d1\u30c3\u30b7\u30d9\u30fc\u30b7\u30e7\u30f3\u201d\u3001\u7b2c73\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300012a-F6-6\uff082012.9.11-14\u3001\u611b\u5a9b\u5927\u5b66\u30fb\u677e\u5c71\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u5468\u3000\u3000\u8881\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u6797\u3000\u5c06\u5e73\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30ad\u30e3\u30ea\u30a2\u30ac\u30b9\u642c\u9001\u30b7\u30ea\u30b3\u30f3\u30d1\u30a6\u30c0\u30fc\u3078\u306e\u30ec\u30fc\u30b6\u7167\u5c04\u306b\u3088\u308b\u7d50\u6676Si\u306e\u5f62\u6210\u201d\u3001\u7b2c73\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300012a-F5-4\uff082012.9.11-14\u3001\u611b\u5a9b\u5927\u5b66\u30fb\u677e\u5c71\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9ad8\u3000\u3000\u91d1\u3001\u7267\u539f\u3000\u514b\u5178\u3001\u9ad8\u898b\u3000\u5f18\u8cb4\u3001\u7af9\u5185\u3000\u5927\u667a\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u6797\u3000\u5c06\u5e73\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u5c0e\u96fb\u6027AFM\u77ed\u91dd\u306b\u3088\u308bNi\u30ca\u30ce\u30c9\u30c3\u30c8\u4e0a\u306b\u5f62\u6210\u3057\u305f\u9ad8\u7d50\u6676\u6027Ge:H\u8584\u819c\u3082\u5c40\u6240\u4f1d\u5c0e\u8a55\u4fa1\u201d\u3001\u7b2c73\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300012a-F7-8\uff082012.9.11-14\u3001\u611b\u5a9b\u5927\u5b66\u30fb\u677e\u5c71\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9152\u6c60\u3000\u8015\u5e73\u3001\u5c0f\u6797\u3000\u7fa9\u5d07\u3001\u4e2d\u6751\u3000\u5c06\u543e\u3001\u6797\u3000\u5c06\u5e73\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u8fd1\u8d64\u5916\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u5149\u7167\u5c04\u306b\u3088\u308b\u8ee2\u5199 Si \u819c\u306e\u96fb\u6c17\u7279\u6027\u53ca\u3073\u6b20\u9665\u5bc6\u5ea6\u8a55\u4fa1\u201d\u3001\u7b2c73\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300014a-F6-10\uff082012.9.11-14\u3001\u611b\u5a9b\u5927\u5b66\u30fb\u677e\u5c71\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u7530\u4e2d\u3000\u656c\u4ecb\u3001\u6797\u3000\u5c06\u5e73\u3001\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30ac\u30e9\u30b9\u57fa\u677f\u4e0aa-Si\u819c\u306e\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u306b\u304a\u3051\u308b\u30af\u30e9\u30c3\u30af\u767a\u751f\u3068\u6b8b\u7559\u5fdc\u529b\u201d\u3001\u7b2c73\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300012a-F5-5\uff082012.9.11-14\u3001\u611b\u5a9b\u5927\u5b66\u30fb\u677e\u5c71\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u6797\u3000\u5c06\u5e73\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u9ad8\u901f\u6a2a\u65b9\u5411\u7d50\u6676\u5316\u306b\u304a\u3051\u308b\u30b9\u30ea\u30c3\u30c8\u30de\u30b9\u30af\u3092\u7528\u3044\u305fSi\u7d50\u6676\u6210\u9577\u5236\u5fa1\u201d\u3001\u7b2c73\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300012a-F5-6\u3000\uff082012.9.11-14\u3001\u611b\u5a9b\u5927\u5b66\u30fb\u677e\u5c71\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6797\u3000\u5c06\u5e73\u3001\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u82b1\u623f\u3000\u5b8f\u660e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308ba-Si\u819c\u306eLeading Wave Crystallization\u201d\u3001\u7b2c73\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300012a-F5-7\uff082012.9.11-14\u3001\u611b\u5a9b\u5927\u5b66\u30fb\u677e\u5c71\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e0a\u5009\u3000\u656c\u5f18\u3001\u6797\u3000\u5c06\u5e73\u3001\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308ba-Ge\u819c\u7d50\u6676\u5316\u904e\u7a0b\u306e\u76f4\u63a5\u89b3\u5bdf\u201d\u3001\u7b2c73\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300012a-F5-8\u3000\uff082012.9.11-14\u3001\u611b\u5a9b\u5927\u5b66\u30fb\u677e\u5c71\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82b1\u623f\u3000\u5b8f\u660e\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u5c0f\u6797\u3000\u7fa9\u5d07\u3001\u4e2d\u6751\u3000\u5c06\u543e\u3001\u6797\u3000\u5c06\u5e73\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9Si\u5c64\u3092\u4ecb\u3057\u305f\u91d1\u5c5e\u3068Ge\u306e\u30b3\u30f3\u30bf\u30af\u30c8\u7279\u6027\u201d\u3001\u3000\u7b2c73\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300013a-F5-11\uff082012.9.11-14\u3001\u611b\u5a9b\u5927\u5b66\u30fb\u677e\u5c71\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5927\u7530\u3000\u6643\u751f\u3001Siti Kudnie Sahari\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u30b2\u30eb\u30de\u30cb\u30a6\u30e0\u30c9\u30e9\u30a4\u9178\u5316\u306b\u304a\u3051\u308b\u57fa\u677f\u9762\u65b9\u4f4d\u4f9d\u5b58\u6027\u201d\u3001\u7b2c73\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300011a-F8-4\uff082012.9.11-14\u3001\u611b\u5a9b\u5927\u5b66\u30fb\u677e\u5c71\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6a4b\u672c\u3000\u90a6\u660e\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cHfO2\/Ge\u754c\u9762\u3078\u306eTaOx\u5c64\u633f\u5165\u306b\u3088\u308b\u754c\u9762\u53cd\u5fdc\u5236\u5fa1\u3068\u7269\u6027\u8a55\u4fa1\u201d\u30012012\u5e74\u5ea6\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u3000\u5b66\u8853\u8b1b\u6f14\u4f1a\uff08Dp-9\uff09\uff082012.7.28\u3001\u5c71\u53e3\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\uff3b\u62db\u5f85\u8b1b\u6f14\uff3d\u6771\u3000\u6e05\u4e00\u90ce,\u3000\u300c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u6025\u901f\u71b1\u51e6\u7406\u6280\u8853\u3068\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u30d7\u30ed\u30bb\u30b9\u5fdc\u7528\u300d\u5e73\u621024\u5e74\u5ea6\u3000\u7b2c1\u56de\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u4e8b\u696d\u5316\u30d5\u30a9\u30fc\u30e9\u30e0\uff082012\u5e747\u67087\u65e5\uff09<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5927\u7530\u3000\u6643\u751f\u3001\u677e\u4e95\u3000\u771f\u53f2\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u8aa0\u4e00\u3001\u201c\u6975\u8584\u5c64\u633f\u5165\u306b\u3088\u308bAl\/Ge\u63a5\u5408\u306e\u4f1d\u5c0e\u7279\u6027\u5236\u5fa1\u201d\u3001\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a\u3001112\uff0892\uff09pp. 53-58. (2012.6.21\u3001\u540d\u53e4\u5c4b\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c0f\u91ce\u3000\u8cb4\u5bdb\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001 \u5bae\u5d0e\u8aa0\u4e00\u3001 \u201cAs+\u30a4\u30aa\u30f3\u6ce8\u5165\u3057\u305f\u30b2\u30eb\u30de\u30cb\u30a6\u30e0\u5c64\u306e\u5316\u5b66\u5206\u6790\u201d\u3001\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a\u3001112\uff0892\uff09pp. 63-67\u3000(2012.6.21\u3001\u540d\u53e4\u5c4b\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u4e09\u5d8b\u3000\u5065\u6597\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u6a4b\u672c\u3000\u90a6\u660e\u3001 \u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u8aa0\u4e00\u3001\u201cTaOx\u5c64\u633f\u5165\u306b\u3088\u308bHfO2\/Ge\u754c\u9762\u53cd\u5fdc\u5236\u5fa1\u201d \u3001112\uff0892\uff09pp. 33-36\u3000(2012.6.21\u3001\u540d\u53e4\u5c4b\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6797\u3000\u5c06\u5e73\u3001\u677e\u539f\u3000\u826f\u5e73\u3001\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u30dd\u30fc\u30e9\u30b9\u30b7\u30ea\u30b3\u30f3\u5c64\u4e0aSi\u819c\u306e\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u201d\u3001\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a\u30fb\u30b7\u30ea\u30b3\u30f3\u6750\u6599\u30fb\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\uff3bSDM] \uff14\u6708\u5ea6\u7814\u7a76\u4f1a\u3001 Vol.112  No.18  pp. 63-66\u3000\uff082012.04 .27-04.28\u3001\u6c96\u7e04\u770c\u9752\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u306b\u304a\u3051\u308b\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u7d30\u7dda\u53ca\u3073\u30b9\u30ea\u30c3\u30c8\u30de\u30b9\u30af\u3092\u7528\u3044\u305f\u7d50\u6676\u6210\u9577\u5236\u5fa1\u201d\u3001 \u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a\u30fb \u30b7\u30ea\u30b3\u30f3\u6750\u6599\u30fb\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\uff3bSDM] \uff14\u6708\u5ea6\u7814\u7a76\u4f1a\u3001  Vol.112  No.18  pp.67-70.\uff082012.04 .27-04.28\u3001\u6c96\u7e04\u770c\u9752\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2011\u5e74\u5ea6<\/p>\n\n\n\n

A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki, \u201cEvaluation of Chemical Structure and Resistance Switching Behaviors of Pt\/RF-Sputtered Si Oxide\/Pt Diodes,\u201d 5th<\/sup> Int. Conf. Plasma-Nano Technol. Sci. (IC-PLANTS2012), (Aichi, Japan, Mar. 9-10, 2012),<\/em> P-66.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
R. Ashihara, T. Okada, M. Ikeda, S. Hayashi, and S. Higashi, \u201cIn-Situ Measurement of Temperature Variation in SiC Wafer during Millisecond Rapid Thermal Annealing Induced by Thermal Jet Irradiation,\u201d 5th<\/sup> Int. Conf.  Plasma-Nano Technol. Sci. (IC-PLANTS2012), (Aichi, Japan, Mar. 9-10, 2012)<\/em>, P-33. <\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
M. Akazawa, Y. Zhou, K. Sakaike, and S. Higashi, \u201cCrystallization of Amorphous Silicon films by molten Silicon contacting method using piezo actuator,\u201d Proc<\/em>. 8th<\/sup> Int. TFT Conf. (Lisbon, Portugal, Jan. 30-31, 2012),<\/em> p. 94.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Sakaike, Y. Kobayashi, R. Matsubara, M. Ikeda, and S. Higashi, \u201cIn-situ observation of phase transformation of amorphous Si films and simultaneous transfer induced by near-infrared semiconductor diode laser irradiation,\u201d Proc.<\/em> 8th<\/sup> Int. TFT Conf. (Lisbon, Portugal, Jan. 30-31, 2012), <\/em>p. 96.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Sakaike, Y. Kobayashi, M. Akazawa and S. Higashi, \u201cCRYSTALLIZATION OF AMORPHOUS SI FILMS AND SIMULTANEOUS TRANSFER TECHNIQUE INDUCED BY NEAR-INFRARED SEMICONDUCTOR DIODE LASER IRRADIATION,\u201d Abs. 21st<\/sup> Int. Photovoltaic Sci. Eng. Conf. (PVSEC-21), (Fukuoka, Japan, Nov. 28- Dec. 2. 2011)<\/em>, 3D-2P-10.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
R. Ashihara, T. Okada, Y. Nishida, and S. Higashi, \u201cDevelopment of Noncontact Measurement of SiC Wafer Temperature during Millisecond Rapid Annealing Induced by Atmospheric Pressure Thermal Plasma Jet Irradiation,\u201d Proc. Int. Symp. Dry Process (DPS2011), (Kyoto, Japan, Nov. 10-11, 2011),<\/em> pp. 157-158.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki, \u201cDetermination of Energy Band Alignment in Ultrathin Hf-based Oxide\/Pt System,\u201d Abs<\/em>. 15th<\/sup> Int. Conf. Thin Film (ICTF-15), (Kyoto, Japan, Nov. 8-11, 2011)<\/em>, P-S2-05.  <\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. K. Sahari, A. Ohta, M. Matsui, K. Mishima, H. Murakami, S. Higashi, and S. Miyazaki, \u201cKinetics of Thermally Oxidation of Ge(100) Surface,\u201d Abs<\/em>. 15th<\/sup> Int. Conf. Thin Film (ICTF-15), (Kyoto, Japan, Nov. 8-11, 2011)<\/em>, P-S2-22.\u3000<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Mishima, H. Murakami, A. Ohta, S. K. Sahari, T. Fujioka, S. Higashi, and S. Miyazaki, \u201cCharacterization of Ultrathin Ta-Oxide Films Formed on Ge(100) by ALD and Layer-by-Layer Method,\u201d 15th<\/sup> Int. Conf. Thin Film (ICTF-15), (Kyoto, Japan, Nov. 8-11, 2011), <\/em>P-S2-24.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, M. Ikeda, A. Ohta, R. Ashihara, S. Higashi, and S. Miyazaki, \u201cFormation of PtAl Nanodots Induced by RemoteHydrogen Plasma,\u201d Abs<\/em>. 15th<\/sup> Int. Conf. Thin Film (ICTF-15), (Kyoto, Japan, Nov. 8-11, 2011),<\/em> P-S2-27.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, Y. Goto, S. Nishigaki, H. Murakami, S. Higashi, and S. Miyazaki, \u201cImpact of Oxide Thinning on Resistance Switching Behavior of RF Sputtered SiOx<\/sub> Dielectric Sandwiching with Pt Electrodes,\u201d 24th<\/sup> Int. Microprocesses Nanotechnol. Conf. (MNC2011), (Kyoto, Japan, Oct. 24-27, 2011),<\/em> 27P-11-147L.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. K. Sahari, A. Ohta, M. Matsui, H. Murakami, S. Higashi, and S. Miyazaki, \u201cEvaluation of Thermal ly-Grown Ge Oxide on Ge(100) and Ge(111) surfaces,\u201d Ext. Abs. 2011 Int. Conf. Solid State Dev.Mat. (SSDM2011), (Nagoya, Japan, Sept. 28-30, 2011), <\/em>pp. 14-15.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Y. Fujita, S. Hayashi, H. Murakami, and S. Higashi, \u201cHigh Speed Lateral Crystallization of Amorphous Silicon Films on Glass,\u201d Ext. Abs.<\/em> 2011 Int.Conf.  Solid State Dev. Mat. (SSDM2011), (Nagoya, Japan, Sep. 28-30, 2011), <\/em>pp. 1424-1425.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
R. Matsubara, S. Hayashi, and S. Higashi, \u201cCrystallization of Amorphous Silicon Films on Porous Silicon by Micro-Thermal-Plasma-Jet Irradiation,\u201d Abs. 24th<\/sup> Int. Conf. Amorphous Nanocrystalline Semiconductors (ICANS24), (Nara, Japan, Aug. 21-26, 2011), <\/em>P. 120.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, Y. Goto, S. Nishigaki, G. Wei, H. Murakami, S. Higashi, and S. Miyazaki, \u201cCharacterization of Resistance-Switching of Si Oxide Dielectrics Prepared by RF Sputtering,\u201d 2011 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2011), (Daejeon, Korea, Jun. 29- Jul.1, 2011), <\/em>pp. 41-46.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Y. Fujita, S. Hayashi, H. Murakami, and S. Higashi, \u201cFabrication of High Performance Crystalline Silicon TFTs on Glass Using Micro-Thermal-Plasma-Jet,\u201d Proc. AM-FPD11, (Tokyo, Japan, Jul. 11-13, 2011)<\/em>, pp. 239-242.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
G. Wei, H. Murakami, T. Fujioka, A. Ohta, Y. Goto, S. Higashi, and S. Miyazaki, \u201cImpact of insertion of ultrathin TaOx<\/sub> layer at the Pt\/TiO2<\/sub> interface on resistive switching characteristics,\u201d 17th<\/sup> Conf. Insulating Films Semiconductors (Infos2011), (Grenoble, France, Jun. 21-24, 2011)<\/em>, P. 46.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
M. Matsui, H. Murakami, T. Fujioka, A. Ohta, S. Higashi, and S. Miyazaki, \u201cCharacterization of chemical bonding features at metal\/GeO2<\/sub> interfaces by X-ray photoelectron spectroscopy,\u201d 17th<\/sup> Conf. Insulating Films Semiconductors (Infos2011), (Grenoble, France, Jun. 21-24, 2011).<\/em><\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
G. Wei, H. Murakami, T. Fujioka, A. Ohta, Y. Goto, S. Higashi, and S. Miyazaki, \u201cEffects of Inserting an Ultrathin TaOx<\/sub> Layer to the Pt\/TiO2<\/sub> Interface on Resistive Switching Characteristic,\u201d 2011 Int. Meeting Future Electron Dev. Kansai (IMFEDK2011), (Kansai, May. 19-20, 2011), <\/em>pp. 110-111.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
M. Akazawa, K. Makihara, T. Matsumoto, and S. Higashi, \u201cDevelopment of Silicon Microliquid Processing Using Piezo Actuator,\u201d Abs. 2011 Mat. Res. Soc. Spring Meeting (San Francisco, USA, Apr. 25-29, 2011)<\/em>, A13.2.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Higashi, S. Hayashi, Y. Nishida, and R. Matsubara, \u201cFabrication of High Performance TFTs by Atmospheric Pressure Micro-thermal-plasma-jet Induced Lateral Crystallization Technique,\u201d Abs. 2011 Mat. Res. Soc. Spring Meeting (San Francisco, USA, Apr. 25-29, 2011), <\/em>A22.2.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5927\u7530\u3000\u6643\u751f\u3001 Siti Kudnie Sahari\u3001 \u6c60\u7530\u3000\u5f25\u592e\u3001 \u6751\u4e0a\u3000\u79c0\u6a39\u3001 \u6771\u3000\u6e05\u4e00\u90ce\u3001 \u5bae\u5d0e\u8aa0\u4e00\u3001 \u201c\u30b2\u30eb\u30de\u30cb\u30a6\u30e0\u30c9\u30e9\u30a4\u9178\u5316\u306b\u304a\u3051\u308b\u6e29\u5ea6\u4f9d\u5b58\u6027\u201d\u3001 \u7b2c59\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300016a-A5-4, 13-029 (2012.3.15-18\u3000\u65e9\u7a32\u7530\u5927\u5b66 \u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5927\u7530\u3000\u6643\u751f\u3001 \u7267\u539f\u3000\u514b\u5178\u3001 \u6c60\u7530\u3000\u5f25\u592e\u3001 \u6751\u4e0a\u3000\u79c0\u6a39\u3001 \u6771\u3000\u6e05\u4e00\u90ce\u3001 \u5bae\u5d0e\u3000\u8aa0\u4e00\u3001 \u201cPt\/SiOx<\/sub>\/Pt \u69cb\u9020\u306b\u304a\u3051\u308b\u62b5\u6297\u5909\u5316\u7279\u6027\u201d\u3001\u7b2c59\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300016p-F6-10, 06-151 (2012.3.15-18\u3000\u65e9\u7a32\u7530\u5927\u5b66 \u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u4e95\u3000\u771f\u53f2\u3001 \u5927\u7530\u3000\u6643\u751f\u3001 \u6751\u4e0a\u3000\u79c0\u6a39\u3001 \u5c0f\u91ce\u3000\u8cb4\u5bdb\u3001 \u6a4b\u672c\u3000\u90a6\u660e\u3001 \u6771\u3000\u6e05\u4e00\u90ce\u3001 \u5bae\u5d0e\u8aa0\u4e00\u3001 \u201c\u6975\u8584\u5c64\u633f\u5165\u306b\u3088\u308bAl\/p-Ge \u63a5\u5408\u306e\u30b7\u30e7\u30c3\u30c8\u30ad\u30fc\u969c\u58c1\u5236\u5fa1\u201d\u3001 \u7b2c59\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300018p-A1-3, 13-020 (2012.3.15-18\u3000\u65e9\u7a32\u7530\u5927\u5b66 \u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c0f\u91ce\u3000\u8cb4\u5bdb\u3001 \u5927\u7530\u3000\u6643\u751f\u3001 \u6751\u4e0a\u3000\u79c0\u6a39\u3001 \u6771\u3000\u6e05\u4e00\u90ce\u3001 \u5bae\u5d0e\u3000\u8aa0\u4e00\u3001 \u201c\u9ad8\u6fc3\u5ea6As\uff0b\u30a4\u30aa\u30f3\u6ce8\u5165\u30b2\u30eb\u30de\u30cb\u30a6\u30e0\u5c64\u306b\u304a\u3051\u308b\u5316\u5b66\u7d50\u5408\u72b6\u614b\u8a55\u4fa1\u201d\u3001 \u7b2c59\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300018a-A6-9, 13-160 (2012.3.15-18\u3000\u65e9\u7a32\u7530\u5927\u5b66 \u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6797\u3000\u5c06\u5e73\u3001\u677e\u539f\u3000\u826f\u5e73\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001 \u201c\u30dd\u30fc\u30e9\u30b9\u30b7\u30ea\u30b3\u30f3\u5c64\u3092\u7528\u3044\u305f\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u7d50\u6676\u6210\u9577\u306b\u304a\u3051\u308b\u9762\u65b9\u4f4d\u5236\u5fa1\u201d\u3001 \u7b2c59\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300017p-B8-19 (2012.3.15-18\u3000\u65e9\u7a32\u7530\u5927\u5b66 \u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u7267\u539f\u3000\u514b\u5178\u3001\u5c71\u6839\u3000\u96c5\u4eba\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001 \u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u306b\u3088\u308bPt\u304a\u3088\u3073Pt\u30b7\u30ea\u30b5\u30a4\u30c9\u30ca\u30ce\u30c9\u30c3\u30c8\u306e\u5f62\u6210\u3068\u30d5\u30ed\u30fc\u30c6\u30a3\u30f3\u30b0\u30b2\u30fc\u30c8\u30e1\u30e2\u30ea\u5fdc\u7528\u201d\u3001 \uff62\u8b1b\u6f14\u5968\u52b1\u8cde\u53d7\u8cde\u8a18\u5ff5\u8b1b\u6f14\uff63 \u7b2c59\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c618a-B3-1 (2012.3.15-18\u3000\u65e9\u7a32\u7530\u5927\u5b66 \u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u5468\u3000\u3000\u8881\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u3000\u201c\u30d4\u30a8\u30be\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf\u3092\u7528\u3044\u305fSi\u878d\u6db2\u306e\u9ad8\u901f\u30bf\u30c3\u30d4\u30f3\u30b0\u306b\u3088\u308b\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9Si\u819c\u306e\u7d50\u6676\u5316\u201d\u3001 \u7b2c59\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c617a-A6-11 (2012.3.15-18\u3000\u65e9\u7a32\u7530\u5927\u5b66 \u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6797\u3000\u5c06\u5e73\u3001\u4e0a\u5009\u3000\u656c\u5f18\u3001\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001 \u201c\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308bSi\u878d\u6db2\u304b\u3089\u306e\u7d50\u6676\u6210\u9577\u306e\u9ad8\u6642\u9593\u5206\u89e3\u80fd\u89b3\u5bdf\u201d\u3001\u7b2c59\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300017p-A6-1 (2012.3.15-18\u3000\u65e9\u7a32\u7530\u5927\u5b66 \u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u6797\u3000\u5c06\u5e73\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9Si\u7d30\u7dda\u53ca\u3073\u30b9\u30ea\u30c3\u30c8\u30de\u30b9\u30af\u3092\u7528\u3044\u305f\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u9ad8\u901f\u6a2a\u65b9\u5411\u6210\u9577\u306b\u3088\u308b\u7d50\u6676\u6210\u9577\u5236\u5fa1\u201d\u3001 \u7b2c59\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300017p-A6-2 (2012.3.15-18\u3000\u65e9\u7a32\u7530\u5927\u5b66 \u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u7530\u4e2d\u3000\u656c\u4ecb\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6797\u3000\u5c06\u5e73\u3001\u82a6\u539f\u3000\u9f8d\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u306b\u304a\u3051\u308b\u30ac\u30e9\u30b9\u57fa\u677f\u306e\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u53ca\u3073\u30af\u30e9\u30c3\u30af\u767a\u751f\u6761\u4ef6\u306e\u89e3\u660e\u201d\u3001 \u7b2c59\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300017p-A6-3 (2012.3.15-18\u3000\u65e9\u7a32\u7530\u5927\u5b66 \u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c0f\u6797\u3000\u7fa9\u5d07\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u4e2d\u6751\u3000\u5c06\u543e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u8fd1\u8d64\u5916\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u5149\u7167\u5c04\u306b\u3088\u308bP\u30c9\u30fc\u30d7a-Si\u819c\u306e\u4e0d\u7d14\u7269\u6d3b\u6027\u5316\u3068\u540c\u6642\u8ee2\u5199\u6280\u8853\u201d\u3001 \u7b2c59\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300017p-A6-4 (2012.3.15-18\u3000\u65e9\u7a32\u7530\u5927\u5b66 \u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82a6\u539f\u3000\u9f8d\u5e73\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u6797\u3000\u5c06\u5e73\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308bSiC\u30a6\u30a7\u30cf\u306e\u6025\u901f\u71b1\u51e6\u7406\u201d\u3001 \u7b2c59\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300018p-A8-6 (2012.3.15-18\u3000\u65e9\u7a32\u7530\u5927\u5b66 \u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9ad8\u3000\u3000\u91d1\u3001\u7267\u539f\u3000\u514b\u5178\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u6797\u3000\u5c06\u5e73\u3001\u51fa\u6728\u3000\u79c0\u5178\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001 \u201cGeH4 VHF-ICP \u304b\u3089\u306e\u9ad8\u7d50\u6676\u6027Ge:H \u8584\u819c\u5806\u7a4d -Ni \u30ca\u30ce\u30c9\u30c3\u30c8\u3092\u7528\u3044\u305f\u7d50\u6676\u6838\u767a\u751f\u5236\u5fa1-\u201d\u3001 \u7b2c59\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300016a-B6-5 (2012.3.15-18\u3000\u65e9\u7a32\u7530\u5927\u5b66 \u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9152\u6c60\u3000\u8015\u5e73\u3001\u5c0f\u6797\u3000\u7fa9\u5d07\u3001\u4e2d\u6751\u3000\u5c06\u543e\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001 \u201c\u8fd1\u8d64\u5916\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u5149\u7167\u5c04\u306b\u3088\u308bSi\u819c\u306e\u8ee2\u5199\u30e1\u30ab\u30cb\u30ba\u30e0\u306e\u89e3\u660e\u201d\u3001 \u7b2c59\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300017p-B6-2 (2012.3.15-18\u65e9\u7a32\u7530\u5927\u5b66 \u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e2d\u6751\u3000\u5c06\u543e\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u5c0f\u6797\u3000\u7fa9\u5d07\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u8fd1\u8d64\u5916\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u5149\u7167\u5c04\u306b\u3088\u308b\u30dd\u30fc\u30e9\u30b9\u30b7\u30ea\u30b3\u30f3\u3078\u306ea-Si\u819c\u306e\u8ee2\u5199\u3068\u7d50\u6676\u6210\u9577\u5236\u5fa1\u201d\u3001 \u7b2c59\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300017p-B6-3 (2012.3.15-18\u3000\u65e9\u7a32\u7530\u5927\u5b66 \u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c0f\u67f3\u3000\u4fca\u8cb4\u3001\u897f\u7530\u3000\u60a0\u4eae\u3001\u6797\u3000\u5c06\u5e73\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u53ca\u3073\u9ad8\u5727\u6c34\u84b8\u6c17\u71b1\u51e6\u7406\u306b\u3088\u308b\u4f4e\u6e29\u5806\u7a4dSiO\uff12\u819c\u53ca\u3073Si\/SiO2\u754c\u9762\u306e\u6539\u5584\u201d\u3001 \u7b2c59\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u300017a-B6-5 (2012.3.15-18\u3000\u65e9\u7a32\u7530\u5927\u5b66 \u65e9\u7a32\u7530\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5927\u7530\u3000\u6643\u751f\u3001 \u30b7\u30c6\u30a3 \u30af\u30c7\u30a3\u30cb \u30b5\u30cf\u30ea\u3001 \u6c60\u7530\u3000\u5f25\u592e\u3001 \u677e\u4e95\u3000\u771f\u53f2\u3001\u4e09\u5d8b\u3000\u5065\u4eba\u3001 \u6751\u4e0a\u3000\u79c0\u6a39\u3001 \u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cGe\u71b1\u9178\u5316-\u9178\u5316\u6e29\u5ea6\u304c\u71b1\u9178\u5316\u819c\u69cb\u9020\u306b\u53ca\u307c\u3059\u5f71\u97ff\u201d\u3001 \u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u7814\u7a76\u4f1a\u3000\u7b2c17\u56de\u7814\u7a76\u4f1a\u3000\u6750\u6599\u30fb\u30d7\u30ed\u30bb\u30b9\u30fb\u8a55\u4fa1\u306e\u7269\u7406\u3001pp. 93 \u2013 96.\u3000(2012.1.20-21\u3000\u6771\u30ec\u7dcf\u5408\u7814\u4fee\u30bb\u30f3\u30bf\u30fc) .<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e09\u5d8b\u3000\u5065\u6597\u3001 \u6751\u4e0a\u3000\u79c0\u6a39\u3001 \u5927\u7530\u3000\u6643\u751f\u3001 \u6a4b\u672c\u3000\u90a6\u660e\u3001 \u6771\u3000\u6e05\u4e00\u90ce\u3001 \u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cHfO2\/Ge\u754c\u9762\u3078\u306eTaOx\u5c64\u633f\u5165\u306b\u3088\u308b\u754c\u9762\u53cd\u5fdc\u5236\u5fa1\u201d\u3001 \u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u7814\u7a76\u4f1a\u3000\u7b2c17\u56de\u7814\u7a76\u4f1a\u3000\u6750\u6599\u30fb\u30d7\u30ed\u30bb\u30b9\u30fb\u8a55\u4fa1\u306e\u7269\u7406\u3001pp. 121 \u2013 124. (2012.1.20-21\u3000\u6771\u30ec\u7dcf\u5408\u7814\u4fee\u30bb\u30f3\u30bf\u30fc) .<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u4e95\u3000\u771f\u53f2\u3001 \u5927\u7530\u3000\u6643\u751f\u3001 \u6751\u4e0a\u3000\u79c0\u6a39\u3001 \u5c0f\u91ce\u3000\u8cb4\u5bdb\u3001 \u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e \u8aa0\u4e00\u3001\u201c\u71b1\u51e6\u7406\u306b\u3088\u308b\u91d1\u5c5e\/GeO2\u754c\u9762\u5316\u5b66\u69cb\u9020\u5909\u5316\uff0dX\u7dda\u5149\u96fb\u5b50\u5206\u5149\u5206\u6790\u201d\u3001\u3000\u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u7814\u7a76\u4f1a\u3000\u7b2c17\u56de\u7814\u7a76\u4f1a\u3000\u6750\u6599\u30fb\u30d7\u30ed\u30bb\u30b9\u30fb\u8a55\u4fa1\u306e\u7269\u7406\u3001pp. 169 \u2013 172.\u3000(2012.1.20-21\u3000\u6771\u30ec\u7dcf\u5408\u7814\u4fee\u30bb\u30f3\u30bf\u30fc).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5927\u7530\u3000\u6643\u751f\u3001 \u5f8c\u85e4\u3000\u512a\u592a\u3001 \u897f\u57a3\u3000\u614e\u543e\u3001 \u6751\u4e0a\u3000\u79c0\u6a39\u3001 \u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e \u8aa0\u4e00\u3001\u201cRF\u30b9\u30d1\u30c3\u30bf\u3067\u5f62\u6210\u3057\u305fSi\u30ea\u30c3\u30c1\u9178\u5316\u8584\u819c\u306e\u5316\u5b66\u69cb\u9020\u5206\u6790\u3068\u62b5\u6297\u5909\u5316\u7279\u6027\u8a55\u4fa1\u201d\u3001\u3000\u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u7814\u7a76\u4f1a\u3000\u7b2c17\u56de\u7814\u7a76\u4f1a\u3000\u6750\u6599\u30fb\u30d7\u30ed\u30bb\u30b9\u30fb\u8a55\u4fa1\u306e\u7269\u7406\u3001pp. 221 \u2013 224.\u3000(2012.1.20-21\u3000\u6771\u30ec\u7dcf\u5408\u7814\u4fee\u30bb\u30f3\u30bf\u30fc).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u9ad8\u901f\u6a2a\u65b9\u5411\u7d50\u6676\u5316\u306b\u304a\u3051\u308bSi\u30b9\u30ea\u30c3\u30c8\u30de\u30b9\u30af\u3092\u7528\u3044\u305f\u7d50\u6676\u6210\u9577\u4f4d\u7f6e\u5236\u5fa1\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c8\u56de\u7814\u7a76\u96c6\u4f1a\u3001 4P03(pp.29-31)\uff082011.11.4-11.5\u9f8d\u8c37\u5927\u5b66\u3000\u30a2\u30d0\u30f3\u30c6\u30a3\u97ff\u90fd(\u304d\u3087\u3046\u3068\uff09\u30db\u30fc\u30eb).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u539f\u3000\u826f\u5e73\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u8fd1\u8d64\u5916\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u30fc\u7167\u5c04\u306b\u3088\u308b\u30dd\u30fc\u30e9\u30b9\u30b7\u30ea\u30b3\u30f3\u5c64\u8ee2\u5199\u6280\u8853\u306e\u958b\u767a\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\uff08\u7b2c8\u56de\u7814\u7a76\u96c6\u4f1a\u30004P05\uff08pp.32-35\uff09\uff082011.11.4-11.5\u3000\u9f8d\u8c37\u5927\u5b66\u3000\u30a2\u30d0\u30f3\u30c6\u30a3\u97ff\u90fd\uff08\u304d\u3087\u3046\u3068\uff09\u30db\u30fc\u30eb\uff09.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82a6\u539f\u3000\u9f8d\u5e73\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u897f\u7530\u3000\u60a0\u4eae\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u306b\u304a\u3051\u308bSiC\u30a6\u30a7\u30cf\u306e\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6280\u8853\u306e\u958b\u767a\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\uff08\u7b2c8\u56de\u7814\u7a76\u96c6\u4f1a\u30014P21(pp.59-60) \uff082011.11.4-11.5\u3000\u9f8d\u8c37\u5927\u5b66\u3000\u30a2\u30d0\u30f3\u30c6\u30a3\u97ff\u90fd\uff08\u304d\u3087\u3046\u3068\uff09\u30db\u30fc\u30eb\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9152\u6c60\u3000\u8015\u5e73\u3001\u5c0f\u6797\u3000\u7fa9\u5d07\u3001\u677e\u539f\u3000\u826f\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u8fd1\u8d64\u5916\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u5149\u7167\u5c04\u306b\u3088\u308ba-Si\u819c\u306e\u7d50\u6676\u5316\u3068\u540c\u6642\u8ee2\u5199\u6280\u8853\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c8\u56de\u7814\u7a76\u96c6\u4f1a\u3001 5O03(pp.148-151) \uff082011.11.4-11.5\u3000\u9f8d\u8c37\u5927\u5b66\u3000\u30a2\u30d0\u30f3\u30c6\u30a3\u97ff\u90fd\uff08\u304d\u3087\u3046\u3068\uff09\u30db\u30fc\u30eb\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u5468\u3000\u8881\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30d4\u30a8\u30be\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf\u3092\u5229\u7528\u3057\u305fSi\u878d\u6db2\u63a5\u89e6\u6cd5\u306b\u3088\u308ba-Si\u819c\u306e\u7d50\u6676\u5316\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u7b2c8\u56de\u7814\u7a76\u96c6\u4f1a\u30005P02(pp.163-165\uff09\uff082011.11.4-11.5\u3000\u9f8d\u8c37\u5927\u5b66\u3000\u30a2\u30d0\u30f3\u30c6\u30a3\u97ff\u90fd\uff08\u304d\u3087\u3046\u3068\uff09\u30db\u30fc\u30eb\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u897f\u7530\u3000\u60a0\u4eae\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u4f4e\u6e29\u5806\u7a4dSiO2\u819c\u306e\u5316\u5b66\u7d50\u5408\u72b6\u614b\u6539\u5584\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c8\u56de\u7814\u7a76\u96c6\u4f1a 5P18(pp.188-190) \uff082011.11.4-11.5\u3000\u9f8d\u8c37\u5927\u5b66\u3000\u30a2\u30d0\u30f3\u30c6\u30a3\u97ff\u90fd\uff08\u304d\u3087\u3046\u3068\uff09\u30db\u30fc\u30eb\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[\u62db\u5f85\u8b1b\u6f14]<\/strong>\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201cDC\u30a2\u30fc\u30af\u653e\u96fb\u5927\u6c17\u5727\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u306b\u3088\u308b\u534a\u5c0e\u4f53\u8584\u819c\u7d50\u6676\u6210\u9577\u201d\u3001 \u7b2c72\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6\u300029\uff50-ZN-4\uff082011.8.29-9.2\u3001\u5c71\u5f62\u5927\u5b66\u5c0f\u767d\u5ddd\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u85e4\u5ca1\u3000\u77e5\u5b8f\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u4e09\u5d8b\u3000\u5065\u6597\u3001S. K. Sahari\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u8aa0\u4e00\u3001\u201cGe\u57fa\u677f\u4e0a\u3078\u306eLayer-by-layer\u6cd5\u306b\u3088\u308bTiOx\u5f62\u6210\u3068\u754c\u9762\u53cd\u5fdc\u5236\u5fa1\u201d\u3001\u7b2c72\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u30001a-Q-14\uff082011.8.29-9.2\u3000\u5c71\u5f62\u5927\u5b66\u5c0f\u767d\u5ddd\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5927\u7530\u3000\u6643\u751f\u3001\u5f8c\u85e4\u3000\u512a\u592a\u3001\u897f\u57a3\u3000\u614e\u543e\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cRF\u30b9\u30d1\u30c3\u30bf\u306b\u3088\u308a\u5f62\u6210\u3057\u305fSiOx<\/sub>\u8584\u819c\u306e\u62b5\u6297\u5909\u5316\u7279\u6027\u8a55\u4fa1\u201d\u3001 \u7b2c72\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u300031p-ZK-8\uff082011.8.29-9.2\u5c71\u5f62\u5927\u5b66\u5c0f\u767d\u5ddd\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Siti Kudnie Sahari\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u677e\u4e95\u3000\u771f\u53f2\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u8aa0\u4e00\u3001\u201cEvaluation of Chemical Bonding Features of Thermally-Grown Ge Oxide\/Ge (100) System\u201d\u3001\u7b2c72\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u30001a-Q-6\uff082011.8.29-9.2\u3000\u5c71\u5f62\u5927\u5b66\u5c0f\u767d\u5ddd\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9152\u6c60\u3000\u8015\u5e73\u3001\u677e\u539f\u3000\u826f\u5e73\u3001\u5c0f\u6797\u3000\u7fa9\u5d07\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u8fd1\u8d64\u5916\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u5149\u7167\u5c04\u306b\u3088\u308ba-Si\u819c\u306e\u7d50\u6676\u5316\u3068\u540c\u6642\u8ee2\u5199\u6280\u8853\u201d\u3001 \u7b2c72\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u30001p-M-6\uff082011.8.29-9.2\u3000\u5c71\u5f62\u5927\u5b66\u5c0f\u767d\u5ddd\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e09\u5d8b\u3000\u5065\u6597\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5927\u7530\u3000\u6643\u751f\u3001Sahari S. K.\u3001\u85e4\u5ca1\u3000\u77e5\u5b8f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cALD\u53ca\u3073Layer-by-Layer\u6cd5\u306b\u3088\u308b\u6975\u8584Ta\u9178\u5316\u819c\u306e\u5f62\u6210\u3068Ge(100)\u57fa\u677f\u306b\u304a\u3051\u308b\u754c\u9762\u9178\u5316\u8a55\u4fa1\u201d\u3001 \u7b2c72\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u8b1b\u6f14\u4e88\u7a3f\u96c6\u30001a-Q-13\uff082011.8.29-9.2\u3000\u5c71\u5f62\u5927\u5b66\u5c0f\u767d\u5ddd\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u82a6\u539f\u3000\u9f8d\u5e73\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u897f\u7530\u3000\u60a0\u4eae\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u306b\u304a\u3051\u308bSiC\u30a6\u30a7\u30cf\u306e\u975e\u63a5\u89e6\u6e29\u5ea6\u6e2c\u5b9a\u6280\u8853\u306e\u958b\u767a\u201d\u3001 \u7b2c72\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u300031a-ZB-2\uff082011.8.29-9.2\u3000\u5c71\u5f62\u5927\u5b66\u5c0f\u767d\u5ddd\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u85e4\u7530\u3000\u60a0\u4e8c\uff0c\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u9ad8\u901f\u6a2a\u65b9\u5411\u7d50\u6676\u5316\u306b\u304a\u3051\u308bSi\u30b9\u30ea\u30c3\u30c8\u30de\u30b9\u30af\u3092\u7528\u3044\u305f\u7d50\u6676\u6210\u9577\u4f4d\u7f6e\u5236\u5fa1\u201d\u3001\u7b2c72\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u30001p-M-3\uff082011.8.29-9.2\u3000\u5c71\u5f62\u5927\u5b66\u5c0f\u767d\u5ddd\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u5468\u3000\u8881\u3001\u9152\u6c60\u3000\u8015\u5e73\u3001\u85e4\u7530\u3000\u60a0\u4e8c\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30d4\u30a8\u30be\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf\u3092\u5229\u7528\u3057\u305f\u30b7\u30ea\u30b3\u30f3\u878d\u6db2\u63a5\u89e6\u6cd5\u306b\u3088\u308b\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u819c\u306e\u7d50\u6676\u5316\u201d\u3001 \u5fdc\u7528\u7269\u7406\u5b66\u4f1a \u4e2d\u30fb\u56db\u56fd\u652f\u90e82011\u5e74\u5ea6 \u652f\u90e8\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\uff08Fp1-3\uff09\uff082011.7.30\u65e5\u3001\u9ce5\u53d6\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5927\u7530\u3000\u6643\u751f\u3001\u68ee\u3000\u5927\u6a39\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cHf\u7cfb\u9ad8\u8a98\u96fb\u7387\u7d76\u7e01\u819c\u306eX\u7dda\u5149\u96fb\u5b50\u5206\u5149\u5206\u6790\u201d \u5fdc\u7528\u7269\u7406\u5b66\u4f1a \u4e2d\u30fb\u56db\u56fd\u652f\u90e82011\u5e74\u5ea6 \u652f\u90e8\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\uff08Ca2-3\uff09\uff082011.7.30\u65e5\u3000\u9ce5\u53d6\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5927\u7530\u3000\u6643\u751f\u3001\u5f8c\u85e4\u3000\u512a\u592a\u3001\u897f\u57a3\u3000\u614e\u543e\u3001Guobin Wei\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cRF\u30b9\u30d1\u30c3\u30bf\u5f62\u6210\u3057\u305fSi\u9178\u5316\u819c\u3092\u7528\u3044\u305fMIM\u30ad\u30e3\u30d1\u30b7\u30bf\u306e\u62b5\u6297\u5909\u5316\u7279\u6027\u201d\u3001 \u30b7\u30ea\u30b3\u30f3\u6750\u6599\u30fb\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\uff3bSDM] \u4fe1\u5b66\u6280\u6cd5Vol.111, No.114, pp. 97-102\uff08IEICE Technical Report)\uff082011.7.4\u3000\u540d\u53e4\u5c4b\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u4e95\u3000\u771f\u53f2, \u85e4\u5ca1\u3000\u77e5\u5b8f,\u5927\u7530\u3000\u6643\u751f,\u6751\u4e0a\u3000\u79c0\u6a39, \u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u91d1\u5c5e\/GeO2\u754c\u9762\u306b\u304a\u3051\u308b\u79d1\u5b66\u7d50\u5408\u72b6\u614b\u306e\u5149\u96fb\u5b50\u5206\u5149\u5206\u6790\u201d\u3001 \u30b7\u30ea\u30b3\u30f3\u6750\u6599\u30fb\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\uff3bSDM] \u4fe1\u5b66\u6280\u6cd5Vol.111, No.114, pp. 63-68\u3000\uff08IEICE Technical Report)\uff082011.7.4\u3000\u540d\u53e4\u5c4b\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u85e4\u5ca1\u3000\u77e5\u5b8f\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u4e09\u5d8b\u3000\u5065\u6597\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001 \u201cGe(100)\u8868\u9762\u306e\u6975\u8584Tio\uff58\u30ad\u30e3\u30c3\u30d4\u30f3\u30b0\u306b\u3088\u308bH\uff46O2\u539f\u5b50\u5806\u7a4d\/\u71b1\u51e6\u7406\u6642\u306e\u754c\u9762\u53cd\u5fdc\u5236\u5fa1\u201d\u3001 \u30b7\u30ea\u30b3\u30f3\u6750\u6599\u30fb\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\uff3bSDM] \u4fe1\u5b66\u6280\u6cd5Vol.111, No.114, pp. 47-50\uff08IEICE Technical Report)\uff082011.7.4\u540d\u53e4\u5c4b\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2010\u5e74\u5ea6<\/p>\n\n\n\n

Y. Nishida, S. Hayashi, K. Matsumoto, and S. Higashi, \u201cImprovement in Electrical Stress Endurance of Low-Temperature Deposited SiO2<\/sub> Films by Atmospheric Pressure Thermal Plasma Jet Annealing,\u201d 4th<\/sup> Int. Conf. on Plasma Nanotechnol. Sci. (IC-PLANTS2011), (Takayama, Japan, Mar. 10-12, 2011)<\/em>, P-46.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, N. Morisawa, M. Ikeda, K. Matsumoto, M. Yamane, S. Higashi, and S. Miyazaki, \u201cElectrical Charging Characteristics of Pt-Nanodots Floating Gate in MOS Capacitors,\u201d 4th<\/sup> Int. Conf. on Plasma Nanotechnol. Sci. (IC-PLANTS2011), (Takayama, Japan, Mar. 10-12, 2011), <\/em>P-36.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Hayashi, M. Ikeda, Y. Nishida, R. Matsubara, and S. Higashi, \u201cFabrication of High performance TFTs Using Micro-Thermal-Plasma-Jet Crystallized Strip Amorphous Silicon Films,\u201d 7th<\/sup> Int. Thin-Film Transistor Conf. (ITC2011) (Cambridge, UK, Mar. 3-4, 2011)<\/em>, p. 37.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, Y. Goto, G. Wei, H. Murakami, S. Higashi, and S. Miyazaki, \u201cImpact of Y2<\/sub>O3<\/sub> Addition of Chemical Bonding Features and Resistance Switching of TiO2<\/sub>,\u201d 2011 Int. Workshop Dielectric Thin Films Future ULSI Dev. (IWDTF2011), (Tokyo, Japan, Jan. 20-21, 2011)<\/em>, pp. 113-114.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, T. Fujioka, H. Murakami, S. Higashi, and S. Miyazaki, \u201cXPS Study of Interfacial Reaction between Metal and Ge Oxide,\u201d 2011 Int. Workshop Dielectric Thin Films Future ULSI Dev. (IWDTF2011), (Tokyo, Japan, Jan. 20-21, 2011), <\/em>pp. 25-26.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Y. Goto, A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki, \u201cCharacterization of Resistance-Switching of SiOx<\/sub> Dielectrics,\u201d 2011 Int. Workshop Dielectric Thin Films Future ULSI Dev. (IWDTF2011), (Tokyo, Japan, Jan. 20-21, 2011)<\/em>, pp. 163-164.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Fujioka, A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki, \u201cFormation of Ultra Thin Titanium Oxide on Germanium by Atomic Layer Deposition using TEMAT and O3<\/sub>,\u201d 2011 Int. Workshop Dielectric Thin Films Future ULSI Dev. (IWDTF2011), (Tokyo, Japan, Jan. 20-21, 2011)<\/em>, pp. 51-52.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Hayashi, S. Higashi, H. Murakami, and S. Miyazaki, \u201cCharacteristics of Thin Film Transistors Fabricated by Solid Phase Crystallization and High Speed Lateral Crystallization Induced by Micro-Thermal-Plasma-Jet Irradiation,\u201d Proc. 17th<\/sup> Int. Display Workshop (IDW\u201910), (Fukuoka, Japan, Dec. 1-3. 2010)<\/em>, pp. 685-688.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, K. Matsumoto, T. Okada, N. Morisawa, M. Ikeda, S. Higashi, and S. Miyazaki, \u201cFormation of High Density Pt Nanodots on SiO2<\/sub> Induced by Millisecond Rapid Thermal Annealing using Thermal Plasma Jet,\u201d Proc. Int. Symp. Dry Process (DPS2010), (Tokyo, Japan, Nov. 11-12, 2010)<\/em>, pp. 93-94.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Matsumoto, S. Higashi, A. Ohta, H. Murakami, and S. Miyazaki, \u201cEfficient Activation of As Atoms in Ultra Shallow Junction by Thermal Plasma Jet Induced Microsecond Annealing,\u201d Proc. Int. Symp. Dry Process (DPS2010), (Tokyo, Japan, Nov. 11-12, 2010)<\/em>, pp. 105-106.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, Y. Goto, G. Wei, K. Makihara, H. Murakami, S. Higashi, and S. Miyazaki, \u201cThe Impact of Y2<\/sub>O3<\/sub> Addition into TiO2<\/sub> on Electronic States and Resistive Switching Characteristics,\u201d 23rd<\/sup> Int. Microprocesses and Nanotechnology Conf. (MNC2010), (Fukuoka, Japan, Nov. 9-12, 2010)<\/em>, 11B-6-2.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Matsumoto, S. Higashi, K. Makihara, M. Akazawa, and S. Miyazaki, \u201cFormation of Pseudo-Expitaxial Ge Films on Si(100) by Droplet of Ge Microliquid,\u201d 218th<\/sup> Electrochem. Soc. Meeting (Las Vegas, USA, Oct. 10-15, 2010),<\/em> 1870.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Murakami, T. Fujioka, A. Ohta, T. Bando, S. Higashi, and S. Miyazaki, \u201cCharacterization of Interfaces between Chemically-Cleaned or Thermally-Oxidized Germanium and Metals,\u201d 218th <\/sup>Electrochem. Soc. Meeting (Las Vegas, USA, Oct. 10-15, 2010)<\/em>, 1881.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. K. Sahari, H. Murakami, T. Fujioka, T. Bando, A. Ohta, K. Makihara, S. Higashi, and S. Miyazaki, \u201cStudy on Native Oxidation of Ge (111) and (100) Surfaces,\u201d Ext. Abs. 2010 Int. Conf. Solid State of Dev. Mat. (SSDM2010)<\/em>, (Tokyo, Japan, Sept. 22-24, 2010)<\/em>, pp. 209-210.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Matsumoto, S. Higashi, H. Murakami, and S. Miyazaki, \u201cEfficient Activation of As in Ultrashallow Junction Induced by Thermal Plasma Jet Microsecond Annealing,\u201d Ext. Abs. 2010 Int. Conf. Solid Sate Dev. Mat. (SSDM2010), (Tokyo, Japan, Sept. 22-24, 2010)<\/em>, pp. 191-192.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Hayashi, S. Higashi, H. Murakami, and S. Miyazaki, \u201cHigh Speed Lateral Crystallization of Amorphous Silicon Films Using Micro-Thermal-Plasma-Jet and Its Application to Thin Film Transistor,\u201d Proc. AM-FPD10, (Tokyo, Japan, Jul. 5-7, 2010)<\/em>, pp. 247-250.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Y. Hiroshige, S. Higashi, Y. Nishida, S. Hayashi, and S. Miyazaki, \u201cImprovement of Gate SiO2<\/sub> Films Reliability by Atmospheric Pressure Thermal-plasma-jet-induced millisecond annealing,\u201d Proc. AM-FPD10,<\/em> (Tokyo, Japan, Jul. 5-7, 2010)<\/em>, pp. 109-112.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
G. Wei, Y. Goto, A. Ohta, K. Makihara, H. Murakami, S. Higashi, and S. Miyazaki, \u201cThe Impact of H2<\/sub> Anneal on Resistive Switching in Pt\/TiO2<\/sub>\/Pt Structure,\u201d Dig<\/em> 2010 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2010), (Tokyo, Japan, Jun. 30 \u2013 Jul. 2, 2010)<\/em>, pp. 31-36.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, D. Kanme, H. Murakami, S. Higashi, and S. Miyazaki, \u201cCharacterization of Mg Diffusion into HfO2<\/sub>\/SiO2<\/sub>\/Si(100) Stacked Structures and Its Impact on Detect State Densities,\u201d Dig 2010 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2010), (Tokyo, Japan, Jun. 30 \u2013 Jul. 2, 2010), <\/em>pp. 189-194.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Y. Goto, A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki, \u201cChemical Bonding Features at TiO2<\/sub>\/Pt Interface and Their Impact on Resistance-Switching Properties,\u201d 2010 Int. Meeting for Future Electron Dev. Kansai (IMFEDK2010), (Osaka, Japan, May. 13-14, 2010)<\/em>, p. 114.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited]<\/strong> S. Higashi, \u201cMillisecond Annealing Induced by Atmospheric Pressure Thermal Plasma Jet Irradiation and Its Application to Ultra Shallow Junction Formation,\u201d Ext. Abs. 2010 Int. Workshop Junction Tech. (IWJT-2010), (Shanghai, China, May 10-11, 2010)<\/em>, pp. 30-35.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Hayashi, S. Higashi, and S. Miyazaki, \u201cGrowth of Large Crystalline Grains by High Speed Scanning of Melting Zone Formed by Micro-Thermal-Plasma-Jet Irradiation to Amorphous Silicon Films,\u201d Abs. 2010 Material Research Society Spring Meeting (San Francisco, USA, Apr. 5-9, 2010)<\/em>, A20.4.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5927\u7530\u3000\u6643\u751f\u3001 \u5f8c\u85e4\u3000\u512a\u592a\u3001\u4e09\u5d8b\u3000\u5065\u6597\u3001Goubin Wei\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001 \u5bae\u5d0e \u8aa0\u4e00\u3001\u201cRu\u6dfb\u52a0\u3057\u305fTiYxOy\u306e\u62b5\u6297\u5909\u5316\u7279\u6027\u8a55\u4fa1\u201d\u3001  \u7b2c58\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u300025a-BZ-6, 06-119 (2011.3.24-27\u3000\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66 \u6587\u6559\u30ad\u30e3\u30f3\u30d1\u30b9). \u4e88\u7a3f\u63d0\u51fa\u306e\u307f\u3001\u9707\u707d\u306e\u305f\u3081\u53e3\u982d\u767a\u8868\u306f\u4e2d\u6b62<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
G. Wei, H. Murakami, T. Fujioka, A. Ohta, Y. Goto, S. Higashi, and S. Miyazaki, \u201cImpact of Insertion of Ultrathin TaOx Layer at the Pt\/TiO2<\/sub> Interface on Resistive Switching Characteristics,\u201d \u7b2c58\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a 25a-BZ-5, (2011.3.24-27\u3000\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66 \u6587\u6559\u30ad\u30e3\u30f3\u30d1\u30b9). \u4e88\u7a3f\u63d0\u51fa\u306e\u307f\u3001\u9707\u707d\u306e\u305f\u3081\u53e3\u982d\u767a\u8868\u306f\u4e2d\u6b62<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5f8c\u85e4\u3000\u512a\u592a\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u897f\u57a3\u3000\u614e\u543e\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cPt\/SiOx\/Pt\u30ad\u30e3\u30d1\u30b7\u30bf\u69cb\u9020\u306e\u62b5\u6297\u5909\u5316\u7279\u6027\u8a55\u4fa1\uff08\u2161\uff09\u201d\u3001\u7b2c58\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a 25a-BZ-3, (2011.3.24-27\u3000\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66 \u6587\u6559\u30ad\u30e3\u30f3\u30d1\u30b9). \u4e88\u7a3f\u63d0\u51fa\u306e\u307f\u3001\u9707\u707d\u306e\u305f\u3081\u53e3\u982d\u767a\u8868\u306f\u4e2d\u6b62<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c71\u6839\u3000\u96c5\u4eba\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u68ee\u6fa4\u3000\u76f4\u4e5f\u3001\u677e\u539f\u3000\u826f\u5e73\u3001\u897f\u7530\u3000\u60a0\u4eae\u3001\u677e\u672c\u3000\u548c\u4e5f\u3001\u6797\u3000\u5c06\u5e73\u3001\u7267\u539f\u3000\u514b\u5178\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u306b\u3088\u308bPt <\/strong>\u30b7\u30ea\u30b5\u30a4\u30c9\u30ca\u30ce\u30c9\u30c3\u30c8\u306e\u5f62\u6210\u201d\u3001\u7b2c58\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a 24p-KM-10, (2011.3.24-27\u3000\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66 \u6587\u6559\u30ad\u30e3\u30f3\u30d1\u30b9). \u4e88\u7a3f\u63d0\u51fa\u306e\u307f\u3001\u9707\u707d\u306e\u305f\u3081\u53e3\u982d\u767a\u8868\u306f\u4e2d\u6b62<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u539f\u3000\u826f\u5e73\u3001\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u30dd\u30fc\u30e9\u30b9\u30b7\u30ea\u30b3\u30f3\u4e0a\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u819c\u306e\u7d50\u6676\u5316\u201d\u3001\u7b2c58\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u300024a-P2-4\u3000(2011.3.24-27\u3000\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66 \u6587\u6559\u30ad\u30e3\u30f3\u30d1\u30b9). \u4e88\u7a3f\u63d0\u51fa\u306e\u307f\u3001\u9707\u707d\u306e\u305f\u3081\u53e3\u982d\u767a\u8868\u306f\u4e2d\u6b62<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u672c\u3000\u7adc\u5f25\u3001\u7267\u539f\u3000\u514b\u5178\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30de\u30a4\u30af\u30ed\u878d\u6db2\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308b\u6c34\u7d20\u7d42\u7aefSi <\/strong>\u57fa\u677f\u4e0a\u3067\u306e\u7591\u4f3c\u30d8\u30c6\u30ed\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30ebGe <\/strong>\u819c\u306e\u5f62\u6210\u201d\u3001\u7b2c58\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u300024a-P2-13\u3000(2011.3.24-27\u3000\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66 \u6587\u6559\u30ad\u30e3\u30f3\u30d1\u30b9). \u4e88\u7a3f\u63d0\u51fa\u306e\u307f\u3001\u9707\u707d\u306e\u305f\u3081\u53e3\u982d\u767a\u8868\u306f\u4e2d\u6b62<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u672c\u3000\u548c\u4e5f\u3001\u4e2d\u5143\u3000\u7fd4\u5e73\u3001\u6797\u3000\u5c06\u5e73\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727DC \u30a2\u30fc\u30af\u653e\u96fb\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u306e\u30d1\u30ef\u30fc\u5bc6\u5ea6\u7a7a\u9593\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u6e2c\u5b9a\u201d\u3001\u7b2c58\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a\u300024a-P10-3\u3000(2011.3.24-27\u3000\u795e\u5948\u5ddd\u5de5\u79d1\u5927\u5b66 \u6587\u6559\u30ad\u30e3\u30f3\u30d1\u30b9). \u4e88\u7a3f\u63d0\u51fa\u306e\u307f\u3001\u9707\u707d\u306e\u305f\u3081\u53e3\u982d\u767a\u8868\u306f\u4e2d\u6b62<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e09\u5d8b \u5065\u6597, \u5f8c\u85e4 \u512a\u592a, \u5927\u7530 \u6643\u751f, \u6751\u4e0a \u79c0\u6a39, \u6771 \u6e05\u4e00\u90ce\u3001\u5bae\u5d0e \u8aa0\u4e00\u3001\u201c\u30eb\u30c6\u30cb\u30a6\u30e0\u306e\u5316\u5b66\u7d50\u5408\u304a\u3088\u3073\u96fb\u5b50\u72b6\u614b\u8a55\u4fa1\u201d\u3001\u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u7814\u7a76\u4f1a\u3000\u7b2c16\u56de\u7814\u7a76\u4f1a\u3000\u6750\u6599\u30fb\u30d7\u30ed\u30bb\u30b9\u30fb\u8a55\u4fa1\u306e\u7269\u7406\u3001pp. 135 \u2013 138.\u3000(2011.1.20-22\u3000\u6771\u4eac\u5de5\u696d\u5927\u5b66 \u5927\u5ca1\u5c71\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u4e95\u3000\u771f\u53f2\u3001\u85e4\u5ca1\u3000\u77e5\u5b8f\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cX\u7dda\u5149\u96fb\u5b50\u5206\u5149\u6cd5\u306b\u3088\u308b\u91d1\u5c5e\/GeO2<\/sub>\u754c\u9762\u306e\u5316\u5b66\u7d50\u5408\u72b6\u614b\u5206\u6790\u201d\u3001\u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u7814\u7a76\u4f1a\u3000\u7b2c16\u56de\u7814\u7a76\u4f1a\u3000\u6750\u6599\u30fb\u30d7\u30ed\u30bb\u30b9\u30fb\u8a55\u4fa1\u306e\u7269\u7406\u3001pp. 143 \u2013 146.\u3000(2011.1.20-22\u3000\u6771\u4eac\u5de5\u696d\u5927\u5b66 \u5927\u5ca1\u5c71\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5927\u6c17\u5727\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u6025\u901f\u71b1\u51e6\u7406\u306b\u3088\u308b\u30ca\u30ce\u30c9\u30c3\u30c8\u304a\u3088\u3073\u6975\u6d45\u63a5\u5408\u5f62\u6210\u201d\u3001\u7b2c133\u56de\u30b7\u30ea\u30b3\u30f3\u30c6\u30af\u30ce\u30ed\u30b8\u30fc pp.2-5\uff082011.2.18\u3001\u6771\u4eac\u5927\u5b66\u6d45\u91ce\u30ad\u30e3\u30f3\u30d1\u30b9\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u672c\u3000\u548c\u4e5f\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30de\u30a4\u30af\u30ed\u79d2\u6025\u901f\u71b1\u51e6\u7406\u306b\u3088\u308b\u6975\u6d45\u63a5\u5408\u4e2d\u306eAs \u306e\u9ad8\u52b9\u7387\u6d3b\u6027\u5316\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c7\u56de\u7814\u7a76\u96c6\u4f1a\u30015P07\uff08pp.29-31\uff09\uff082010.11.5-6\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u672c\u3000\u7adc\u5f25\u3001\u7267\u539f\u3000\u514b\u5178\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u5fae\u5c0f\u878d\u6db2\u6ef4\u4e0b\u306b\u3088\u308b\u7591\u4f3c\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30ebGe \/ Si \u306e\u5f62\u6210\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c7\u56de\u7814\u7a76\u96c6\u4f1a\u30015P11\uff08pp.36-38\uff09\uff082010.11.5-6\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6797\u3000\u5c06\u5e73\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u897f\u7530\u3000\u60a0\u4eae\u3001\u677e\u539f\u3000\u826f\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u56fa\u76f8\u7d50\u6676\u5316\u53ca\u3073\u9ad8\u901f\u6a2a\u65b9\u5411\u7d50\u6676\u5316Si \u819cTFT \u306e\u96fb\u6c17\u7279\u6027\u8a55\u4fa1\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c7\u56de\u7814\u7a76\u96c6\u4f1a\u30015P15\uff08pp.42-44\uff09\uff082010.11.5-6\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u7267\u539f\u3000\u514b\u5178\u3001\u677e\u672c\u3000\u7adc\u5f25\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30d4\u30a8\u30be\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf\u3092\u5229\u7528\u3057\u305f\u5fae\u5c0f\u30b7\u30ea\u30b3\u30f3\u878d\u6db2\u6ef4\u4e0b\u6280\u8853\u306e\u958b\u767a\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c7\u56de\u7814\u7a76\u96c6\u4f1a\u30016P10\uff08pp.135-137\uff09\uff082010.11.5-6\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5f8c\u85e4\u3000\u512a\u592a\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cPt\/SiO2\/Pt\u30ad\u30e3\u30d1\u30b7\u30bf\u69cb\u9020\u306e\u62b5\u6297\u5909\u5316\u7279\u6027\u8a55\u4fa1\u201d\u3001 \u7b2c71\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6 17p-NE-5 (2010.9.14-17\u3001\u9577\u5d0e\u5927\u5b66 \u6587\u6559\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u4e09\u5d8b\u3000\u5065\u6597\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u5f8c\u85e4\u3000\u512a\u592a\u3001\u85e4\u5ca1\u3000\u77e5\u5b8f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u30eb\u30c6\u30cb\u30a6\u30e0\u9178\u5316\u7269\u306e\u5316\u5b66\u7d50\u5408\u304a\u3088\u3073\u96fb\u5b50\u72b6\u614b\u8a55\u4fa1\u201d\u3001\u7b2c71\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6 14a-ZD-6 (2010.9.14-17\u3001\u9577\u5d0e\u5927\u5b66 \u6587\u6559\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u672c\u3000\u7adc\u5f25\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u7267\u539f\u3000\u514b\u5178\u3001\u8d64\u6fa4\u3000\u5b97\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u5fae\u5c0f\u878d\u6db2\u6ef4\u4e0b\u306b\u3088\u308b\u7591\u4f3c\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30ebGe \/ Si <\/strong>\u306e\u5f62\u6210\u201d\u3001\u7b2c71\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6 16p-ZD-4 (2010.9.14-17\u3001\u9577\u5d0e\u5927\u5b66 \u6587\u6559\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u672c\u3000\u548c\u4e5f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u30de\u30a4\u30af\u30ed\u79d2\u6025\u901f\u71b1\u51e6\u7406\u306b\u3088\u308bSi \u30a6\u30a7\u30cf\u8868\u9762\u306e\u9ad8\u52b9\u7387\u4e0d\u7d14\u7269\u6d3b\u6027\u5316\u201d\u3001\u7b2c71\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6 16a-ZD-1 (2010.9.14-17\u3001\u9577\u5d0e\u5927\u5b66 \u6587\u6559\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5927\u7530\u3000\u6643\u751f\u3001\u85e4\u5ca1\u3000\u77e5\u5b8f\u3001\u5f8c\u85e4\u3000\u512a\u592a\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cGe-MIS\u69cb\u9020\u306b\u304a\u3051\u308b\u754c\u9762\u5316\u5b66\u7d50\u5408\u72b6\u614b\u306e\u5149\u96fb\u5b50\u5206\u5149\u5206\u6790\u201d\u3001\u7b2c71\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6 15p-ZA-7 (2010.9.14-17\u3001\u9577\u5d0e\u5927\u5b66 \u6587\u6559\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u85e4\u5ca1\u3000\u77e5\u5b8f\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u6709\u6a5f\u91d1\u5c5e\u539f\u6599\u3092\u7528\u3044\u305fALD <\/strong>\u306b\u3088\u308bGe \u4e0a\u3078\u306eTi <\/strong>\u9178\u5316\u819c\u306e\u5f62\u6210\u201d\u3001 \u7b2c71\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6 15p-ZA-15 (2010.9.14-17\u3001\u9577\u5d0e\u5927\u5b66 \u6587\u6559\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316Si <\/strong>\u819c\u3092\u7528\u3044\u305fTFT <\/strong>\u306e\u96fb\u6c17\u7279\u6027\u8a55\u4fa1\u201d\u3001\u7b2c71\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6 15p-ZD-16 (2010.9.14-17\u3001\u9577\u5d0e\u5927\u5b66 \u6587\u6559\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u306b\u3088\u308bSi\u7d50\u6676\u7c92\u4f4d\u7f6e\u5236\u5fa1\u201d\u3001\u7b2c71\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6 15p-ZD-17 (2010.9.14-17\u3001\u9577\u5d0e\u5927\u5b66 \u6587\u6559\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\uff3b\u62db\u5f85\u8b1b\u6f14\uff3d\u6771\u3000\u6e05\u4e00\u90ce,\u300c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u30b7\u30ea\u30b3\u30f3\u819c\u306e\u30de\u30a4\u30af\u30ed\u79d2\u6eb6\u878d\u7d50\u6676\u5316\u3068\u9ad8\u6027\u80fdTFT\u4f5c\u88fd\u5fdc\u7528\u300d,\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a \u30b7\u30ea\u30b3\u30f3\u6750\u6599\u30fb\u30c7\u30d0\u30a4\u30b9\uff082010\u5e744\u670823\u65e5\u6c96\u7e04\u9752\u5e74\u4f1a\u9928\uff09, \u4fe1\u5b66\u6280\u5831110<\/strong>\uff0815\uff09\uff082010\u5e744\u670816\u65e5\uff09pp. 39-44.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2009\u5e74\u5ea6<\/p>\n\n\n\n

S. Hayashi, S. Higashi, H. Murakami, and S. Miyazaki, \u201cCrystallization of Amorphous Si Films by Ultra High Speed Zone Melting Induced by Micro Thermal Plasma Jet Irradiation,\u201d Proc. 27th<\/sup> Symp. Plasma Processing (SPP-27), (Yokohama, Japan, Feb. 1-3, 2010), <\/em>pp. 75-76.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Y. Hiroshige, S. Higashi, K. Matsumoto, and S. Miyazaki, \u201cImprovement of Current Stress Endurance of Low-Temperature Deposited SiO2<\/sub> Films by Thermal Plasma Jet Induced Millisecond Annealing,\u201d Proc. 6th<\/sup> Int. TFT Conf. (Himeji, Japan, Jan. 28-29, 2010)<\/em>, pp. 138-141.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Matsumoto, S. Higashi, N. Koba, and S. Miyazaki, \u201cPseudo-Epitaxial Growth of Silicon Microliquid Dropped on Hydrogen Terminated Silicon Wafer Surface,\u201d Abs. 19th<\/sup> Int. Photovoltaic Sci. Eng. Conf. (PVSEC-19), (Jeju, Korea, Nov. 9-13, 2009)<\/em>, pp. 295-296.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Matsumoto, S. Higashi, H. Furukawa, T. Okada, H. Murakami, and S. Miyazaki, \u201cActivation of B and As in Ultra Shallow Junction with Heating and Cooling Rates Controlled Millisecond Annealing Induced by Thermal Plasma Jet,\u201d Ext. Abs. 2009 Int. Conf. Solid Sate Dev. Mat. (SSDM2009), (Sendai, Japan, Oct. 7-9, 2009)<\/em>, pp. 1018-1019.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Mori, A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki, \u201cEvaluation of Effective Work Function of Pt on Bi-layer High-k\/SiO2<\/sub> Stack Structure using by Backside X-ray Photoelectron Spectroscopy,\u201d Ext. Abs. 2009 Int. Conf. Solid State Dev. Mat. (SSDM2009), (Sendai, Japan, Oct. 7-9, 2009)<\/em>, pp. 44-45.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Y. Hiroshige, S. Higashi, K. Matsumoto, and S. Miyazaki, \u201cFormation of High Quality SiO2<\/sub> and SiO2<\/sub>\/Si Interface using Thermal Plasma Jet Induced Millisecond Annealing and Post-Metallization Annealing,\u201d Proc. Int. Symp. Dry Process (DPS2009), (Busan, Korea, Sep. 24-25, 2009)<\/em>, pp. 261-262.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Higashi, N. Koba, T. Matsumoto, and S. Miyazaki, \u201cControl of Growth Orientation during Rapid Solidification of Si Microliquid,\u201d Abs. 23rd<\/sup> Int. Conf. Amorphous Nanocrystalline Semiconductors (ICANS23), (Utrecht, Netherlands, Aug. 23-28, 2009)<\/em>, p. 252.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Okada, S. Higashi, H. Kaku, K. Makihara, H. Furukawa, Y. Hiroshige, and S. Miyazaki, \u201cEffect of Chemical Composition of SiOx<\/sub> Films on Rapid Formation of Si Nanocrystals Induced by Thermal Plasma Jet Irradiation,\u201d Abs. 23rd<\/sup> Int. Conf. Amorphous Nanocrystalline Semiconductors (ICANS23), (Utrecht, Netherlands, Aug. 23-28, 2009)<\/em>, p. 365.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, Y. Miyazaki, T. Okada, H. Kaku, K. Shimanoe, A. Ohta, M Ikeda, S. Higashi, and S, Miyazaki, \u201cSelective Crystallization of a-Ge:H Thin Films by Pt-coating and Exposing to Remote H2<\/sub> Plasma,\u201d Abs. 23rd<\/sup> Int. Conf. Amorphous Nanocrystalline Semiconductors (ICANS23), (Utrecht, Netherlands, Aug. 23-28, 2009)<\/em>, p. 360.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited]<\/strong> S. Higashi, \u201cMillisecond Thermal Processing for TFT and ULSI,\u201d Semiconductor Tech. Ultra Large Scale Integrated Circuits and Thin Film Transistors II, (Xi\u2019an, China, Jul. 5-10, 2009)<\/em>.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Sugakawa, S. Higashi, H. Kaku, T. Okada, and S. Miyazaki, \u201cCharacterization of Microcrystalline Silicon Thin Film Transistors Fabricated by Thermal Plasma Jet Crystallization Technique,\u201d Proc. AM-FPD09, (Nara, Japan, Jul. 1-3, 2009)<\/em>, pp. 117-120.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, D. Kanme, H. Murakami, S. Higashi, and S. Miyazaki, \u201cCharacterization of Interfacial Reaction and Chemical Bonding Features of LaOx<\/sub>\/HfO2<\/sub> Stack Structure Formed on Thermally-grown SiO2<\/sub>\/Si(100),\u201d 16th<\/sup> biannual Conf. Insulating Films Semiconductors 2009 (INFOS2009), (Cambridge, UK, Jun. 29 \u2013 Jul. 1, 2009)<\/em>, p. 178.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Murakami, S. Mahboob, K. Katayama, K. Makihara, M. Ikeda, Y. Hata, A. Kuroda, S. Higashi, and S. Miyazaki, \u201cElectrical Detection of Silicon Binding Protein-Protein A using a p-MOSFET Sensor,\u201d 2009 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2009), (Busan, Korea, Jun. 24-26, 2009)<\/em>, 2B-8.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, K. Shimanoe, A. Kawanami, A. Fujimoto, M. Ikeda, S. Higashi, and S. Miyazaki, \u201cFormation Mechanism of Metal Nanodots Induced by Remote Plasma Exposure,\u201d European Mat. Res. Soc. (E-MRS) 2009 Spring Meeting, (Strasbourg, France, Jun. 8-12, 2009)<\/em>, Q8-19.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Okada, S. Higashi, H. Kaku, H. Furukawa, K. Sugakawa, and S. Miyazaki, \u201cSi Nanocrystals Formation in SiO2<\/sub>\/SiOx<\/sub>\/SiO2<\/sub> Stack Structure by Thermal Plasma Jet Annealing and Its Application to Floating Gate Memory,\u201d Mat. Res. Soc. Spring Meeting (San Francisco, USA, Apr. 13-17, 2009)<\/em>, A19.8.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u672c\u3000\u548c\u4e5f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u9ad8\u5bc6\u5ea6\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u6025\u901f\u71b1\u51e6\u7406\u306b\u3088\u308b\u6975\u6d45\u63a5\u5408\u4e2d\u306e\u9ad8\u52b9\u7387\u4e0d\u7d14\u7269\u6d3b\u6027\u5316\u201d\u3001 \u7b2c57\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6 13-212 (2010.3.17-20\u3001\u6771\u6d77\u5927\u5b66\u6e58\u5357\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5e83\u91cd\u3000\u5eb7\u592b\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u6797\u3000\u5c06\u5e73\u3001\u897f\u7530\u3000\u60a0\u4eae\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u5927\u6c17\u5727\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u306b\u3088\u308b\u30b2\u30fc\u30c8\u7d76\u7e01\u819c\u306e\u4fe1\u983c\u6027\u5411\u4e0a\u201d\u3001 \u7b2c57\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6 13-217 (2010.3.17-20\u3001\u6771\u6d77\u5927\u5b66\u6e58\u5357\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5e83\u91cd\u3000\u5eb7\u592b\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u5927\u6c17\u5727\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305fSi \u819c\u306e\u9ad8\u901f\u6a2a\u65b9\u5411\u7d50\u6676\u6210\u9577\u3068 TFT \u306e\u96fb\u6c17\u7279\u6027\u8a55\u4fa1\u201d\u3001 \u7b2c57\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6 13-221 (2010.3.17-20\u3001\u6771\u6d77\u5927\u5b66\u6e58\u5357\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5e83\u91cd\u3000\u5eb7\u592b\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u5927\u6c17\u5727DC \u30a2\u30fc\u30af\u653e\u96fb\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u6eb6\u878d\u9818\u57df\u306e\u9ad8\u901f\u8d70\u67fb\u306b\u3088\u308b\u9ad8\u7d50\u6676\u6027 Si \u819c\u306e\u5f62\u6210\u3068TFT \u5fdc\u7528\u201d\u3001 \u7b2c57\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6 08-086 (2010.3.17-20\u3001\u6771\u6d77\u5927\u5b66\u6e58\u5357\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u7b52\u4e95\u3000\u5553\u559c\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5e83\u91cd\u3000\u5eb7\u592b\u3001\u677e\u672c\u3000\u548c\u4e5f\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u91ce\u53e3\u3000\u9686\u3001\u201c\u30ea\u30e2\u30fc\u30c8\u6c34\u7d20\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u306b\u304a\u3051\u308b\u77f3\u82f1\u57fa\u677f\u8868\u9762\u6e29\u5ea6\u306e\u975e\u63a5\u89e6\u6e2c\u5b9a\u201d\u3001 \u7b2c57\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6 08-089 (2010.3.17-20\u3001\u6771\u6d77\u5927\u5b66\u6e58\u5357\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5bae\u5d0e\u3000\u7950\u4ecb\u3001\u7267\u539f\u3000\u514b\u5178\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cPt\/a-Ge:H\u306e\u30ea\u30e2\u30fc\u30c8\u6c34\u7d20\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u306b\u3088\u308bPtGe\u8584\u819c\u5f62\u6210\u201d\u3001 \u7b2c57\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6 13-180 (2010.3.17-20\u3001\u6771\u6d77\u5927\u5b66\u6e58\u5357\u30ad\u30e3\u30f3\u30d1\u30b9)\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5f8c\u85e4\u3000\u512a\u592a\u3001\u8cab\u76ee\u3000\u5927\u4ecb\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u5c09\u56fd\u6d5c\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u8aa0\u4e00\u3001 \u201cTiO2<\/sub>\/Pt\u754c\u9762\u306b\u304a\u3051\u308b\u5316\u5b66\u7d50\u5408\u72b6\u614b\u5206\u6790\u3068\u62b5\u6297\u5909\u5316\u7279\u6027\u8a55\u4fa1\u201d\u3001 \u30b2\u30fc\u30c8\u30b9\u30bf\u30c3\u30af\u7814\u7a76\u4f1a \u7b2c15\u56de\u7814\u7a76\u4f1a \u6975\u8584\u30b7\u30ea\u30b3\u30f3\u9178\u5316\u819c\u306e\u5f62\u6210\u30fb\u8a55\u4fa1\u30fb\u4fe1\u983c\u6027, P-26, pp.209-213. (2010.1.22-23\u3001\u6771\u30ec\u7dcf\u5408\u7814\u4fee\u30bb\u30f3\u30bf\u30fc)\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5e83\u91cd\u3000\u5eb7\u592b\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u677e\u672c\u3000\u548c\u4e5f\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u53ca\u3073\u30dd\u30b9\u30c8\u30e1\u30bf\u30e9\u30a4\u30bc\u30fc\u30b7\u30e7\u30f3\u30a2\u30cb\u30fc\u30eb\u3092\u7528\u3044\u305f\u9ad8\u54c1\u8ceaSiO\u2082\u819c\u53ca\u3073SiO\/Si\u754c\u9762\u306e\u5f62\u6210\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c6\u56de\u7814\u7a76\u96c6\u4f1a\u30013P48\uff08pp.234-236\uff09\uff082009.11.2-3\u3001\u9f8d\u8c37\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u672c\u3000\u7adc\u5f25\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cSi\u30de\u30a4\u30af\u30ed\u878d\u6db2\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308b\u6c34\u7d20\u7d42\u7aefSi\u8868\u9762\u3067\u306e\u7d50\u6676\u6210\u9577\u5236\u5fa1\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c6\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u30003P08\uff08pp.110-112\uff09\uff082009.11.2-3\u3001\u9f8d\u8c37\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u5927\u6c17\u5727DC\u30a2\u30fc\u30af\u653e\u96fb\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308ba-Si\u819c\u306e\u6a2a\u65b9\u5411\u7d50\u6676\u6210\u9577\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c6\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u30002P03\uff08pp96-98\uff09\uff082009.11.2-3\u3001\u9f8d\u8c37\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u672c\u3000\u548c\u4e5f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u6025\u901f\u71b1\u51e6\u7406\u4e2d\u306e\u52a0\u71b1\u30fb\u51b7\u5374\u901f\u5ea6\u7cbe\u5bc6\u5236\u5fa1\u3068\u4e0d\u7d14\u7269\u6d3b\u6027\u5316\u3078\u306e\u5f71\u97ff\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c6\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u30003O02\uff08pp.63-66\uff09\uff082009.11.2-3\u3001\u9f8d\u8c37\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5e83\u91cd\u3000\u5eb7\u592b\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u677e\u672c\u3000\u548c\u4e5f\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u306b\u3088\u308b\u4f4e\u6e29\u5f62\u6210SiO2<\/sub> \u819c\u306e\u9ad8\u54c1\u8cea\u5316\u201d\u3001\u7b2c70\u56de\u5fdc\u7528\u7269\u7406\u5b66\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 1, p. 185 (2009.9.8-11\u3001\u5bcc\u5c71\u5927\u5b66\u4e94\u798f\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5e83\u91cd\u3000\u5eb7\u592b\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u677e\u672c\u3000\u548c\u4e5f\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u53ca\u3073\u30dd\u30b9\u30c8\u30e1\u30bf\u30e9\u30a4\u30bc\u30fc\u30b7\u30e7\u30f3\u30a2\u30cb\u30fc\u30eb\u3092\u7528\u3044\u305f\u9ad8\u54c1\u8ceaSiO2<\/sub> \u819c\u53ca\u3073SiO2<\/sub>\/Si \u754c\u9762\u306e\u5f62\u6210\u201d\u3001\u7b2c70\u56de\u5fdc\u7528\u7269\u7406\u5b66\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 769 (2009.9.8-11\u3001\u5bcc\u5c71\u5927\u5b66\u4e94\u798f\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u672c\u3000\u548c\u4e5f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u6025\u901f\u71b1\u51e6\u7406\u4e2d\u306e\u52a0\u71b1\u30fb\u51b7\u5374\u901f\u5ea6\u5236\u5fa1\u3068\u4e0d\u7d14\u7269\u6d3b\u6027\u5316\u201d\u3001\u7b2c70\u56de\u5fdc\u7528\u7269\u7406\u5b66\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 767 (2009.9.8-11\u3001\u5bcc\u5c71\u5927\u5b66\u4e94\u798f\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6797\u3000\u5c06\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u5927\u6c17\u5727DC \u30a2\u30fc\u30af\u653e\u96fb\u30de\u30a4\u30af\u30ed\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308ba-Si \u819c\u306e\u7d50\u6676\u5316\u201d\u3001\u7b2c70\u56de\u5fdc\u7528\u7269\u7406\u5b66\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 764 (2009.9.8-11\u3001\u5bcc\u5c71\u5927\u5b66\u4e94\u798f\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5bae\u5d0e\u3000\u7950\u4ecb\u3001\u7267\u539f\u3000\u514b\u5178\u3001\u5ddd\u6d6a\u3000\u5f70\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6c60\u7530\u3000\u5f25\u592e\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u30ea\u30e2\u30fc\u30c8\u6c34\u7d20\u30d7\u30e9\u30ba\u30de\u652f\u63f4\u306b\u3088\u308b\u8868\u9762\u88ab\u8986\u3057\u305fa-Ge\u8584\u819c\u306e\u5c40\u6240\u7d50\u6676\u5316\u201d\u3001 \u7b2c70\u56de\u5fdc\u7528\u7269\u7406\u5b66\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 765 (2009.9.8-11\u3001\u5bcc\u5c71\u5927\u5b66\u4e94\u798f\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5f8c\u85e4\u3000\u512a\u592a\uff0c\u8cab\u76ee\u3000\u5927\u4ecb\uff0c\u5927\u7530\u3000\u6643\u751f\uff0c\u5c09\u56fd\u6d5c\uff0c\u6751\u4e0a\u3000\u79c0\u6a39\uff0c\u6771\u3000\u6e05\u4e00\u90ce\uff0c\u5bae\u5d0e\u8aa0\u4e00\u3001 \u201cX\u7dda\u5149\u96fb\u5b50\u5206\u5149\u6cd5\u306b\u3088\u308bTiO2<\/sub>\/Pt\u754c\u9762\u306e\u5316\u5b66\u7d50\u5408\u72b6\u614b\u5206\u6790,\u201d 2009\u5e74\u7b2c70\u56de\u79cb\u5b63 \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a, 9a-H-4, p.550 (2009.9.8-11\u3001\u5bcc\u5c71\u5927\u5b66\u4e94\u798f\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u672c\u3000\u7adc\u5f25\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u6728\u5ead\u76f4\u6d69\u3001\u5bae\u5d0e\u8aa0\u4e00\u3001\u201c Si\u30de\u30a4\u30af\u30ed\u878d\u6db2\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308b\u6c34\u7d20\u7d42\u7aefSi\u8868\u9762\u4e0a\u3067\u306e\u7d50\u6676\u6210\u9577\u5236\u5fa1\u201d\u3001 \u7b2c14\u56de\uff082009\u5e74\u5ea6\uff09\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u4e2d\u56fd\u56db\u56fd\u652f\u90e8 \u5b66\u8853\u8b1b\u6f14\u4f1a\uff08Cp1-3\uff09\uff082009\u5e749\u670810\u65e5\u3001\u5e83\u5cf6\u5927\u5b66\uff09\uff08\u767a\u8868\u5968\u52b1\u8cde\u53d7\u8cde\uff09<\/strong><\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5f8c\u85e4\u3000\u512a\u592a\u3001\u5927\u7530\u3000\u6643\u751f\u3001\u8cab\u76ee\u3000\u5927\u4ecb\u3001\u5c09\u56fd\u6d5c\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u8aa0\u4e00\u3001 \u201cTiO2<\/sub>\/Pt\u754c\u9762\u306e\u5316\u5b66\u7d50\u5408\u304a\u3088\u3073\u96fb\u5b50\u72b6\u614b\u8a55\u4fa1\u201d\u3001 \u96fb\u6c17\u901a\u4fe1\u60c5\u5831\u5b66\u4f1a(SDM) [\u30b7\u30ea\u30b3\u30f3\u6750\u6599\u30fb\u30c7\u30d0\u30a4\u30b9]\u30b7\u30ea\u30b3\u30f3\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u5206\u79d1\u4f1a 6\u6708\u5ea6\u5408\u540c\u7814\u7a76\u4f1a, SDM2009-44, pp.99-103 (\u6771\u4eac\u3001\u6771\u4eac\u5927\u5b66 \u99d2\u5834\u30ea\u30b5\u30fc\u30c1\u30ad\u30e3\u30f3\u30d1\u30b9\u751f\u7523\u6280\u8853\u7814\u7a76\u62402009\u5e746\u670819\u65e5)<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2008\u5e74\u5ea6<\/p>\n\n\n\n

A. Kawanami, K. Shimanoe, K. Makihara, M. Ikeda, S. Higashi, and S. Miyazaki, \u201cImpact of Remote Plasma Treatment on Formation of Metal Nanodots on Ultrathin SiO2<\/sub>,\u201d 2nd<\/sup> Int. Conf. Plasma-Nano Technol. & Sci. (IC-PLANTS2009), (Nagoya, Japan, Jan. 22-23, 2009)<\/em>, P-09.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
N. Koba, S. Higashi, T. Okada, T. Matsumoto, H. Murakami, and S. Miyazaki, \u201cA Novel Millisecond Crystallization Technique Using Si Micro Liquid,\u201d Proc. 5th<\/sup> Int. TFT Conf. (Paris, France, Mar. 5-6, 2009)<\/em>, pp. 263-266.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Y. Hiroshige, S. Higashi, H. Kaku, H. Furukawa, T. Okada, and S. Miyazaki, \u201cImprovement of Bond Structure and Electrical Properties of Low-Temperature Deposited SiO2<\/sub> Films by Thermal Plasma Jet Induced Millisecond Annealing,\u201d Plasma Sci. Symp. 2009 and 26th<\/sup> Symp. Plasma Processing (PSS-2009\/SPP-26\uff09Proc. (Nagoya, Japan, Feb. 2-4, 2009), <\/em>pp. 496-497.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Furukawa, S. Higashi, T. Okada, H. Murakami, and S. Miyazaki, \u201cGeneration of High Density Thermal Plasma Jet and Its Application to Millisecond Annealing of Si Wafer Surface for Shallow Junction Formation,\u201d Proc. Int. Symp. Dry Process (DPS2008), (Tokyo, Japan, Nov. 26-28, 2008)<\/em>, pp. 267-268.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Shimanoe, K. Makihara, M. Ikeda, S. Higashi, and S. Miyazaki, \u201cMetal Nanodots Formation Induced by Remote Plasma Treatment -Comparison between the effects of H2<\/sub> and rare gas plasmas-,\u201d Int. Union Mat. Res. Soc. \u2013 Int. Conf. in Asia 2008 (IUMRS-ICA 2008), (Nagoya, Japan, Nov. 9-13, 2008)<\/em>, p. 213.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, K. Shimanoe, M. Ikeda, A. Ohta, S. Higashi, and S. Miyazaki, \u201cElectronic Charged States of Pt-silicide Nanodots as Evaluated by Using an AFM\/Kelvin Probe Technique,\u201d Int. Union Mat. Res. Soc. \u2013 Int. Conf. in Asia 2008 (IUMRS-ICA 2008), (Nagoya, Japan, Nov. 9-13, 2008)<\/em>, p. 213.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
R. Yougauchi, A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki, \u201cLa-Oxide Thin Films Formed by MOCVD Using La(TMOD)3<\/sub>,\u201d Int. Union Mat. Res. Soc. \u2013 Int. Conf. in Asia 2008 (IUMRS-ICA 2008), (Nagoya, Japan, Nov. 9-13, 2008)<\/em>, p. 214.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
D. Kanme, A. Ohta, R. Yougauchi, H. Murakami, S. Higashi, and S. Miyazaki, \u201cCharacterization of Chemical Bonding Features in HfGdxOy film formed by MOCVD using DPM precursors,\u201d 2008 Int. Workshop Dielectric Thin Films for Future ULSI Dev. (IWDTF2008), (Tokyo, Japan, Nov. 5-7, 2008)<\/em>, pp. 25-26.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, A. Ohta, R. Matsumoto, M. Ikeda, K. Shimanoe, S. Higashi, and S. Miyazaki, \u201cCharacterization of Chemical Bonding Features and Electronic States of Ni-Silicide Nanodots Formed by a Remote H2<\/sub>-Plasma Assisted Technique,\u201d 4th<\/sup> Vac. and Surf. Sci. Conf. Asia and Australia (VASSCAA-4), (Matsue, Japan, Oct. 28-31, 2008)<\/em>, p. 45.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, A. Kawanami, M. Ikeda, S. Higashi, and S. Miyazaki, \u201cNucleation Control for High Density Formation of Si-based Quantum Dots on Ultrathin SiO2<\/sub>,\u201d Joint Int. Meeting 214th<\/sup> Electrochem. Soc. (ECS) Meeting and 2008 Fall Meeting Electrochem. Soc. Jpn. (PRiME 2008) Abs., SiGe & Ge Materials, Processing and Device Symp. (Honolulu, Hawaii, USA, Oct. 12-17, 2008)<\/em>, #2403.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Okada, S. Higashi, H. Kaku, H. Furukawa, and S. Miyazaki, \u201cFormation of Si Nanocrystals in SiOx<\/sub> Films Induced by Thermal Plasma Jet Annealing and Its Application to Floating Gate Memory,\u201d Joint Int. Meeting 214th<\/sup> Electrochem. Soc. (ECS) Meeting and 2008 Fall Meeting Electrochem. Soc. Jpn. (PRiME 2008) Abs., (Honolulu, Hawaii, USA, Oct. 12-17, 2008)<\/em>, #2283.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, M. Ikeda, S. Higashi, Y. Hata, A. Kuroda, and S. Miyazaki, \u201cAFM\/KFM Detection of Si-tagged ProteinA on HF-last Si(100), Thermally Grown SiO2<\/sub> and Si-QDs Surfaces,\u201d 4th<\/sup> Int. Workshop in New Group IV Semiconductor Nanoelectronics (SiGe(C)2008), (Sendai, Japan, Sept. 25-27, 2008)<\/em>, pp. 39-40.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, A. Kawanami, M. Ikeda, S. Higashi, and S. Miyazaki, \u201cFormation of Ultra High Density Si-based Quantum Dots on Ultrathin SiO2<\/sub>,\u201d 4th<\/sup> Int. Workshop in New Group IV Semiconductor Nanoelectronics (SiGe(C)2008), (Sendai, Japan, Sept. 25-27, 2008)<\/em>, pp. 37-38.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Okada, S. Higashi, H. Kaku, and S. Miyazaki, \u201cPhotoluminescent Properties of Thermal Plasma Jet Annealed SiOx<\/sub> Films Prepared by Plasma Enhanced Chemical Vapor Deposition,\u201d 1st<\/sup> Int. Conf. Microelectronics and Plasma Technol. (ICMAP 2008), (Jeju, Korea, Aug. 18-20, 2008), <\/em>p. 192.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Furukawa, S. Higashi, T. Okada, H. Kaku, H. Murakami, and S. Miyazaki, \u201cMillisecond Rapid Thermal Annealing of Si Wafer Induced by High Density Thermal Plasma Jet Irradiation,\u201d Ext. Abs. 2008 Int. Conf. Solid Sate Dev. Mat. (SSDM2008), (Tsukuba, Japan, Sept. 24-26, 2008)<\/em>, pp. 852-853.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, H. Murakami, S. Higashi, S. Miyazaki, M. Tanioku, M. Horikawa, and A. Ogishima, \u201cPhotoemission Study of Chemical Bonding Features and Electronic States of Ultrathin HfTix<\/sub>Oy<\/sub>\/Pt System,\u201d Ext. Abs. 2008 Int. Conf. Solid Sate Dev. Mat. (SSDM2008), (Tsukuba, Japan, Sept. 24-26, 2008)<\/em>, pp. 684-685.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Shimanoe, K. Makihara, M. Ikeda, R. Matsumoto, S. Higashi, and S. Miyazaki, \u201cFormation of Pd Nanodots Induced by Remote Hydrogen Plasma Treatment and Its Application to Floating Gate MOS Memories,\u201d 2008 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2008), (Hokkaido, Japan, Jul. 9-11, 2008)<\/em>, pp. 77-80.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Kaku, K. Makihara, M. Ikeda, S. Higashi, and S. Miyazaki, \u201cElectrical Properties of Highly Crystallized Ge:H Thin Films Grown from VHF Inductively-Coupled Plasma of H2<\/sub>-diluted GeH4<\/sub>,\u201d 2008 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2008), (Hokkaido, Japan, Jul. 9-11, 2008),<\/em> pp. 271-274.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Mahboob, K. Makihara, H. Kaku, M. Ikeda, S. Higashi, S. Miyazaki, and A. Kuroda, \u201cElectrical Detection of Si-tagged Proteins on HF-last Si(100) and Thermally Grown SiO2<\/sub> Surfaces,\u201d 2008 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2008), (Hokkaido, Japan, Jul. 9-11, 2008),<\/em> pp. 155-158.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Kaku, S. Higashi, T. Yorimoto, T. Okada, H. Furukawa, and S. Miyazaki, \u201cApplication of Thermal Plasma Jet Annealing to Channel Crystallization and Doping for Thin Film Transistor Fabrication,\u201d Dig. Tech. Pap. AM-FPD08, (Tokyo, Japan, Jul. 2-4, 2008)<\/em>, pp. 33-36.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Furukawa, S. Higashi, T. Okada, H. Kaku, H. Murakami, and S. Miyazaki, \u201cIn-situ<\/em> Monitoring of Si Wafer Temperature during Millisecond Rapid Thermal Annealing,\u201d 213th<\/sup> Electrochem. Soc. (ECS) Meeting Abs. (Phoenix, USA, May. 18-22, 2008),<\/em> p. 620.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, A. Kawanami, M. Ikeda, S. Higashi, and S. Miyazaki, \u201cSelective Growth of Self-Assembling Si and SiGe Quantum Dots,\u201d 4th<\/sup> Int. SiGe Technol. and Dev. Meeting (ISTDM2008), (Hsinchu, Taiwan, May 11-14, 2008)<\/em>, pp. 147-148.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Murakami, M. Miura, A. Ohta, R. Yougauchi, S. Higashi, and S. Miyazaki, \u201cPhotoemission Study of Ultrathin Germanium Oxide\/Ge(100) Interfaces,\u201d 4th<\/sup> Int. SiGe Technol. and Dev. Meeting (ISTDM2008), (Hsinchu, Taiwan, May 11-14, 2008)<\/em>, pp. 165-166.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, H. Nakagawa, H. Murakami, S. Higashi, and S. Miyazaki, \u201cCharacterization of Thermal Stability of HfO2<\/sub>\/SiON\/Ge(100) Stacked Structure by using Photoemission Spectroscopy,\u201d 4th<\/sup> Int. SiGe Technol. and Dev. Meeting (ISTDM2008), (Hsinchu, Taiwan, May 11-14, 2008)<\/em>, pp. 88-89.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5e83\u91cd\u3000\u5eb7\u592b\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u53e4\u5ddd\u3000\u5f18\u548c\u3001\u677e\u672c\u3000\u548c\u4e5f\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u306b\u3088\u308bSiO2<\/sub>\u819c\u306e\u819c\u8cea\u6539\u5584(II)\u201d\u3001 \u7b2c56\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 884 (2009.3.30-4.2\u3001\u7b51\u6ce2\u5927\u5b66 \u7b51\u6ce2\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u677e\u672c\u3000\u548c\u4e5f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u53e4\u5ddd\u3000\u5f18\u548c\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c \u9ad8\u30d1\u30ef\u30fc\u5bc6\u5ea6\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u6025\u901f\u71b1\u51e6\u7406\u306b\u3088\u308bSi\u30a6\u30a8\u30cf\u4e2dB\u306e\u6d3b\u6027\u5316\u201d\u3001 \u7b2c56\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 881 (2009.3.30-4.2\u3001\u7b51\u6ce2\u5927\u5b66 \u7b51\u6ce2\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u53e4\u5ddd\u3000\u5f18\u548c\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cSiOx<\/sub>\u819c\u3078\u306e\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u306b\u3088\u308bSi\u30ca\u30ce\u7d50\u6676\u5f62\u6210\u3068\u305d\u306e\u30d5\u30ed\u30fc\u30c6\u30a3\u30f3\u30b0\u30b2\u30fc\u30c8\u30e1\u30e2\u30ea\u5fdc\u7528(II)\u201d\u3001 \u7b2c56\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 877 (2009.3.30-4.2\u3001\u7b51\u6ce2\u5927\u5b66 \u7b51\u6ce2\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6728\u5ead\u3000\u76f4\u6d69\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u677e\u672c\u3000\u7adc\u5f25\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u30de\u30a4\u30af\u30ed\u878d\u6db2\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308b\u9ad8\u7d50\u6676\u6027Si\u306e\u5f62\u6210\u201d\u3001 \u7b2c56\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 877 (2009.3.30-4.2\u3001\u7b51\u6ce2\u5927\u5b66 \u7b51\u6ce2\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u53e4\u5ddd\u3000\u5f18\u548c\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u3092\u7528\u3044\u305fSiOx<\/sub>\u8584\u819c\u304b\u3089\u306eSi\u30ca\u30ce\u7d50\u6676\u5f62\u6210\u3068\u305d\u306e\u96fb\u8377\u6ce8\u5165\u7279\u6027\u201d\u3001 \u7b2c56\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 1, p. 234 (2009.3.30-4.2\u3001\u7b51\u6ce2\u5927\u5b66 \u7b51\u6ce2\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u53e4\u5ddd\u3000\u5f18\u548c\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cSiOx\u819c\u3078\u306e\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u306b\u3088\u308bSi\u30ca\u30ce\u7d50\u6676\u5f62\u6210\u3068\u305d\u306e\u30d5\u30ed\u30fc\u30c6\u30a3\u30f3\u30b0\u30b2\u30fc\u30c8\u30e1\u30e2\u30ea\u5fdc\u7528\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c5\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000P07\uff08pp.106-108\uff09\uff082008.10.31-11.1\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u52a0\u4e45\u3000\u535a\u9686\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u306b\u3088\u308ba-Ge\u8584\u819c\u7d50\u6676\u5316\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c5\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000P08\uff08pp.109-111\uff09\uff082008.10.31-11.1\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u53e4\u5ddd\u3000\u5f18\u548c\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u9ad8\u5bc6\u5ea6\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u6025\u901f\u71b1\u51e6\u7406\u306b\u3088\u308b\u6975\u6d45\u63a5\u5408\u5f62\u6210\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c5\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000P10\uff08pp.112-114\uff09\uff082008.10.31-11.1\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6728\u5ead\u3000\u76f4\u6d69\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cSi\u30de\u30a4\u30af\u30ed\u878d\u6db2\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u57fa\u677f\u8868\u9762\u306e\u30df\u30ea\u79d2\u6607\u964d\u6e29\u7279\u6027\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c5\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000P11\uff08pp.115-117\uff09\uff082008.10.31-11.1\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c71\u672c\u3000\u96c4\u6cbb\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9Si\u5fae\u7d30\u69cb\u9020\u306e\u56fa\u76f8\u7d50\u6676\u5316\u201d\u3001 \u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c5\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000P13\uff08pp.121-122\uff09\uff082008.10.31-11.1\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5e83\u91cd\u3000\u5eb7\u592b\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u306b\u3088\u308bSiO\u2082\u819c\u306e\u819c\u8cea\u6539\u5584\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c5\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000P67\uff08pp.233-235\uff09\uff082008.10.31-11.1\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201cPoly-Si\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u306e5\u5e74\u9593\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c5\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000T02\uff08pp.2-7\uff09\uff082008.10.31-11.1\u3001\u306a\u3089100\u5e74\u4f1a\u9928\uff09\uff0e\u30c1\u30e5\u30fc\u30c8\u30ea\u30a2\u30eb<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u53e4\u5ddd\u3000\u5f18\u548c\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cSiOx<\/sub>\u819c\u3078\u306e\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u306b\u3088\u308bSi\u30ca\u30ce\u7d50\u6676\u5f62\u6210\u3068\u305d\u306e\u30d5\u30ed\u30fc\u30c6\u30a3\u30f3\u30b0\u30b2\u30fc\u30c8\u30e1\u30e2\u30ea\u5fdc\u7528\u201d\u3001\u7b2c69\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 745 (2008.9.2-5\u3001\u4e2d\u90e8\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5e83\u91cd\u3000\u5eb7\u592b\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u306b\u3088\u308bSiO2<\/sub>\u819c\u306e\u819c\u8cea\u6539\u5584\u201d\u3001\u7b2c69\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 740 (2008.9.2-5\u3001\u4e2d\u90e8\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u53e4\u5ddd\u3000\u5f18\u548c\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u9ad8\u5bc6\u5ea6\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308bSi\u30a6\u30a8\u30cf\u8868\u9762\u306e\u30df\u30ea\u79d2\u6025\u901f\u71b1\u51e6\u7406\u201d\u3001\u7b2c69\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 1, p. * (2008.9.2-5\u3001\u4e2d\u90e8\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u53e4\u5ddd\u3000\u5f18\u548c\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u9ad8\u5bc6\u5ea6\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u6025\u901f\u71b1\u51e6\u7406\u306b\u3088\u308b\u4e0d\u7d14\u7269\u6d3b\u6027\u5316\u201d\u3001\u7b2c69\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 736 (2008.9.2-5\u3001\u4e2d\u90e8\u5927\u5b66)<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c71\u672c\u3000\u96c4\u6cbb\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9Si\u5fae\u7d30\u69cb\u9020\u306e\u56fa\u76f8\u7d50\u6676\u5316\u201d\u3001\u7b2c69\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 731 (2008.9.2-5\u3001\u4e2d\u90e8\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6728\u5ead\u3000\u76f4\u6d69\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cSi\u30de\u30a4\u30af\u30ed\u878d\u6db2\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u57fa\u677f\u8868\u9762\u306e\u30df\u30ea\u79d2\u6607\u964d\u6e29\u7279\u6027\u201d\u3001\u7b2c69\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 730 (2008.9.2-5\u3001\u4e2d\u90e8\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u52a0\u4e45\u3000\u535a\u9686\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u306b\u3088\u308ba-Ge\u8584\u819c\u306e\u7d50\u6676\u5316\u201d\u3001\u7b2c69\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 731 (2008.9.2-5\u3001\u4e2d\u90e8\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2007\u5e74\u5ea6<\/p>\n\n\n\n

T. Yorimoto, S. Higashi, H. Kaku, T. Okada, H. Murakami, S. Miyazaki, T. Matsui, A. Masuda, and M. Kondo, \u201cFormation of Low-Defect-Concentration Polycrystalline Si Films by Thermal Plasma Jet Crystallization and Their application to Thin-Film Transistor,\u201d Mat. Res. Soc. Spring Meeting (San Francisco, USA, Mar. 24-28, 2008)<\/em>, A12.3.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Kaku, S. Higashi, H. Furukawa, T. Okada, T. Yorimoto, H. Murakami, and S. Miyazaki, \u201cImpact of Annealing condition on the Efficiency of Dopant Activation Induced by Thermal Plasma Jet Crystallization of Heavily-Phosphorus-Doped Amorphous Si films,\u201d 1st<\/sup><\/em> Int. Conf.  Plasma-NanoTechnol. Sci. (IC-PLANTS2008), (Nagoya, Japan, Mar. 13-14, 2008),<\/em> p. 5.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Okada, S. Higashi, H. Kaku, T. Yorimoto, H. Murakami, and S. Miyazaki, \u201cPhotoluminescent Properties of SiOx Films Formed by Plasma Enhanced Chemical Vapor Deposition,\u201d 1st<\/sup> Int. Conf. Plasma-NanoTechnol. Sci. (IC-PLANTS2008), (Nagoya, Japan, Mar. 13-14, 2008), <\/em>p. 10.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Y. Ono, H. Kaku, K. Makihara, S. Higashi, and S. Miyazaki, \u201cHigh Rate Growth of Highly Crystallized Ge:H Thin Films from VHF Inductively-Coupled Plasma of GeH4<\/sub>,\u201d 1st<\/sup> Int. Conf. Plasma-NanoTechnol. Sci. (IC-PLANTS2008), (Nagoya, Japan, Mar. 13-14, 2008),<\/em> p. 4.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Kaku, S. Higashi, T. Yorimoto, T. Okada, H. Furukawa, H. Murakami, and S. Miyazaki, \u201cFormation of Source and Drain for Polycrystalline Si Thin Film Transistors Using Thermal Plasma Jet Induced Impurity Activation,\u201d Proc. 4th<\/sup> Int. TFT Conf. (Seoul, Korea, Jan. 24-25, 2008)<\/em>, pp. 331-334.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Okada, S. Higashi, H. Kaku, T. Yorimoto, H. Murakami, and S. Miyazaki, \u201cPhotoluminescence of SiOx<\/sub> Films Annealed by Millisecond Irradiation of Thermal Plasma Jet,\u201d Abs. 18th<\/sup> Symp Mat. Res. Soc. Jpn., (Tokyo, Japan, Dec. 7-9, 2007)<\/em>, p.197. [This paper received \u201cAward for Encouragement of Research of Materials Science (Young Scientist)\u201d]<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Yorimoto, S. Higashi, H. Kaku, T. Okada, H. Murakami, S. Miyazaki, T. Matsui, A. Masuda, and M. Kondo, \u201cFormation of Low-Defect-Concentration Polycrystalline Si Films by Thermal Plasma Jet Crystallization Technique,\u201d Proc. Int. Symp. Dry Process (DPS2007), (Tokyo, Japan, Nov. 13-14, 2007)<\/em>, pp. 157-158. [This paper received \u201cDPS2007 Young Researcher Award\u201d]<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Kaku, S. Higashi, H. Furukawa, T. Okada, T. Yorimoto, H. Murakami, and S. Miyazaki, \u201cHigh Efficiency Dopant Activation Induced by Thermal Plasma Jet Crystallization of Heavily-Phosphorus-Doped Amorphous Si Films,\u201d Ext. Abs. 5th<\/sup> Int. Symp. Control of Semiconductor Interfaces (ISCSI-V), (Tokyo, Japan, Nov. 12-14, 2007)<\/em>, pp. 51-52.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
R. Yougauchi, A. Ohta, Y. Munetaka, H. Murakami, S. Higashi, and S. Miyazaki, \u201cThe Impact of Post Deposition NH3<\/sub>-Anneal on La Oxide Films Formed by MOCVD Using La(DPM)3<\/sub>,\u201d Ext. Abs. 5th<\/sup> Int. Symp. Control of Semiconductor Interfaces (ISCSI-V), (Tokyo, Japan, Nov. 12-14, 2007),<\/em> pp. 227-228.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Yoshinaga, A. Ohta, H. Murakami, S. Higashi, S. Miyazaki, M. Kadoshima, and Y. Nara, \u201cEvaluation of Effective Work Function in Ru\/HfSiON\/SiO2<\/sub> Gate Stack Structures \u2013 Thickness Dependence in Bottom SiO2<\/sub> layer,\u201d Ext. Abs. 5th<\/sup> Int. Symp. Control of Semiconductor Interfaces (ISCSI-V), (Tokyo, Japan, Nov. 12-14, 2007)<\/em>, pp. 181-182.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, H. Yoshinaga, H. Murakami, S. Higashi, S. Miyazaki, M. Kadoshima and Y. Nara, \u201cImpact of Low Temperature Anneal on Effective Work Function and Chemical Bonding Features for Ru\/HfSiON\/SiON Gate Stack,\u201d Ext. Abs. 5th<\/sup> Int. Symp. Control of Semiconductor Interfaces (ISCSI-V), (Tokyo, Japan, Nov. 12-14, 2007)<\/em>, pp. 215-216.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Shimanoe, K. Makihara, A. Ohta, M. Ikeda, S. Higashi, and S. Miyazaki, \u201cFormation of PtSi Nanodots Induced by Remote H2<\/sub> Plasma,\u201d 3rd<\/sup> Int. Workshop in New Group IV Semiconductor Nanoelectronics (SiGe(C)2007), (Sendai, Japan, Nov. 8-9, 2007)<\/em>, pp. 37-38.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
M. Ikeda, R. Matsumoto, K. Shimanoe, T. Okada, K. Makihara, S. Higashi, and S. Miyazaki, \u201cCharge Injection Characteristics of NiSi-Dots\/Silicon-Quantum-Dots Stacked Floating Gate in MOS Capacitors,\u201d 3rd<\/sup> Int. Workshop in New Group IV Semiconductor Nanoelectronics (SiGe(C)2007), (Sendai, Japan, Nov. 8-9, 2007)<\/em>, pp. 35-36.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, R. Yougauchi, H. Murakami, S. Higashi, and S. Miyazaki, \u201cPhotoemission Study of Chemical Bonding Features and Electronic States of Ultrathin HfLaxOy Film,\u201d Int. Conf. Atomic Control Surface and Interface-9 (ACSIN-9), (Tokyo, Japan, Nov. 11-15, 2007)<\/em>, p. 176.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
R. Nishihara, K. Makihara, Y. Kawaguchi, M. Ikeda, H. Murakami, S. Higashi, and S. Miyazaki, \u201cCharacterization of Electronic Charged States of Nickel Silicide Nanodots Using AFM\/Kelvin Probe Technique,\u201d Sixth Pacific Rim Int. Conf. Advanced Materials and Processing (PRICM6), (Jeju, Korea, Nov. 6-9, 2007)<\/em>, p. 73.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Sakata, K. Makihara, H. Deki, S. Higashi, and S. Miyazaki, \u201cHigh Rate Growth of Highly-Crystallized Ge Films on Quartz from VHF Inductively-Coupled Plasma of GeH4 + H2<\/sub>,\u201d Sixth Pacific Rim Int. Conf.  Advanced Materials and Processing (PRICM6), (Jeju, Korea, Nov. 6-9, 2007)<\/em>, p. 74.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Sugakawa, S. Higashi, H. Kaku, T. Okada, H. Murakami, and S. Miyazaki, \u201cRapid Phase Transformation of Amorphous Ge Films Induced by Semiconductor Diode Laser Irradiation,\u201d Abs. Laser Processing Semiconductor Devices: Science & Technol. (LPSD \u201907), (Saint-Malo, France, Oct. 1-2, 2007)<\/em>, p. 23.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited]<\/strong> S. Higashi, \u201cApplication of Thermal Plasma Jet to Crystallization of Amorphous Si Films on Glass Substrate and Thin Film Transistor Fabrication,\u201d 6th<\/sup> Asian-European Int. Conf. Plasma Surf. Eng. (AEPSE 2007) Workshop on Flat-panel and Flexible Devices (Nagasaki, Japan, Sept. 28, 2007)<\/em>, p.1.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Furukawa, S. Higashi, T. Okada, H. Kaku, H. Murakami, and S. Miyazaki, \u201cIn-situ<\/em> Measurement of Temperature Variation in Si Wafer During Millisecond Rapid Thermal Annealing Induced by Thermal Plasma Jet Irradiation,\u201d Ext. Abs. 2007 Int. Conf. Solid Sate Dev. Mat. (SSDM2007), (Tsukuba, Japan, Sept. 19-21, 2007)<\/em>, pp. 376-377.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, K. Shimanoe, M. Ikeda, S. Higashi, and S. Miyazaki, \u201cSelf-Assembling Formation of Ninanodots on SiO2<\/sub> Induced by Remote H2<\/sub>-Plasma Treatment and Their Electrical Charging Characteristics,\u201d Ext. Abs. 2007 Int. Conf. Solid Sate Dev. Mat. (SSDM2007), (Tsukuba, Japan, Sept. 19-21, 2007)<\/em>, pp. 1108-1109.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Okuyama, K. Makihara, M. Ikeda, S. Higashi, and S. Miyazaki, \u201cElectroluminescence from Multiple-Stacked Structures of Impurity Doped Si Quantum Dots,\u201d Ext. Abs. 2007 Int. Conf. Solid Sate Dev. Mat. (SSDM2007), (Tsukuba, Japan, Sept. 19-21, 2007),<\/em> pp. 106-107.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
R. Matsumoto, M. Ikeda, S. Higashi, and S. Miyazaki, \u201cCharacterization of Multistep Electron Charging and Discharging of Silicon-Quantum-Dots Floating Gate by Applying Pulsed Gate Biases,\u201d Ext. Abs. 2007 Int. Conf. Solid Sate Dev. Mat. (SSDM2007), (Tsukuba, Japan, Sept. 19-21, 2007),<\/em> pp. 1112-1113.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Kaku, S. Higashi, H. Furukawa, T. Okada, H. Murakami, and S. Miyazaki, \u201cDopant Activation Induced by Thermal Plasma Jet Crystallization of Heavily-Phosphorus-Doped Amorphous Si Films,\u201d Dig. Tech. Pap. AM-FPD07, (Hyogo, Japan, Jul. 11-13, 2007)<\/em>, pp. 33-36.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Y. Miyazaki, S. Higashi, T. Karakawa, H. Murakami, and S. Miyazaki, \u201cNucleation Control in the Initial Stage of Microcrystalline Silicon Film Growth Using Plasma Pretreatment,\u201d Abs. 20th<\/sup> Symp. Plasma Sci. Mat. (SPSM-20), (Nagoya, Japan, Jun. 21-22, 2007)<\/em>, p. 94.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, M. Ikeda, S. Higashi, and S. Miyazaki, \u201cProgress on Charge Distribution in Multiply-Stacked Si Quantum Dots\/SiO2<\/sub> Structure as Evaluated by AFM\/KFM,\u201d 2007 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2007), (Gyeongju, Korea, Jun. 25-27, 2007)<\/em>, pp. 251-254.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Okuyama, K. Makihara, A. Ohta, H. Murakami, M. Ikeda, S. Higashi, and S. Miyazaki, \u201cImpact of Boron Doping to Si Quantum Dots on Light Emission Properties,\u201d 2007 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2007), (Gyeongju, Korea, Jun. 25-27, 2007),<\/em> pp. 135-138.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, Y. Munetaka, A. Tsugou, K. Makihara, H. Murakami, S. Higashi, S. Miyazaki, S. Inumiya, and Y. Nara, \u201cCharacterization of Chemical Bonding Features and Defect State Density in HfSiOx<\/sub>Ny\/SiO2<\/sub> Gate Stack,\u201d 15th<\/sup> Biannual Conf. Insulating Films on Semiconductors 2007 (INFOS2007), (Glyfada, Greece, Jun. 19-23, 2007)<\/em>, pp. 251-254.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, M. Ikeda, A. Ohta, H. Murakami, R. Matsumoto, E. Ikenaga, M. Kobata, J. Kim, S. Higashi, and S. Miyazaki, \u201cPhosphorus Doping to Si Quantum Dots for Floating Gate Application,\u201d 2007 Silicon Nanoelectronics Workshop (Kyoto, Japan, Jun. 10-11, 2007)<\/em>, pp. 161-162.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, K. Shimanoe, Y. Kawaguchi, M. Ikeda, S. Higashi, and S. Miyazaki, \u201cFormation of Ni Nanodots Induced by Remote Hydrogen Plasma,\u201d European Mat. Res. Soc. (E-MRS) 2007 Spring Meeting (Strasbourg, France, May 28- Jun. 1, 2007)<\/em>, K-3 4.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, M. Ikeda, S. Higashi, and S. Miyazaki, \u201cImpact of impurity Doping into Si Quantum Dots with Ge Core on Their Electrical Charging Characteristics,\u201d 5th<\/sup> Int. Conf. Silicon Epitaxy and Heterostructures (ICSI-5), (Marseille, France, May 20-25, 2007)<\/em>, pp. 313-314.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Sakata, K. Makihara, H. Deki, S. Higashi, and S. Miyazaki, \u201cLow Temperature High-rate Growth of Crystalline Ge Films on Quartz and Crystalline Si Substrates from VHF Inductively-Coupled Plasma of GeH4<\/sub>,\u201d 5th<\/sup> Int. Conf. Silicon Epitaxy and Heterostructures (ICSI-5), (Marseille, France, May 20-25, 2007)<\/em>, pp. 214-215.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, Y. Kawaguchi, M. Ikeda, S. Higashi, and S. Miyazaki, \u201cLuminescence Study of Multiply-Stacked Structures Consisting of Impurity-Doped Si Quantum Dots and Ultrathin SiO2<\/sub>,\u201d 2007 Int. Meeting Future Electron Dev. Kansai (IMFEDK2007), (Osaka, Japan, Apr. 23-24, 2007)<\/em>, pp. 121-122.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Kaku, S. Higashi, T. Okada, T. Yorimoto, H. Murakami, and S. Miyazaki, \u201cHigh Efficiency Activation of Phosphorus Atoms Induced by Thermal Plasma Jet Crystallization of Doped Amorphous Si Films,\u201d Abs. 2007 Mat. Res. Soc. Spring Meeting (San Francisco, USA, Apr. 9-13, 2007)<\/em>, p. 27.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u52a0\u4e45\u3000\u535a\u9686\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bc4\u672c\u3000\u62d3\u4e5f\u3001\u53e4\u5ddd\u3000\u5f18\u548c\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201d\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u6025\u901f\u71b1\u51e6\u7406\u306b\u3088\u308bSi\u819c\u4e2d\u30c9\u30fc\u30d1\u30f3\u30c8\u306e\u6d3b\u6027\u5316(II),\u201d \u7b2c55\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 899 (2008.3.27-30\u3001\u65e5\u672c\u5927\u5b66\u7406\u5de5\u5b66\u90e8\u8239\u6a4b\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u53e4\u5ddd\u3000\u5f18\u548c\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201d\u9ad8\u5bc6\u5ea6\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308bSi\u30a6\u30a8\u30cf\u8868\u9762\u306e\u30df\u30ea\u79d2\u8d85\u6025\u901f\u71b1\u51e6\u7406,\u201d \u7b2c55\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 898 (2008.3.27-30\u3001\u65e5\u672c\u5927\u5b66\u7406\u5de5\u5b66\u90e8\u8239\u6a4b\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u5bc4\u672c\u3000\u62d3\u4e5f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u30d7\u30e9\u30ba\u30deCVD\u306b\u3088\u308a\u5806\u7a4d\u3057\u305fSiOx<\/sub>\u8584\u819c\u304b\u3089\u306e\u30d5\u30a9\u30c8\u30eb\u30df\u30cd\u30c3\u30bb\u30f3\u30b9\u201d\u3001 \u7b2c55\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 883 (2008.3.27-30\u3001\u65e5\u672c\u5927\u5b66\u7406\u5de5\u5b66\u90e8\u8239\u6a4b\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5e83\u91cd\u3000\u5eb7\u592b\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u5bc4\u672c\u3000\u62d3\u4e5f\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u30de\u30eb\u30c1\u30db\u30ed\u30fc\u96fb\u6975\u3092\u7528\u3044\u305f\u53cd\u5fdc\u6027\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306b\u3088\u308bSiO2<\/sub>\u819c\u306e\u4f4e\u6e29\u5f62\u6210\u201d\u3001 \u7b2c55\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 881 (2008.3.27-30\u3001\u65e5\u672c\u5927\u5b66\u7406\u5de5\u5b66\u90e8\u8239\u6a4b\u30ad\u30e3\u30f3\u30d1\u30b9).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u53e4\u5ddd\u3000\u5f18\u548c\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u30df\u30ea\u79d2\u6025\u901f\u71b1\u51e6\u7406\u306b\u304a\u3051\u308bSi\u30a6\u30a8\u30cf\u5185\u6e29\u5ea6\u5909\u5316\u306e\u305d\u306e\u5834\u89b3\u6e2c\u201d\u3001\u96fb\u5b50\u60c5\u5831\u901a\u4fe1\u5b66\u4f1a\u6280\u8853\u7814\u7a76\u5831\u544a\u300117 (388) pp. 27-29. (2007.12.14\u3001\u5948\u826f\u5148\u7aef\u79d1\u5b66\u6280\u8853\u5927\u5b66\u9662\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u5bc4\u672c\u3000\u62d3\u4e5f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u3057\u305fSiOx\u8584\u819c\u306e\u30d5\u30a9\u30c8\u30eb\u30df\u201d\u3001\u30cd\u30c3\u30bb\u30f3\u30b9\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c4\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000P-13\uff08pp.150-151\uff09\uff082007.11.2-3\u3001\u9f8d\u8c37\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u53e4\u5ddd\u3000\u5f18\u548c\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u30df\u30ea\u79d2\u6025\u901f\u71b1\u51e6\u7406\u306b\u304a\u3051\u308bSi\u30a6\u30a8\u30cf\u5185\u6e29\u5ea6\u5909\u5316\u306e\u305d\u306e\u5834\u89b3\u6e2c\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c4\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000P-14\uff08pp.152-154\uff09\uff082007.11.2-3\u3001\u9f8d\u8c37\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5bc4\u672c\u3000\u62d3\u4e5f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316Poly-Si\u819c\u306e\u6b20\u9665\u5bc6\u5ea6\u8a55\u4fa1\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c4\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000P-18\uff08pp.161-163\uff09\uff082007.11.2-3\u3001\u9f8d\u8c37\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u52a0\u4e45\u3000\u535a\u9686\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u53e4\u5ddd\u3000\u5f18\u548c\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u5bc4\u672c\u3000\u62d3\u4e5f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u6025\u901f\u71b1\u51e6\u7406\u306b\u3088\u308bSi\u819c\u4e2d\u30c9\u30fc\u30d1\u30f3\u30c8\u306e\u6d3b\u6027\u5316\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c4\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000P-19\uff08pp.164-166\uff09\uff082007.11.2-3\u3001\u9f8d\u8c37\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u83c5\u5ddd\u3000\u8ce2\u6cbb\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u5149\u7167\u5c04\u30df\u30ea\u79d2\u6025\u901f\u71b1\u51e6\u7406\u306b\u3088\u308ba-Ge:H\u819c\u306e\u76f8\u5909\u5316\u904e\u7a0b\u306e\u305d\u306e\u5834\u89b3\u6e2c\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c4\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000P-20\uff08pp.167-169\uff09\uff082007.11.2-3\u3001\u9f8d\u8c37\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u5bc4\u672c\u3000\u62d3\u4e5f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u3057\u305fSiOx<\/sub>\u8584\u819c\u306e\u30d5\u30a9\u30c8\u30eb\u30df\u30cd\u30c3\u30bb\u30f3\u30b9\u201d\u3001\u7b2c68\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 869 (2007.9.4-8\u3001\u5317\u6d77\u9053\u5de5\u696d\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u83c5\u5ddd\u3000\u8ce2\u6cbb\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u30fc\u5149\u7167\u5c04\u30df\u30ea\u79d2\u6025\u901f\u71b1\u51e6\u7406\u306b\u3088\u308ba-Ge:H\u819c\u306e\u76f8\u5909\u5316\u904e\u7a0b\u306e\u305d\u306e\u5834\u89b3\u6e2c\u201d\u3001\u7b2c68\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 867 (2007.9.4-8\u3001\u5317\u6d77\u9053\u5de5\u696d\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u52a0\u4e45\u3000\u535a\u9686\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u53e4\u5ddd\u3000\u5f18\u548c\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u5bc4\u672c\u3000\u62d3\u4e5f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u30df\u30ea\u79d2\u6025\u901f\u71b1\u51e6\u7406\u306b\u3088\u308bSi\u819c\u4e2d\u30c9\u30fc\u30d1\u30f3\u30c8\u306e\u6d3b\u6027\u5316\u201d\u3001\u7b2c68\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 854 (2007.9.4-8\u3001\u5317\u6d77\u9053\u5de5\u696d\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u53e4\u5ddd\u3000\u5f18\u548c\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u30df\u30ea\u79d2\u6025\u901f\u71b1\u51e6\u7406\u306b\u304a\u3051\u308bSi\u30a6\u30a8\u30cf\u8868\u9762\u6e29\u5ea6\u306e\u975e\u63a5\u89e6\u6e2c\u5b9a\u201d\u3001\u7b2c68\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 849 (2007.9.4-8\u3001\u5317\u6d77\u9053\u5de5\u696d\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5bc4\u672c\u3000\u62d3\u4e5f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316Si\u819c\u306e\u6b20\u9665\u5bc6\u5ea6\u8a55\u4fa1\uff08II\uff09\u201d\u3001\u7b2c68\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 848 (2007.9.4-8\u3001\u5317\u6d77\u9053\u5de5\u696d\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2006\u5e74\u5ea6<\/p>\n\n\n\n

S. Higashi, H. Kaku, T. Okada, H. Murakami, and S. Miyazaki, \u201cUltrarapid thermal annealing induced by DC arc discharge plasma jet its application,\u201d Proc. 5th<\/sup> Int. Symp. Nanotechnol. JAPAN NANO 2007 (Tokyo, Japan, Feb. 20-21, 2007)<\/em>, pp. 144-145.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Higashi, H. Kaku, T. Okada, T. Yorimoto, H. Murakami, and S. Miyazaki, \u201cUltrarapid Thermal Annealing Induced by DC Arc Discharge Plasma Jet Irradiation,\u201d Ext. Abs. Fifth Hiroshima Int. Workshop Nanoelectronics for Tera-Bit Information Processing (Tokyo, Japan, Jan. 29-30, 2007)<\/em>, pp. 68-69.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Okada, S. Higashi, H. Kaku, T. Yorimoto, H. Murakami, and S. Miyazaki, \u201cGrowth of Si Crystalline in SiOx<\/sub> Films Induced by Millisecond Rapid Thermal Annealing Using Thermal Plasma Jet,\u201d Proc. 3rd<\/sup> Int. TFT Conf. (Rome, Italy, Jan. 25-26, 2007)<\/em>, pp. 82-85.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Higashi, T. Yorimoto, T. Okada, H. Kaku, H. Murakami, and S. Miyazaki, \u201cComparison of Defect Densities in Excimer Laser and Thermal Plasma Jet Crystallized Si Films,\u201d Proc. 3rd<\/sup> Int. TFT Conf. (Rome, Italy, Jan. 25-26, 2007)<\/em>, pp. 204-207.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Yorimoto, S. Higashi, H. Kaku, T. Okada, H. Murakami, S. Miyazaki, M. Maki, and T. Sameshima, \u201cElectrical Characteristics of Lightly-Doped Si Films Crsytallized by Thermal Plasma Jet Irradiation,\u201d Abs. 17th<\/sup> Symp Mat. Res. Soc. Jpn. (Tokyo, Japan, Dec. 8-10, 2006)<\/em>, p. 178.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Sakaike, S. Higashi, H. Kaku, T. Sakata, H. Murakami, and S. Miyazaki, \u201cCrystallization of Amorphous Ge Films Induced by Semiconductor Diode Laser Annealing,\u201d Proc. Int. Symp. Dry Process, (Aichi, Japan, Nov. 29-30, 2006)<\/em>, pp. 25-26.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Okada, S. Higashi, H. Kaku, N. Koba, H. Murakami, and S. Miyazaki, \u201cEffect of He Addition on the Heating Characteristics of Substrate Surface Irradiated by Ar Thermal Plasma Jet,\u201d Proc. Int. Symp. Dry Process (Aichi, Japan, Nov. 29-30, 2006)<\/em>, pp. 317-318.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Karakawa, S. Higashi, H. Murakami, and S. Miyazaki, \u201cNucleation Study of Hydrogenated Microcrystalline Silicon (mc-Si:H) Films Deposited by VHF-ICP,\u201d Proc. Int. Symp. Dry Process (Aichi, Japan, Nov. 29-30, 2006)<\/em>, pp. 31-32.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, M. Ikeda, S. Higashi, and S. Miyazaki, \u201cStudy of Charged states of Si Quantum Dots with Ge Core,\u201d 210th<\/sup> Electrochem. Soc. (ECS) Meeting: SiGe & Ge Materials, Processing, and Device Symp. (Cancun, Mexico, Oct. 29 \u2013 Nov. 3, 2006)<\/em>, #1425.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Higashi, H. Kaku, T. Okada, H. Murakami, and S. Miyazaki, \u201cUltrarapid Thermal Annealing Induced by Plasma Jet Irradiation and Its Application to Thin Film Transistor Fabrication,\u201d Ext. Abs. Int. 21st<\/sup> Century COE Symp. Atomistic Fabrication Tech. (Osaka, Japan, Oct. 19-20, 2006)<\/em>, pp. 55-56.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, H. Nakagawa, H. Murakami, S. Higashi, S. Miyazaki, T. Kawahara, K. Torii, and Y. Nara, \u201cCharacterization of Dielectric Stack Structures of Hafnium Silicate and Silicon Oxynitride formed on Si(100),\u201d 2006 Int. Workshop  Dielectric Thin Films for Future ULSI Dev. (IWDTF2006), (Kawasaki, Japan, Nov. 8-10, 2006)<\/em>, pp. 31-32.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Nakagawa, A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki, \u201cPhotoemission Study of HfO2<\/sub>\/Ge(100) Stacked Structures,\u201d 2006 Int. Workshop  Dielectric Thin Films for Future ULSI Dev. (IWDTF2006), (Kawasaki, Japan, Nov. 8-10, 2006)<\/em>, pp. 13-14.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Y. Pei, A. Ohta, H. Murakami, S. Higashi, S. Miyazaki, T. Akasaka, and Y. Nara, \u201cAnalysis of Leakage Current through Ultrathin HfSiOx<\/sub>N\/SiO2<\/sub> Stack Gate Dielectric Capacitors with TiN\/W\/TiN Gate,\u201d 2006 Int. Workshop Dielectric Thin Films for Future ULSI Dev. (IWDTF2006), (Kawasaki, Japan, Nov. 8-10, 2006),<\/em> pp. 107-108.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Nakagawa, A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki, \u201cCharacterization of Chemical Bonding Features of Silicon Oxynitride Films Formed on Ge(100) Surfaces,\u201d Abs. 2nd<\/sup> Int. Workshop New Group IV Semiconductor Nanoelectronics (SiGe(C)2006), (Sendai, Japan, Oct. 2-3, 2006)<\/em>, pp. 63-64.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Sakata, K. Makihara, S. Higashi, and S. Miyazaki, \u201cFormation of Highly-Crystallized Ge:H Films form VHF Inductively-Coupled Plasma of GeH4<\/sub>,\u201d Abs. 2nd<\/sup> Int. Workshop New Group IV Semiconductor Nanoelectronics (SiGe(C)2006), (Sendai, Japan, Oct. 2-3, 2006)<\/em>, pp. 61-62.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Sakaike, S. Higashi, H. Kaku, T. Sakata, H. Murakami, and S. Miyazaki, \u201cSemiconductor Diode Laser Annealing of Amorphous Ge Films,\u201d Abs. 2nd<\/sup> Int. Workshop New Group IV Semiconductor Nanoelectronics (SiGe(C)2006), (Sendai, Japan, Oct. 2-3, 2006)<\/em>, pp. 65-66.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, H. Yoshinaga, H. Murakami, D. Azuma, Y. Munetaka, S. Higashi, S. Miyazaki, T. Aoyama, K. Hosaka, and K. Shibahara, \u201cEvaluation of Chemical Structures and Work Function of NiSi near the Interface between Nickel Silicide and SiO2<\/sub>,\u201d 2006 Int. Conf. Solid State Dev. Mat. (SSDM2006), (Yokohama, Japan, Sept. 13-15, 2006)<\/em>, pp. 216-217.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, Y. Kawaguchi, H. Murakami, S. Higashi, and S. Miyazaki, \u201cCharacterization of Electronic Charged States of Impurity Doped Si Quantum Dots Using AFM\/Kelvin Probe Technique,\u201d Int. Union Mat. Res. Soc.- Int. Conf. in Asia (IUMRS-ICA 2006), (Jeju, Korea, Sept. 10-14, 2006)<\/em>, p. 82.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Sakaike, S. Higashi, H. Kaku, H. Murakami, and S. Miyazaki, \u201cMelting and Solidification of Microcrystalline Si Films Induced by Semiconductor Diode Laser Irradiation,\u201d Dig. Tech. Pap. AM-FPD06, (Tokyo, Japan, Jul. 5-7, 2006)<\/em>, pp. 271-272.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Okada, S. Higashi, N. Koba, H. Kaku, H. Murakami, and S. Miyazaki, \u201cImpact of He Addition on the Substrate Surface Temperature During Rapid Thermal Annealing Induced by Ar Thermal Plasma Jet Irradiation,\u201d Abst. 8th<\/sup> Int. Conf. Advanced Surf. Eng., (Tokyo, Japan, Apr. 25-26, 2006)<\/em>, p. 73.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, Y. Kawaguchi, M. Ikeda, H. Murakami, S. Higashi, and S. Miyazaki, \u201cPhosphorus Doping to Si Quantum Dots and Its Floating Gate Application,\u201d 2006 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2006), (Sendai, Japan, Jul. 3-5, 2006)<\/em>, pp. 135-138.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, T. Nagai, M. Ikeda, Y. Kawaguchi, H. Murakami, S. Higashi, and S. Miyazaki, \u201cCharging and Discharging Characteristics of P-doped Si Quantum Dots Floating Gate,\u201d 2006 Int. Meeting for Future of Electron Dev. Kansai (IMFEDK2006), (Kyoto, Japan, Apr. 24-26, 2006)<\/em>, pp. 67-68.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Kaku, S. Higashi, T. Okada, H. Murakami, and S. Miyazaki, \u201cCorrelation between Annealing Temperature and Crystallinity of Si Films Prepared by Thermal Plasma Jet Crystallization Technique,\u201d Abst. 2006 Mat. Res. Soc. Spring Meeting, (San Francisco, USA, Apr. 17-21, 2006)<\/em>, pp. 43-44.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9152\u6c60\u3000\u8015\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u30fc\u5149\u7167\u5c04\u306b\u3088\u308ba-Ge:H\u819c\u306e\u30df\u30ea\u79d2\u6642\u9593\u76f8\u5909\u5316\u904e\u7a0b\u306e\u305d\u306e\u5834\u89b3\u6e2c\u201d\u3001\u7b2c54\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 898 (2007.3.27-30\u3001\u9752\u5c71\u5b66\u9662\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u5bc4\u672c\u3000\u62d3\u4e5f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308a\u8d85\u6025\u901f\u71b1\u51e6\u7406\u3057\u305fSiOx<\/sub>\u8584\u819c\u306e\u30d5\u30a9\u30c8\u30eb\u30df\u30cd\u30c3\u30bb\u30f3\u30b9\u201d\u3001\u7b2c54\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 899 (2007.3.27-30\u3001\u9752\u5c71\u5b66\u9662\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u52a0\u4e45\u3000\u535a\u9686\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u53e4\u5ddd\u3000\u5f18\u548c\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u5bc4\u672c\u3000\u62d3\u4e5f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u8d85\u6025\u901f\u71b1\u51e6\u7406\u306b\u3088\u308bSi\u819c\u4e2d\u30c9\u30fc\u30d1\u30f3\u30c8\u306e\u6d3b\u6027\u5316\u201d\u3001\u7b2c54\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 907 (2007.3.27-30\u3001\u9752\u5c71\u5b66\u9662\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5bc4\u672c\u3000\u62d3\u4e5f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u677e\u4e95\u3000\u5353\u77e2\u3001\u5897\u7530\u3000\u6df3\u3001\u8fd1\u85e4\u3000\u9053\u96c4\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316Si\u819c\u306e\u6b20\u9665\u5bc6\u5ea6\u8a55\u4fa1\u201d\u3001\u7b2c54\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 917 (2007.3.27-30\u3001\u9752\u5c71\u5b66\u9662\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8f9b\u5ddd\u3000\u5b5d\u884c\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u6c34\u7d20\u30d7\u30e9\u30ba\u30de\u524d\u51e6\u7406\u306b\u3088\u308b\u5fae\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\uff08\u03bcc-Si:H\uff09\u6210\u9577\u521d\u671f\u904e\u7a0b\u306e\u6838\u767a\u751f\u5236\u5fa1\u201d\u3001\u7b2c54\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 976 (2007.3.27-30\u3001\u9752\u5c71\u5b66\u9662\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9152\u6c60\u3000\u8015\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cCW\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u7167\u5c04\u306b\u3088\u308ba-Ge:H\u819c\u306e\u7d50\u6676\u5316\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c3\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000B-15\uff08pp.93-94\uff09\uff082006.11.10-11\u3001\u3042\u3059\u306a\u3089\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8f9b\u5ddd\u3000\u5b5d\u884c\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cVHF-1CP\u306b\u3088\u308b\u5fae\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u5806\u7a4d\u521d\u671f\u904e\u7a0b\u306b\u304a\u3051\u308b\u6838\u767a\u751f\u5236\u5fa1\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c3\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000B-18\uff08pp.102-104\uff09\uff082006.11.10-11\u3001\u3042\u3059\u306a\u3089\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u5bc4\u672c\u3000\u62d3\u4e5f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305fSiOx\u8584\u819c\u306e\u6025\u901f\u71b1\u51e6\u7406\u306b\u3088\u308bSi\u7d50\u6676\u6210\u9577\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c3\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000B-20\uff08pp.107-108\uff09\uff082006.11.10-11\u3001\u3042\u3059\u306a\u3089\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5bc4\u672c\u3000\u62d3\u4e5f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u5fae\u91cf\u30c9\u30fc\u30d7Si\u819c\u306e\u6b20\u9665\u8a55\u4fa1\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c3\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000B-29\uff08pp.130-132\uff09\uff082006.11.10-11\u3001\u3042\u3059\u306a\u3089\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u52a0\u4e45\u3000\u535a\u9686\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bc4\u672c\u3000\u62d3\u4e5f\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201ca-Si\u819c\u306e\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u306b\u304a\u3051\u308b\u57fa\u677f\u52a0\u71b1\u52b9\u679c\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c3\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000B-31\uff08pp.136-138\uff09\uff082006.11.10-11\u3001\u3042\u3059\u306a\u3089\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8f9b\u5ddd\u3000\u5b5d\u884c\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cVHF-ICP\u306b\u3088\u308b\u5fae\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\uff08\u03bcc-Si:H\uff09\u819c\u5806\u7a4d\u521d\u671f\u904e\u7a0b\u306b\u304a\u3051\u308b\u7d50\u6676\u6838\u5f62\u6210\u201d\u3001\u7b2c67\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 829 (2006.8.29-9.1\u3001\u7acb\u547d\u9928\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u5bc4\u672c\u3000\u62d3\u4e5f\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305fSiOx<\/sub>\u8584\u819c\u306e\u6025\u901f\u71b1\u51e6\u7406\u306b\u3088\u308bSi\u30ca\u30ce\u7d50\u6676\u6210\u9577\u201d\u3001\u7b2c67\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 777 (2006.8.29-9.1\u3001\u7acb\u547d\u9928\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5bc4\u672c\u3000\u62d3\u4e5f\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u7267\u3000\u6b63\u4eba\u3001\u9bab\u5cf6\u3000\u4fca\u4e4b\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7d50\u6676\u5316\u5fae\u91cf\u30c9\u30fc\u30d7Si\u819c\u306e\u96fb\u6c17\u7279\u6027\u8a55\u4fa1\u201d\u3001\u7b2c67\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 762 (2006.8.29-9.1\u3001\u7acb\u547d\u9928\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9152\u6c60\u3000\u8015\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5742\u7530\u3000\u52d9\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u306b\u3088\u308ba-Ge:H\u819c\u306e\u6025\u901f\u71b1\u51e6\u7406\u201d\u3001\u7b2c67\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 758 (2006.8.29-9.1\u3001\u7acb\u547d\u9928\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u52a0\u4e45\u3000\u535a\u9686\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308ba-Si\u819c\u306e\u30df\u30ea\u79d2\u76f8\u5909\u5316\u6e29\u5ea6\u306e\u6e2c\u5b9a\u201d\u3001 \u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u4e2d\u56fd\u56db\u56fd\u652f\u90e82006\u5e74\u5ea6\u652f\u90e8\u5b66\u8853\u8b1b\u6f14\u4f1a\u3000\u8b1b\u6f14\u4e88\u7a3f\u96c6 p 115 \uff082006.7.29\u3001\u5fb3\u5cf6\u5927\u5b66)<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2005\u5e74\u5ea6<\/p>\n\n\n\n

H. Kaku, S. Higashi, T. Okada, H. Murakami, and S. Miyazaki, \u201cDirect Observation of Millisecond Phase Transformation in a-Si Films Induced by Thermal Plasma Jet Irradiation,\u201d Proc. 2nd<\/sup> Int. TFT Conf., (Kitakyushu, Japan, Jan. 19-20, 2006)<\/em>, pp. 214-217.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited]<\/strong> S. Higashi, \u201cRapid Thermal Annealing Technique Using Thermal Plasma Jet and Its Application to Thin Film Transistor Fabrication,\u201d Tech. Dig. 12th<\/sup> Int. Display Workshop\/Asia Display 2005, (Takamatsu, Japan, Dec. 6-9, 2005),<\/em> pp. 285-288.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki, \u201cPhotoemission Study of Ultrathin GeO2<\/sub>\/Ge Heterostructures Formed by UV-O3<\/sub> Oxidation,\u201d 4th<\/sup> Int. Symp. Surf. Sci. Nanotechnology (ISSS-4), (Omiya, Japan, Nov. 14-17, 2005)<\/em>, p. 543.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Okada, S. Higashi, H. Kaku, N. Koba, H. Murakami, and S. Miyazaki, \u201cControl of Substrate Surface Temperature in Millisecond Annealing Technique Using Thermal Plasma Jet,\u201d Proc. Int. Symp. Dry Process, (Jeju, Korea, Nov. 28-30, 2005)<\/em>, pp. 405-406.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Sakata, K. Makihara, S. Higashi, and S. Miyazaki, \u201cGrowth of Crystallized Ge Films from VHF-Inductively Coupled Plasma of H2<\/sub>-Diluted GeH4<\/sub>,\u201d Proc. Int. Symp. Dry Process, (Jeju, Korea, Nov. 28-30, 2005)<\/em>, pp. 233-234.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Higashi, T. Okada, N. Fujii, N. Koba, H. Murakami, and S. Miyazaki, \u201cFormation of Si Nano-Crystals by Millisecond Annealing of SiOx<\/sub> Films using Thermal Plasma Jet,\u201d Ext. Abs. Fourth Hiroshima Int. Workshop Nanoelectronics Tera-Bit Information Processing, (Hiroshima, Japan, Sept. 16, 2005)<\/em>, pp. 96-97.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Nagai, M. Ikeda, Y. Shimizu, S. Higashi, and S. Miyazaki, \u201cCharacterization of MultiStep Electron Charging to Silicon-Quantum-Dot Floating Gate by Applying Pulsed Gate Biases,\u201d 2005 Int. Conf. Solid State Dev. Mat. (SSDM2005), (Kobe, Japan. Sept. 12-15, 2005)<\/em>, pp. 174-175.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
[Invited]<\/strong> S. Higashi, \u201cRapid Thermal Annealing of Thin Films in Millisecond Time Domain Using Thermal Plasma Jet,\u201d Dig. Tech. Pap. AM-LCD 05, (Kanazawa, Japan, Jul. 6-8, 2005),<\/em> pp. 75-78.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Okada, S. Higashi, H. Kaku, H. Murakami, and S. Miyazaki: \u201cAnalysis of Transient Temperature Profile During Thermal Plasma Jet Annealing of Si Films on Quartz Substrate,\u201d Dig. Tech. Pap. AM-LCD 05, (Kanazawa, Japan, Jul. 6-8, 2005), <\/em>pp. 171-174.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
J. Nishitani, K. Makihara, Y. Darma, H. Murakami, S. Higashi, and S. Miyazaki, \u201cExperimental Evidence of Coulombic Interaction among Stored Charges in Single Si Dot as Detected By AFM\/Kelvin Probe Technique,\u201d 2005 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2005), (Seoul, Korea, Jun. 28-30, 2005)<\/em>, pp. 177-180.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, Y. Kawaguchi, H. Murakami, S. Higashi, and S. Miyazaki, \u201cThe Application of Multiple-Stacked Si Quantum Dots to Light Emitting Diodes,\u201d 2005 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2005), (Seoul, Korea, Jun. 28-30, 2005)<\/em>, pp. 173-176.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Nakagawa, F. Takeno, A. Ohta, H. Murakami, S. Higashi, and S. Miyazaki, \u201cCharacterization of Chemical Bonding Features of NH3<\/sub>-Annealed Hafnium Oxides Formed on Si(100),\u201d 8th<\/sup> Atomically Controlled Surf., Interfaces and Nanostructures (ACSIN-8), (Stockholm, Sweden, Jun. 19-23, 2005)<\/em>, p. 102.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
J. Xu, K. Makihara, H. Deki, Y. Kawaguchi, H. Murakami, S. Higashi, and S. Miyazaki, \u201cLight Emitting Diode with MOS Structures Containing Multiple-Stacked Si Quantum Dots,\u201d 2005 China Int. Conf. Nanoscience & Technol., (Beijing, China, Jun. 9-11, 2005)<\/em>, p. 126.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, J. Xu, H. Deki, Y. Kawaguchi, H. Murakami, S. Higashi, and S. Miyazaki, \u201cFabrication of Multiply-Stacked Structures Consisting of Si-QDs with Ultrathin SiO2<\/sub> and Its Application of Light Emitting Diodes,\u201d 1st<\/sup> Int. Workshop New GroupIV Semiconductor Nanoelectronics (SiGe(C)2005), (Sendai, Japan, May. 27-28, 2005)<\/em>, pp. 47-48.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
J. Nishitani, K. Makihara, M. Ikeda, H. Murakami, S. Higashi, and S. Miyazaki, \u201cDecay Characteristics of Electronic Charged States of Si Quantum Dots as Evaluated by an AFM\/Kelvin Probe Technique,\u201d Abs. Fourth Int. Conf. Silicon Epitaxy and Heterostructures (ICSI-4), (Awaji Island Hyogo, Japan, May. 23-26, 2005)<\/em>, pp. 294-295.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, J. Xu, M. Ikeda, H. Murakami, S. Higashi, and S. Miyazaki, \u201cCharacterization of Electronic Charged States of P-doped Si Quantum Dots Using AFM\/KFM Probe,\u201d Abs. Fourth Int. Conf. Silicon Epitaxy and Heterostructures (ICSI-4), (Awaji Island Hyogo, Japan, May. 23-26, 2005),<\/em> pp. 32-33.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
A. Yamashita, Y. Okamoto, S. Higashi, S. Miyazaki, H. Watakabe, and T. Sameshima, \u201cIn-situ<\/em> Observation of Rapid Crystalline Growth Induced by Excimer Laser Irradiation to Ge\/Si Stacked Structure,\u201d Abs. Fourth Int. Conf.  Silicon Epitaxy and Heterostructures (ICSI-4), (Awaji Island Hyogo, Japan, May 23-26, 2005)<\/em>, pp. 44-45.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, J. Xu, H. Deki, Y. Kawaguchi, H. Murakami, S. Higashi, and S. Miyazaki, \u201cLight Emitting Devices from Multilayered Si Quantum Dots Structures,\u201d 2005 Int. Meeting Future of Electron Dev. Kansai (IMFEDK2005), (Kyoto, Japan, Apr. 11-13, 2005)<\/em>, pp. 93-94.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Kaku, S. Higashi, T. Okada, H. Murakami, S. Miyazaki, H. Watakabe, N. Andoh, and T. Sameshima, \u201cFabrication of Polycrystalline Si Thin Film Transistor using Plasma Jet Crystallization Technique,\u201d 2005 Int. Meeting Future of Electron Dev. Kansai (IMFEDK2005), (Kyoto, Japan, Apr. 11-13, 2005)<\/em>, pp. 91-92.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u8f9b\u5ddd\u3000\u5b5d\u884c\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cVHF-ICP\u306b\u3088\u308b\u5fae\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\uff08mc-Si:H\uff09\u819c\u5806\u7a4d\u521d\u671f\u904e\u7a0b\u306b\u304a\u3051\u308b\u6838\u767a\u751f\u5236\u5fa1\u201d\u3001\u7b2c53\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 975 (2006.3.22-26\u3001\u6b66\u8535\u5de5\u696d\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9152\u6c60\u3000\u8015\u5e73\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u534a\u5c0e\u4f53\u30ec\u30fc\u30b6\u306b\u3088\u308b\u5fae\u7d50\u6676Si\u819c\u306e\u6025\u901f\u71b1\u51e6\u7406\u201d\u3001\u7b2c53\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 968 (2006.3.22-26\u3001\u6b66\u8535\u5de5\u696d\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u6728\u5ead\u3000\u76f4\u6d69\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305f\u6025\u901f\u71b1\u51e6\u7406\u306b\u3088\u308bSiOx<\/sub>\u8584\u819c\u304b\u3089\u306eSi\u30ca\u30ce\u7d50\u6676\u6210\u9577\u5236\u5fa1\u201d\u3001\u7b2c53\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 909 (2006.3.22-26\u3001\u6b66\u8535\u5de5\u696d\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u52a0\u4e45\u3000\u535a\u9686\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308ba-Si\u819c\u306e\u30df\u30ea\u79d2\u9818\u57df\u76f8\u5909\u5316\u904e\u7a0b\u306e\u76f4\u63a5\u89b3\u6e2c\u201d\u3001\u7b2c53\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 890 (2006.3.22-26\u3001\u6b66\u8535\u5de5\u696d\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6728\u5ead\u3000\u76f4\u6d69\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cHe\u6dfb\u52a0Ar\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u71b1\u51e6\u7406\u306b\u3088\u308b\u57fa\u677f\u6e29\u5ea6\u7279\u6027\u8a55\u4fa1\u201d\u3001\u7b2c53\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 890 (2006.3.22-26\u3001\u6b66\u8535\u5de5\u696d\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cSiOx\u8584\u819c\u306e\u30df\u30ea\u79d2\u9ad8\u6e29\u71b1\u51e6\u7406\u306b\u3088\u308bSi\u30ca\u30ce\u7d50\u6676\u4f5c\u88fd\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c2\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000A-8\uff08pp.43\uff09\uff082005.11.4-5\u3001\u9f8d\u8c37\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u52a0\u4e45\u3000\u535a\u9686\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u30df\u30ea\u79d2\u9818\u57df\u3067\u306eSi\u8584\u819c\u7d50\u6676\u5316\u904e\u7a0b\u306e\u89e3\u6790\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c2\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000A-9\uff08pp.44\uff09\uff082005.11.4-5\u3001\u9f8d\u8c37\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u6728\u5ead\u3000\u76f4\u6d69\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u77ed\u6642\u9593\u71b1\u51e6\u7406\u306b\u304a\u3051\u308b\u57fa\u677f\u8868\u9762\u6e29\u5ea6\u5236\u5fa1\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c2\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000A-10\uff08pp.45\uff09\uff082005.11.4-5\u3001\u9f8d\u8c37\u5927\u5b66\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6771\u3000\u6e05\u4e00\u90ce\u3001\u85e4\u4e95\u3000\u76f4\u4eba\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6728\u5ead\u3000\u76f4\u6d69\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cSiOx<\/sub>\u8584\u819c\u306e\u30df\u30ea\u79d2\u71b1\u51e6\u7406\u306b\u3088\u308bSi\u30ca\u30ce\u7d50\u6676\u4f5c\u88fd\u201d\u3001\u7b2c66\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 745 (2005.9.7-11\u3001\u5fb3\u5cf6\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u52a0\u4e45\u3000\u535a\u9686\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u30df\u30ea\u79d2\u9818\u57df\u3067\u306eSi\u8584\u819c\u7d50\u6676\u5316\u904e\u7a0b\u306e\u89e3\u6790\u201d\u3001\u7b2c66\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 713 (2005.9.7-11\u3001\u5fb3\u5cf6\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u6728\u5ead\u3000\u76f4\u6d69\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u77ed\u6642\u9593\u71b1\u51e6\u7406\u306b\u304a\u3051\u308b\u57fa\u677f\u8868\u9762\u6e29\u5ea6\u5236\u5fa1\u201d\u3001\u7b2c66\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 712 (2005.9.7-11\u3001\u5fb3\u5cf6\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2004\u5e74\u5ea6<\/p>\n\n\n\n

K. Makihara, Y. Kawaguchi, M. Ikeda, H. Murakami, S. Higashi, and S. Miyazaki, \u201cFabrication of Multiple-Stacked Si Quantum Dots and Its Application to Light Emitting Diodes,\u201d 4th<\/sup> Int. Symp. Nanotechnol. (Tokyo, Japan, Feb. 20-21, 2005)<\/em>, pp. 168-169.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Higashi, H. Kaku, T. Okada, H. Taniguchi, H. Murakami, and S. Miyazaki, \u201cCrystallization of Amorphous Si Films on Glass Substrate Using Plasma Jet and Its Application to Thin Film Transistor Fabrication,\u201d Ext. Abs. 3rd<\/sup> Hiroshima Int. Workshop Nanoelectronics Tera-Bit Information Processing, (Hiroshima, Japan, Dec. 6, 2004)<\/em>, pp. 86-87<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, H. Nakagawa, M. Ikeda, H. Murakami, S. Higashi, and S. Miyazaki, \u201cFabrication of Multiply-Stacked Structures of Si Quantum-Dots Embedded in SiO2<\/sub> by Combination of Low-Pressure CVD with Remote Plasma Treatments,\u201d 2004 Int. Microprocesses Nanotechnol. Conf. (MNC), (Osaka, Japan, Oct. 27-29, 2004)<\/em>, pp. 216-217.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
T. Nagai, M. Ikeda, H. Murakami, S. Higashi, and S. Miyazaki, \u201cPhoto-Induced Electron Charging to Silicon-Quantum-Dot Floating Gate in Metal-Oxide-Semiconductor Memories,\u201d 2004 Int. Conf. Solid State Dev. Mat. (SSDM2004), (Tokyo, Japan, Sept. 14-17, 2004)<\/em>, pp. 126-127.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
M. Sugimura, A. Ohta, H. Nakagawa, T. Shibaguchi, S. Higashi, and S. Miyazaki, \u201cEvaluation of Electronic Defect States at Poly-Si\/HfO2<\/sub> interface by Photoelectron Yield Spectroscopy,\u201d 2004 Int. Conf. Solid State Dev. Mat. (SSDM2004), (Tokyo, Japan, Sept. 14-17, 2004)<\/em>, pp. 792-793.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Higashi, H. Kaku, H. Taniguchi, H. Murakami, and S. Miyazaki, \u201cCrystallization of Si Films on Glass Substrate Using Thermal Plasma Jet,\u201d Int. Conf. Polycrystalline Semiconductors 2004 (POLYSE), (Potsdam, Germany, Sept. 5-10, 2004)<\/em>.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
S. Higashi, H. Kaku, H. Murakami, S. Miyazaki, M. Asami, H. Watakabe, N. Ando, and T. Sameshima, \u201cCrystallization of Si Thin Film Using Thermal Plasma Jet and Its Application to Thin-Film Transistor Fabrication,\u201d Dig. Tech. Pap. AM-LCD 04, (Tokyo Japan, Aug. 25-27, 2004), <\/em>pp. 179-180.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, Y. Okamoto, H. Murakami, S. Higashi, and S. Miyazaki, \u201cCharacterization of germanium nanocrystallites grown on quartz by a conductive AFM probe technique,\u201d 2004 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2004), (Sasebo, Japan, Jun. 30 \u2013 Jul. 2, 2004)<\/em>, pp. 277-280.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Murakami, Y. Moriwaki, M. Fujitake, D. Azuma, S. Higashi, and S. Miyazaki, \u201cCharacterization of Atom Diffustion in Polycrystalline Si\/SiO2<\/sub>\/Si Stacked Gate,\u201d 2004 Asia-Pacific Workshop Fundamentals and Applications of Advanced Semiconductor Dev. (AWAD2004), (Sasebo, Japan, Jun. 30 \u2013 Jul. 2, 2004)<\/em>, pp. 189-193.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Kaku, S. Higashi, H. Taniguchi, H. Murakami, and S. Miyazaki, \u201cA New Crystallization Technique of Si Flms on Glass Substrate Using Thermal Plasma Jet,\u201d Abs. 12th<\/sup> Int. Conf. Solid Films Surf. (ICSFS), (Hamamatsu, Japan, Jun. 21-25, 2004)<\/em>, p. 7.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
K. Makihara, H. Deki, H. Murakami, S. Higashi, and S. Miyazaki, \"Control of the Nucleation Density of Si Quantum Dots by Remote Hydrogen Plasma Treatment,\u201d Abs. 12th<\/sup> Int. Conf. Solid Films Surf. (ICSFS), (Hamamatsu, Japan, Jun. 21-25, 2004),<\/em> p. 137.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
N. Kosku, H. Murakami, S. Higashi and S. Miyazaki, \u201cInfluence of Substrate DC Bias on Crystallinity of Si Films Grown at a High Rate from Inductively-Coupled Plasma CVD,\u201d Abs. 12th<\/sup> Int. Conf. Solid Films Surf. (ICSFS), (Hamamatsu, Japan, Jun. 21-25, 2004)<\/em>, p. 202.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
Y. Okamoto, K. Makihara, S. Higashi and S. Miyazaki, \u201cFormation of Microcrystalline Germanium(\u03bcc-Ge:H) Films from Inductively-Coupled Plasma CVD,\u201d Abs. 12th<\/sup> Int. Conf. Solid Films Surf. (ICSFS), (Hamamatsu, Japan, Jun. 21-25, 2004)<\/em>, p. 10.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
H. Nakagawa, A. Ohta, F. Takeno, S. Nagamachi, H. Murakami, S. Higashi, and S. Miyazaki, \u201cCharacterization of Interfacial Oxide Layers in Heterostructures of Hafnium Oxides Formed on NH3<\/sub>-nitrided Si(100),\u201d 2004 Int. Workshop Dielectric Thin Films for Future ULSI Dev. (IWDTF2004), (Tokyo, Japan, May. 26-28, 2004)<\/em>, pp. 35-36.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u306b\u3088\u308b\u77ed\u6642\u9593\u71b1\u51e6\u7406\u904e\u7a0b\u306e\u6e29\u5ea6\u89e3\u6790\u201d\u3001\u7b2c52\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 1016 (2005.3.29-4.1\u3001\u57fc\u7389\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u52a0\u4e45\u3000\u535a\u9686\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5ca1\u7530\u3000\u7adc\u5f25\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308b\u6975\u8584Si\u819c\u306e\u7d50\u6676\u5316\u201d\u3001\u7b2c52\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 947 (2005.3.29-4.1\u3001\u57fc\u7389\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c71\u4e0b\u3000\u4e9c\u5e0c\u5b50\u3001\u5ca1\u672c\u3000\u7965\u88d5\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u6e21\u58c1\u3000\u5275\u3001\u9bab\u5cf6\u3000\u4fca\u4e4b\u3001\u201cGe\/Si\u7a4d\u5c64\u69cb\u9020\u306e\u30a8\u30ad\u30b7\u30de\u30ec\u30fc\u30b6\u30fc\u8a98\u8d77\u7d50\u6676\u6210\u9577\u904e\u7a0b\u306e\u305d\u306e\u5834\u89b3\u6e2c\u201d\u3001\u7b2c52\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 944 (2005.3.29-4.1\u3001\u57fc\u7389\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u6d45\u898b\u3000\u96c5\u5f66\u3001\u6e21\u58c1\u3000\u5275\u3001\u5b89\u85e4\u3000\u4f38\u884c\u3001\u9bab\u5cf6\u3000\u4fca\u4e4b\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305fa-Si\u819c\u306e\u7d50\u6676\u5316\u3068TFT\u5fdc\u7528\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c1\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000PR12\uff08pp.53\uff09\uff082004.11.12-13\u3001\u3042\u3059\u306a\u3089\u4f1a\u8b70\u5834\uff09\uff0e\u30e9\u30f3\u30d7\u30bb\u30c3\u30b7\u30e7\u30f3<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u3092\u7528\u3044\u305fa-Si\u819c\u306e\u7d50\u6676\u5316\u3068TFT\u5fdc\u7528\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c1\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000PS01\uff08pp.57\uff09\uff082004.11.12-13\u3001\u3042\u3059\u306a\u3089\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u52a0\u4e45\u3000\u535a\u9686\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u8c37\u53e3\u3000\u5f18\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308bSi\u8584\u819c\u7d50\u6676\u5316\u904e\u7a0b\u306e\u5b9f\u6642\u9593\u89b3\u6e2c\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c1\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000PS02\uff08pp.58\uff09\uff082004.11.12-13\u3001\u3042\u3059\u306a\u3089\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u9bab\u5cf6\u3000\u4fca\u4e4b\u3001\u6e21\u58c1\u3000\u5275\u3001\u5b89\u85e4\u3000\u4f38\u884c\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30ca\u30ce\u30e1\u30fc\u30bf\u8584\u819c\u30b7\u30ea\u30b3\u30f3\u306e\u30ec\u30fc\u30b6\u7d50\u6676\u5316\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c1\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000PS08\uff08pp.65\uff09\uff082004.11.12-13\u3001\u3042\u3059\u306a\u3089\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c71\u4e0b\u3000\u4e9c\u5e0c\u5b50\u3001\u5ca1\u672c\u3000\u7965\u88d5\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u30cb\u30cf\u30f3\u30b3\u30b9\u30af\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u3000\u6e21\u58c1\u3000\u5275\u3001\u9bab\u5cf6\u3000\u4fca\u4e4b\u3001\u201cSi\u4e0aGe\u8584\u819c\u306e\u30a8\u30ad\u30b7\u30de\u30ec\u30fc\u30b6\u30fc\u8a98\u8d77\u7d50\u6676\u6210\u9577\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c1\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000PS09\uff08pp.65\uff09\uff082004.11.12-13\u3001\u5948\u826f\u5e02\u3042\u3059\u306a\u3089\u4f1a\u8b70\u5834\uff09\uff0e<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6771\u3000\u6e05\u4e00\u90ce\u3001\u201c\u30b2\u30fc\u30c8\u7d76\u7e01\u819c\u5f62\u6210\u6280\u8853\u201d\u3001\u8584\u819c\u6750\u6599\u30c7\u30d0\u30a4\u30b9\u7814\u7a76\u4f1a\u3000\u7b2c1\u56de\u7814\u7a76\u96c6\u4f1a\u3001\u3000PS09\uff08pp.18-23\uff09\uff082004.11.12-13\u3001\u5948\u826f\u5e02\u3042\u3059\u306a\u3089\u4f1a\u8b70\u5834\uff09\uff0e\u30c1\u30e5\u30fc\u30c8\u30ea\u30a2\u30eb<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u52a0\u4e45\u3000\u535a\u9686\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u8c37\u53e3\u3000\u5f18\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u7167\u5c04\u306b\u3088\u308bSi\u8584\u819c\u7d50\u6676\u5316\u904e\u7a0b\u306e\u5b9f\u6642\u9593\u89b3\u6e2c\u201d\u3001\u7b2c65\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 730 (2004.9.1-4\u3001\u6771\u5317\u5b66\u9662\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u5c71\u4e0b\u3000\u4e9c\u5e0c\u5b50\u3001\u5fb3\u6c38\u3000\u9054\u4e5f\u3001\u5ca1\u672c\u3000\u7965\u88d5\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201cSi\u57fa\u677f\u4e0aGe\u8584\u819c\u306e\u30a8\u30ad\u30b7\u30de\u30ec\u30fc\u30b6\u30fc\u8a98\u8d77\u7d50\u6676\u6210\u9577\u201d\u3001\u7b2c65\u56de\u5fdc\u7528\u7269\u7406\u5b66\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 726 (2004.9.1-4\u3001\u6771\u5317\u5b66\u9662\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2003\u5e74\u5ea6<\/p>\n\n\n\n

K. Makihara, Y. Okamoto, H. Nakagawa, H. Murakami, S. Higashi, and S. Miyazaki, \u201cElectrical Characterization of Ge Microcrystallites by Atomic Force Microscopy Using a Conducting Probe,\u201d 16th<\/sup> Symp. Plasma Science for Mat. (SPSM16), (Tokyo, Japan, Jun. 4-5, 2003)<\/em>, p. 115.<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u52a0\u4e45\u3000\u535a\u9686\u3001\u8c37\u53e3\u3000\u5f18\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u6771\u3000\u6e05\u4e00\u90ce\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u306b\u3088\u308ba-Si\u8584\u819c\u306e\u7d50\u6676\u5316\u201d\u3001\u7b2c51\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 1001 (2004.3.28-31\u3001\u6771\u4eac\u5de5\u79d1\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr>
\u6771\u3000\u6e05\u4e00\u90ce\u3001\u52a0\u4e45\u3000\u535a\u9686\u3001\u8c37\u53e3\u3000\u5f18\u3001\u6751\u4e0a\u3000\u79c0\u6a39\u3001\u5bae\u5d0e\u3000\u8aa0\u4e00\u3001\u201c\u71b1\u30d7\u30e9\u30ba\u30de\u30b8\u30a7\u30c3\u30c8\u306b\u3088\u308b\u8584\u819c\u306e\u77ed\u6642\u9593\u71b1\u51e6\u7406\u6280\u8853\u201d\u3001\u7b2c51\u56de\u5fdc\u7528\u7269\u7406\u5b66\u95a2\u4fc2\u9023\u5408\u8b1b\u6f14\u4f1a \u8b1b\u6f14\u4e88\u7a3f\u96c6\u3000No. 2, p. 933 (2004.3.28-31\u3001\u6771\u4eac\u5de5\u79d1\u5927\u5b66).<\/td><\/td><\/td><\/td><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

<\/p>\n","protected":false},"excerpt":{"rendered":"

\u56fd\u969b\u4f1a\u8b70\u30fb\u56fd\u5185\u4f1a\u8b70 2025\u5e74\u5ea6 \u3010Invited\u3011S. Higashi, \u201cSilicon CMOS technology on plastic for biomedical applications,\u201d 18th I […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"sns_share_botton_hide":"","vkExUnit_sns_title":"","_vk_print_noindex":"","sitemap_hide":"","vkExUnit_sitemap":"","_veu_custom_css":"","veu_display_promotion_alert":"common","_exclude_from_list_pages":"","vkexunit_cta_each_option":"","vkExUnit_childPageIndex":"","vkExUnit_pageList_ancestor":"","vkExUnit_contact_enable":"","footnotes":""},"class_list":["post-213","page","type-page","status-publish","hentry"],"veu_head_title_object":{"title":"","add_site_title":""},"yoast_head":"\nConference - \u5e83\u5cf6\u5927\u5b66\u91cf\u5b50\u534a\u5c0e\u4f53\u5de5\u5b66\u7814\u7a76\u5ba4<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/semicon.hiroshima-u.ac.jp\/?page_id=213\" \/>\n<meta property=\"og:locale\" content=\"ja_JP\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Conference - \u5e83\u5cf6\u5927\u5b66\u91cf\u5b50\u534a\u5c0e\u4f53\u5de5\u5b66\u7814\u7a76\u5ba4\" \/>\n<meta property=\"og:description\" content=\"\u56fd\u969b\u4f1a\u8b70\u30fb\u56fd\u5185\u4f1a\u8b70 2025\u5e74\u5ea6 \u3010Invited\u3011S. Higashi, \u201cSilicon CMOS technology on plastic for biomedical applications,\u201d 18th I […]\" \/>\n<meta property=\"og:url\" content=\"https:\/\/semicon.hiroshima-u.ac.jp\/?page_id=213\" \/>\n<meta property=\"og:site_name\" content=\"\u5e83\u5cf6\u5927\u5b66\u91cf\u5b50\u534a\u5c0e\u4f53\u5de5\u5b66\u7814\u7a76\u5ba4\" \/>\n<meta property=\"article:modified_time\" content=\"2026-02-17T07:48:33+00:00\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593\" \/>\n\t<meta name=\"twitter:data1\" content=\"331\u5206\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/semicon.hiroshima-u.ac.jp\\\/?page_id=213\",\"url\":\"https:\\\/\\\/semicon.hiroshima-u.ac.jp\\\/?page_id=213\",\"name\":\"Conference - \u5e83\u5cf6\u5927\u5b66\u91cf\u5b50\u534a\u5c0e\u4f53\u5de5\u5b66\u7814\u7a76\u5ba4\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/semicon.hiroshima-u.ac.jp\\\/#website\"},\"datePublished\":\"2022-03-28T04:09:05+00:00\",\"dateModified\":\"2026-02-17T07:48:33+00:00\",\"breadcrumb\":{\"@id\":\"https:\\\/\\\/semicon.hiroshima-u.ac.jp\\\/?page_id=213#breadcrumb\"},\"inLanguage\":\"ja\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\\\/\\\/semicon.hiroshima-u.ac.jp\\\/?page_id=213\"]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\\\/\\\/semicon.hiroshima-u.ac.jp\\\/?page_id=213#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\\\/\\\/semicon.hiroshima-u.ac.jp\\\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Conference\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/semicon.hiroshima-u.ac.jp\\\/#website\",\"url\":\"https:\\\/\\\/semicon.hiroshima-u.ac.jp\\\/\",\"name\":\"\u5e83\u5cf6\u5927\u5b66\u91cf\u5b50\u534a\u5c0e\u4f53\u5de5\u5b66\u7814\u7a76\u5ba4\",\"description\":\"\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\\\/\\\/semicon.hiroshima-u.ac.jp\\\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"ja\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"Conference - \u5e83\u5cf6\u5927\u5b66\u91cf\u5b50\u534a\u5c0e\u4f53\u5de5\u5b66\u7814\u7a76\u5ba4","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/semicon.hiroshima-u.ac.jp\/?page_id=213","og_locale":"ja_JP","og_type":"article","og_title":"Conference - \u5e83\u5cf6\u5927\u5b66\u91cf\u5b50\u534a\u5c0e\u4f53\u5de5\u5b66\u7814\u7a76\u5ba4","og_description":"\u56fd\u969b\u4f1a\u8b70\u30fb\u56fd\u5185\u4f1a\u8b70 2025\u5e74\u5ea6 \u3010Invited\u3011S. Higashi, \u201cSilicon CMOS technology on plastic for biomedical applications,\u201d 18th I […]","og_url":"https:\/\/semicon.hiroshima-u.ac.jp\/?page_id=213","og_site_name":"\u5e83\u5cf6\u5927\u5b66\u91cf\u5b50\u534a\u5c0e\u4f53\u5de5\u5b66\u7814\u7a76\u5ba4","article_modified_time":"2026-02-17T07:48:33+00:00","twitter_card":"summary_large_image","twitter_misc":{"\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593":"331\u5206"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/semicon.hiroshima-u.ac.jp\/?page_id=213","url":"https:\/\/semicon.hiroshima-u.ac.jp\/?page_id=213","name":"Conference - \u5e83\u5cf6\u5927\u5b66\u91cf\u5b50\u534a\u5c0e\u4f53\u5de5\u5b66\u7814\u7a76\u5ba4","isPartOf":{"@id":"https:\/\/semicon.hiroshima-u.ac.jp\/#website"},"datePublished":"2022-03-28T04:09:05+00:00","dateModified":"2026-02-17T07:48:33+00:00","breadcrumb":{"@id":"https:\/\/semicon.hiroshima-u.ac.jp\/?page_id=213#breadcrumb"},"inLanguage":"ja","potentialAction":[{"@type":"ReadAction","target":["https:\/\/semicon.hiroshima-u.ac.jp\/?page_id=213"]}]},{"@type":"BreadcrumbList","@id":"https:\/\/semicon.hiroshima-u.ac.jp\/?page_id=213#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/semicon.hiroshima-u.ac.jp\/"},{"@type":"ListItem","position":2,"name":"Conference"}]},{"@type":"WebSite","@id":"https:\/\/semicon.hiroshima-u.ac.jp\/#website","url":"https:\/\/semicon.hiroshima-u.ac.jp\/","name":"\u5e83\u5cf6\u5927\u5b66\u91cf\u5b50\u534a\u5c0e\u4f53\u5de5\u5b66\u7814\u7a76\u5ba4","description":"","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/semicon.hiroshima-u.ac.jp\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"ja"}]}},"_links":{"self":[{"href":"https:\/\/semicon.hiroshima-u.ac.jp\/index.php?rest_route=\/wp\/v2\/pages\/213","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/semicon.hiroshima-u.ac.jp\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/semicon.hiroshima-u.ac.jp\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/semicon.hiroshima-u.ac.jp\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/semicon.hiroshima-u.ac.jp\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=213"}],"version-history":[{"count":19,"href":"https:\/\/semicon.hiroshima-u.ac.jp\/index.php?rest_route=\/wp\/v2\/pages\/213\/revisions"}],"predecessor-version":[{"id":599,"href":"https:\/\/semicon.hiroshima-u.ac.jp\/index.php?rest_route=\/wp\/v2\/pages\/213\/revisions\/599"}],"wp:attachment":[{"href":"https:\/\/semicon.hiroshima-u.ac.jp\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=213"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}