2022 International Conference on Solid State Devices and Materials (SSDM2022)で発表を行います。

博士学生がSSDM2022で、タイトル：Development of a Real-Time Temperature Measurement Technique for SiC Wafer During Ultra-Rapid Thermal Annealing Based on Optical-Interference Contactless Thermometry (OICT) の発表を行います。