The 16th International Workshop on New Group IV Semiconductor Nanoelectronics に参加、招待講演を行いました。

November 17-18, 2025

Laboratory for Nanoelectronics and Spintronics, Research Institute of Electrical Communication, Tohoku University, Sendai, Japan

【招待講演】

東　清一郎（教授）

“In-situ Temperature Monitoring of Silicon Wafer During Plasma Processing by Optical Interference Contactless Thermometry”